Abstract
This paper describes an ultra-high pressure sensor which is in urgent need and widely used in defense industry and petroleum industry. It is designed on the combination of micro Silicon on Insulator (SOI) solid piezoresistive chip based on Micro Electro Mechanical Systems (MEMS) technique and cylindrical elastic body that could successfully convert dynamic ultra-high pressure measurement in explosion to strain measurement. Performances of the sensor including size, sensitivity, and linearity are investigated with experiment data. It’s proved that the dynamic ultra-high sensor in the range of 2GPa in this paper is successful in pressure measurement in explosion. The research of ultra-high pressure sensor in this paper could not only provide a reference for the improvement of explosive property, but also lay a foundation for research of pressure sensor in the range of 10GPa of the next step.
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This paper was recommended for publication in revised form by Associate Editor Yong Tae Kim
Yulong Zhao is working in the Department of Mechanical Engineering of Xi’an Jiaotong University, China. He received his B.S., M.S. and Ph.D. degree in 1991, 1999 and 2003, respectively. His research interests are MEMS sensors and micro/nano manufacturing technology.
Xudong Fang received his B.S. in Xi’an Jiaotong University in 2008.His research interests are micro sensors and MEMS technology.
Zhuangde Jiang received his B.S. and M.S. in Xi’an Jiaotong University in 1977, 1988,respectively. His research interests are MEMS and Nano manufacturing technology, Precise instrument and Sensor technology, Precise optical electric measurement technology, Precise and Super-precise manufacturing technology.
Libo Zhao, Ph.D., he received his B.S., M.S. and Ph.D. in Xi’an Jiaotong University in 2000, 2003 and 2007, respecttively. He is postdoctoral fellow of TsingHua University now, and his research interests are MEMS sensors and micro/nano manufacturing technology.
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Zhao, Y., Fang, X., Jiang, Z. et al. An ultra-high pressure sensor based on SOI piezoresistive material. J Mech Sci Technol 24, 1655–1660 (2010). https://doi.org/10.1007/s12206-010-0515-0
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DOI: https://doi.org/10.1007/s12206-010-0515-0