Abstract
The conversion of SiCl4 into Si has been achieved from reduction by a hydrogen plasma produced in an arc heater. As the results (conversion yield about 60%) are far from chemical equilibrium predictions, a kinetic model is proposed using the few kinetic data available in the literature and a temperature history of the reactants deduced from measurements of the temperatures and velocities of the flowing chemical mixture.
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Coudert, J.F., Bourdin, E. & Fauchais, P. Kinetic modelling of the reduction of SiCl4 in an arc heater for the production of silicon. Plasma Chem Plasma Process 2, 399–419 (1982). https://doi.org/10.1007/BF00567565
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DOI: https://doi.org/10.1007/BF00567565