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Monitoring Contaminant Particles in Gases and Liquids: A Review

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Particles in Gases and Liquids 1

Abstract

In the microelectronics and pharmaceutical industries especially, particles microns in size and even smaller diminish the quality and quantity of the products produced. To reduce losses due to contamination, we need to detect particles in air, in other gases, and in liquids, as well as on surfaces. Various methods are discussed here. The methods using the scattering of light predominate currently.

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  1. IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY, 10598, USA

    Douglas W. Cooper

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  1. Douglas W. Cooper
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  1. IBM US Technical Education, Thornwood, New York, USA

    K. L. Mittal

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© 1989 Plenum Press, New York

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Cooper, D.W. (1989). Monitoring Contaminant Particles in Gases and Liquids: A Review. In: Mittal, K.L. (eds) Particles in Gases and Liquids 1. Springer, Boston, MA. https://doi.org/10.1007/978-1-4613-0793-8_1

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  • DOI: https://doi.org/10.1007/978-1-4613-0793-8_1

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