Abstract
Controlled laser thermal cleavage of crystalline quartz has been simulated. The thermoelastic fields formed in a square single-crystal quartz plate as a result of successive laser heating and exposure to coolant have been calculated for five different versions specified by the crystal cut orientation and direction of laser beam displacement. The results have been verified experimentally using a CO2 laser. The simulation results can be used in the electronics industry to optimize laser cutting of quartz crystals.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
V. S. Kondratenko, RF Patent No. 2024441.
S. V. Shalupaev, E. B. Shershnev, A. N. Serdyukov, et al., Ceram. Polish Ceram. Bull. 65, 75 (2001).
V. K. Sysoev, B. P. Papchenko, A. V. Zakharchenko, et al., Opt. Zh. 71(2), 65 (2004).
C. Tsai and H. Chen, J. Mater. Proc. Technol. 136, 166 (2003).
S. V. Shalupaev, E. B. Shershnev, Yu. V. Nikityuk, et al., Opt. Zh. 73(5), 62 (2005).
A. S. Naumov, Candidate’s Dissertation in Technical Sciences (MGUPI, Moscow, 2007).
A. N. Serdyukov, S. V. Shalupaev, and Yu. V. Nikityuk, Crystallogr. Rep. 55(6), 933 (2010).
V. S. Kondratenko and P. D. Gindin, RF Patent No. 2224648.
P. D. Gindin, Doctoral Dissertation in Technical Sciences (MGUPI, Moscow, 2009) [in Russian].
P. Heyliger, H. Ledbetter, and S. Kim, J. Acoust. Soc. Am. 114(2), 644 (2003).
N. N. Shabrov, Finite-Element Method for Designing Items of Thermal Engines (Mashinostroenie, Leningrad, 1983) [in Russian].
L. D. Kovalenko, Fundamentals of Thermoelasticity (Naukova Dumka, Kiev, 1970) [in Russian].
G. P. Karzov, Physicomechanical Simulation of Fracture Processes (Politekhnika, St. Petersburg, 1993) [in Russian].
L. I. Glyukman, Piezoelectric Quartz Resonators (Radio i svyaz’, Moscow, 1981) [in Russian].
A. A. Blistanov, V. S. Bondarenko, and V. V. Chkalova, Acoustic Crystals (Nauka, Moscow, 1982) [in Russian].
Yu. V. Koritskii, V. V. Pasynkova, and B. M. Tareeva, Handbook on Electrotechnical Materials (Energoatomizdat, Leningrad, 1988) [in Russian].
T. Lackner, J. Electron. Mater. 18, 19 (1989).
W. Nowacki, Dynamic Problems of Thermoelasticity (Noordhoff International Publ., 1966; Mir, Moscow, 1970).
A. G. Smagin and M. I. Yaroslavskii, Piezoelectricity of Quartz and Quartz Resonators (Energiya, Moscow, 1970) [in Russian].
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.N. Serdyukov, E.B. Shershnev, Yu.V. Nikityuk, V.F. Sholokh, S.I. Sokolov, 2012, published in Kristallografiya, 2012, Vol. 57, No. 6, pp. 879–885.
Rights and permissions
About this article
Cite this article
Serdyukov, A.N., Shershnev, E.B., Nikityuk, Y.V. et al. Features of controlled laser thermal cleavage of crystal quartz. Crystallogr. Rep. 57, 792–797 (2012). https://doi.org/10.1134/S1063774512060120
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S1063774512060120