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Optimization of the molecular sieving properties of amorphous SiCXNY:H hydrogen selective membranes prepared by PECVD

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Abstract

In this work, low frequency PECVD a-SiCxNy:H thin films have been synthesized in the temperature range 25–300 °C from hexamethyldisilazane precursor mixed with ammonia at various concentrations. A relevant correlation has been evidenced between the [N]/[C] atomic ratio in the gaseous phase and in the deposited thin films, allowing both prediction and control of the film microstructure. A simple method based on the analysis of the films FTIR spectra was proposed to determine the value of the [N]/[C] ratio and thus predict or adjust the gas transport properties of the membrane materials. Attractive ideal selectivities α*He/N2 exceeding 90 with He permeance ΠHe > 3.10−7 mol.s−1.m−2.Pa−1 were measured at 150 °C for the films prepared at 300 °C with an optimum [N]/[C] atomic ratio in the range 0.1–1.5. These films behave as molecular sieve membranes with a thermally activated transport of helium.

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References

  1. Y.H. Ma, in Advanced Membrane Technology and Applications, edited by NN. Li, A.G. Fane, W.S.W. Ho, T. Matsuura (John Wiley & Sons Inc., Hoboken, USA, 2008), p. 671

  2. S. Ivanova, O.H. Laguna, M.A. Centeno, A. Eleta, M. Montes, J.A. Odriozola, in Renewable Hydrogen Technologies: Production, Purification, Storage, Applications and Safety, edited by L.M. Gandia, G. Arzamendi, P.M. Dieguez (Elsevier B.V., Amsterdam, The Netherlands, 2013), p. 225

  3. S. Miura, A. Fujisawa, S. Tomekawa, Y. Taniguchi, N. Hanada, M. Ishida, J. Alloys Compd. 580, S414 (2013)

    Article  Google Scholar 

  4. F. Gallucci, E. Fernandez, P. Corengia, M.V. Annaland, Chem. Eng. Sci. 92, 40 (2013)

    Article  Google Scholar 

  5. S.J. Khatib, S.T. Oyama, Sep. Purif. Technol. 111, 20 (2013)

    Article  Google Scholar 

  6. S. Adhikari, S. Fernando, Ind. Eng. Chem. Res. 45, 875 (2006)

    Article  Google Scholar 

  7. B.-K. Sea, E. Soewito, M. Watanabe, K. Kusakabe, S. Morooka, S.S. Kim, Eng. Chem. Res. 37, 2502 (1998)

    Article  Google Scholar 

  8. C. Pusch, H. Hoche, C. Berger, R. Riedel, E. Ionescu, A. Klein, Surf. Coat. Technol. 205, S119 (2011)

    Article  Google Scholar 

  9. S. Guruvenket, S. Andrie, M. Simon, K.W. Johnson, R.A. Sailer, Plasma Process. Polym. 8, 1126 (2011)

    Article  Google Scholar 

  10. S. Peter, M. Gunther, S. Berg, A. Clausner, F. Richter, Vacuum 90, 155 (2013)

    Article  ADS  Google Scholar 

  11. E. Vassallo, A. Cremona, F. Ghezzi, F. Dellera, L. Laguardia, G. Ambrosone, U. Coscia, Appl. Surf. Sci. 252, 7993 (2006)

    Article  ADS  Google Scholar 

  12. L. Latrasse, A. Lacoste, J.C. Sanchez-Lopez, A. Bes, M. Rayar, J. Pelletier, Surf. Coat. Technol. 203, 2343 (2009)

    Article  Google Scholar 

  13. S. Peter, S. Bernuetz, S. Berg, F. Richter, Vacuum 98, 81 (2013)

    Article  ADS  Google Scholar 

  14. D. Kuo, D. Yang, Thin Solid Films 374, 92 (2000)

    Article  ADS  Google Scholar 

  15. J. Huran, A. Valovič, M. Kučera, A. Kleinová, E. KováXXXová, P. Boháček, M. Sekáčová, J. Electr. Eng. 63, 333 (2012)

    Google Scholar 

  16. V.I. Ivashchenko, A.O. Kozak, O.K. Porada, L.A. Ivashchenko, O.K. Sinelnichenko, O.S. Lytvyn, T.V. Tomila, V.J. Malakhov, Thin Solid Films 569, 57 (2014)

    Article  ADS  Google Scholar 

  17. S.K. Ray, C.K. Maiti, N.B. Chakrabarti, J. Elec. Mat. 20, 907 (1991)

    Article  ADS  Google Scholar 

  18. P.S. Hoffmann, N.I. Fainer, O. Baake, M.L. Kosinova, Y.M. Rumyantsev, V.A. Trunova, A. Klein, B. Pollakowski, B. Beckhoff, W. Ensinger, Thin Solid Films 520, 5906 (2012)

    Article  ADS  Google Scholar 

  19. T.P. Smirnova, A.M. Badalian, L.V. Yakovkina, V.V. Kaichev, V.I. Bukhtiyarov, A.N. Shmakov, I.P. Asanov, V.I. Rachlin, A.N. Fomina, Thin Solid Films 429, 144 (2003)

    Article  ADS  Google Scholar 

  20. W. Kafrouni, V. Rouessac, A. Julbe, J. Durand, J. Membr. Sci. 329, 130 (2009)

    Article  Google Scholar 

  21. R. Coustel, M. Haacké, V. Rouessac, J. Durand, M. Drobek, A. Julbe, Micropor. Mesopor. Mat. 191, 97 (2014)

    Article  Google Scholar 

  22. J.H. Scofield, J. Electron Spectrosc. Relat. Phenom. 8, 129 (1976)

    Article  Google Scholar 

  23. S.Y. Park, N. Kim, U.Y. Kim, S.I. Hong, H. Sasabe, Polymer J. 22, 242 (1990)

    Article  Google Scholar 

  24. V.R. Shayapov, Y.M. Rumyantsev, N.I. Fainer, B.M. Ayupov, Russian J. Phys. Chem. A 86, 1716 (2012)

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. Institut Européen des Membranes (UMR 5635 CNRS, ENSCM, UM), Université de Montpellier, cc047, Place Eugène Bataillon, 34095, Montpellier Cedex 5, France

    M. Haacké, V. Rouessac, M. Drobek, S. Roualdès & A. Julbe

  2. Laboratoire de Chimie Physique et Microbiologie pour l’Environnement (CNRS UMR 7564, Université de Lorraine), 405 rue de Vandoeuvre, 54601, Villers-lès-Nancy, France

    R. Coustel

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  1. M. Haacké
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  2. R. Coustel
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  3. V. Rouessac
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  4. M. Drobek
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  5. S. Roualdès
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  6. A. Julbe
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Correspondence to V. Rouessac.

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Haacké, M., Coustel, R., Rouessac, V. et al. Optimization of the molecular sieving properties of amorphous SiCXNY:H hydrogen selective membranes prepared by PECVD. Eur. Phys. J. Spec. Top. 224, 1935–1943 (2015). https://doi.org/10.1140/epjst/e2015-02511-y

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  • DOI: https://doi.org/10.1140/epjst/e2015-02511-y

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