Abstract
We propose a novel adaptive technique based on pseudo-random (PN) sequences for self-calibration and self-testing of MEMS-based inertial sensors (accelerometers and gyroscopes). The method relies on using a parameterized behavioral model implemented on FPGA, whose parameters values are adaptively tuned, based on the response to test pseudo-random actuation of the physical structure. Dedicated comb drives actuate the movable mass with binary maximum length pseudo-random sequences of small amplitude, to keep the device within the linear operating regime. The frequency of the stimulus is chosen within the mechanical spectral operating range of the micro-device, such that the induced response leads to the identification of the mechanical transfer function, and to the tuning of the associated digital behavioral model. In case of a micro-gyroscope, experimental results demonstrate the adaptive tracking of the damping coefficient from 5.57 × 10−5 Kg/s to 7.12 × 10−5 Kg/s and of the stiffness coefficient from 132 N/m to 137.7 N/m. In the case of a MEMS accelerometer, the damping and stiffness coefficients are correctly tracked from 3.4 × 10−3 Kg/s and 49.56 N/m to 4.57 × 10−3 Kg/s and 51.48 N/m, respectively—the former values are designer-specified target values, while the latter are experimentally measured parameters for fabricated devices operating in a real environment. Hardware resources estimation confirms the small area the proposed algorithm occupies on the targeted FPGA device.
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Notes
Portion of this Manuscript has appeared as a conference abstract (Kansal et al 2011[8])
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Acknowledgment
The authors would like to thank CMC Microsystems, MITACS, Auto21 Network of Centres of Excellence, and the Natural Sciences and Engineering Research Council of Canada (NSERC) for making this research possible.
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Sarraf, E.H., Kansal, A., Sharma, M. et al. FPGA-based Novel Adaptive Scheme Using PN Sequences for Self-Calibration and Self-Testing of MEMS-based Inertial Sensors. J Electron Test 28, 599–614 (2012). https://doi.org/10.1007/s10836-012-5336-x
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DOI: https://doi.org/10.1007/s10836-012-5336-x