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RF VCO tuning using MEMS piezoelectric actuated variable inductors

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Abstract

This paper presents a study on the use of microsystems technology in the design of radio frequency voltage-controlled oscillators. In particular, the application of a micro-electro-mechanical systems (MEMS) based variable inductor for frequency tuning purposes is presented. Although traditionally a MEMS variable inductor is considered as a means to extend the tuning range, in this work it is shown that with correct inductor design it is also possible to facilitate and improve the voltage-controlled oscillator design in terms of phase noise response and power consumption in comparison to a design based on standard capacitive tuning.

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Notes

  1. Magnetostriction is a property of ferromagnetic materials that causes them to change their shape when subjected to a magnetic field or the on the other hand the change of their magnetic susceptibility when subjected to a mechanical stress.

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Acknowledgments

The authors would like to thank the French Embassy in Malta for providing the necessary funding to Owen Casha, to be able to follow an internship at CEA-LETI (Grenoble, France) as part of his PhD studies, during which he was studying the utilisation of MEMS tunable inductors in the design of wideband voltage-controlled oscillators. In addition, the authors would like to thank Bernard Viala and Jean P. Michel at Spintec (CEA) for their support and guidance during the investigation.

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Authors and Affiliations

  1. Department of Microelectronics and Nanoelectronics, Faculty of Information and Communication Technology, University of Malta, Msida, Malta

    Owen Casha, Ivan Grech, Joseph Micallef & Edward Gatt

  2. Commissariat à l’Énergie Atomique (CEA), 17, Rue des Martyrs, 38054, Grenoble Cedex 9, France

    Dominique Morche

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  1. Owen Casha
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  2. Ivan Grech
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  3. Joseph Micallef
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  4. Edward Gatt
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  5. Dominique Morche
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Correspondence to Owen Casha.

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Casha, O., Grech, I., Micallef, J. et al. RF VCO tuning using MEMS piezoelectric actuated variable inductors. Analog Integr Circ Sig Process 68, 193–205 (2011). https://doi.org/10.1007/s10470-011-9597-6

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  • DOI: https://doi.org/10.1007/s10470-011-9597-6

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