Metallic waveguide mirrors in polymer film waveguides

Abstract

A technology for the fabrication of metallic waveguide mirrors is developed. Plane and curved waveguide mirrors, the latter acting in the same way as cylindrical lenses, are realized in benzocyclobutene (BCB) film waveguides. The waveguide mirror structure is dry-etched into the BCB film waveguide. To enhance the reflectivity of the waveguide mirrors, the waveguide edge is metallized. The BCB film waveguide mirrors are characterized with respect to waveguide attenuation and mirror reflectivity. The waveguide attenuation of the processed BCB waveguide is 0.5 dB/cm. Ag-coated BCB waveguide mirrors show a reflectivity of 71%. The efficiency of total internal reflection (TIR, i.e. in the case without metallization) at the dry-etched waveguide edge is 74%. As an application of the BCB waveguide mirrors a hybrid integrated optical module for Fourier-optical transverse mode selection in broad area lasers (BAL) is proposed.