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Surface roughness measurement and analysis of mechanical parts based on digital holography

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Abstract

We measure the surface roughness of the mechanical parts based on digital holography. A digital off-axis hologram recording setup for reflective samples is built. Firstly, the height reconstruction error 2.3% of the setup is calibrated by using the quartz step height standard (VLSI-SHS-880QC). Then, the standard scribed-line model and the grinding roughness specimen are selected as the test samples and their surface roughness are 0.095 6 μm and 0.025 3 μm, with errors 6.3%, 0.9%, respectively. The results are in good agreement with the given roughness parameters. At last, we also analyze the window effect of the filter on the roughness measurement value based on digital holography. In conclusion, the paper demonstrated effectively that the digital holography could provide the surface feature for the roughness measurement with high accuracy.

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Acknowledgments

The Young Scientists Fund of the Natural Science Foundation of China(Grant No. 61107004)

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Authors and Affiliations

  1. Department of Precision Mechanical Engineering, Shanghai University, Shanghai, 200072, P. R. China

    Wen-jing Zhou, Ke-qin Peng & Ying-jie Yu

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  1. Wen-jing Zhou
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  2. Ke-qin Peng
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  3. Ying-jie Yu
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Correspondence to Wen-jing Zhou.

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Zhou, Wj., Peng, Kq. & Yu, Yj. Surface roughness measurement and analysis of mechanical parts based on digital holography. Adv. Manuf. 4, 217–224 (2016). https://doi.org/10.1007/s40436-016-0146-5

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  • DOI: https://doi.org/10.1007/s40436-016-0146-5

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