A study on micro force sensors for microhandling systems M. HorieH. FunabashiK. Ikegami Technical Papers Pages: 105 - 110
Micromechanical structures for optical fibers in board F. LeyssensP. VetterK. Allaert Technical Papers Pages: 111 - 114
Crystallographic and transport properties of lithium ferrite epitaxial films grown by pulsed laser deposition G. BalestrinoS. MartellucciC. Vittoria Technical Papers Pages: 115 - 120
A two-chip accelerometer system for automotive applications F. ShemanskyLj. RisticE. Joseph Technical Papers Pages: 121 - 123
Integration of 3-D shape construction and assembly to realize micro systems M. NakaoY. HatamuraK. Nagai Technical Papers Pages: 124 - 128
Adhesive stabilised and pure flip chips on various substrates under thermocycling S. RzepkaB. WaidhasE. Meusel Technical Papers Pages: 129 - 136
High aspect ratio fabrication method using O2 RIE and electroplating K. MurakamiK. MinamiM. Esashi Technical Papers Pages: 137 - 142
A new type humidity sensor using micro-air-bridge heaters M. KimuraJ. ManakaK. Nagai OriginalPaper Pages: 143 - 148