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Ionization fraction of the sputtered metal flux in a hollow cathode magnetron

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Abstract

Results from studies of the parameters of a novel type of plasma source—a hollow cathode magnetron—are presented. The magnetron operates at a gas pressure of 5–20 mTorr, the discharge power being in the range of 0.5–4 kW. At discharge powers exceeding 2 kW, a plasma flow with a density of higher than 1011 cm−3 and length of up to 30 cm forms at the magnetron output. Using a grid quartz crystal microbalance, the ionized copper flux fraction was measured as a function of the gas pressure, discharge power, and distance from the target. At gas pressures of higher than 15 mTorr, the degree of ionization at a distance of 31 cm exceeds 50%.

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Authors and Affiliations

  1. Moscow State Forest University, Pervaya Institutskaya ul. 1, Mytishchi, Moscow oblast, 141005, Russia

    Yu. P. Tsar’gorodtsev, N. P. Poluektov, I. I. Usatov, A. G. Evstigneev & I. A. Kamyschov

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  1. Yu. P. Tsar’gorodtsev
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  2. N. P. Poluektov
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  3. I. I. Usatov
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  4. A. G. Evstigneev
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  5. I. A. Kamyschov
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Correspondence to Yu. P. Tsar’gorodtsev.

Additional information

Original Russian Text © Yu.P. Tsar’gorodtsev, N.P. Poluektov, I.I. Usatov, A.G. Evstigneev, I.A. Kamyschov, 2014, published in Fizika Plazmy, 2014, Vol. 40, No. 9, pp. 857–863.

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Tsar’gorodtsev, Y.P., Poluektov, N.P., Usatov, I.I. et al. Ionization fraction of the sputtered metal flux in a hollow cathode magnetron. Plasma Phys. Rep. 40, 754–759 (2014). https://doi.org/10.1134/S1063780X14090086

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  • DOI: https://doi.org/10.1134/S1063780X14090086

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