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The characteristics of laser micro drilling using a Bessel beam

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Abstract

A Bessel beam is suitable for laser micro-fabrication because it possesses both a micron-sized focal spot and a deep focal depth. As the influence of focusing aberrations is much smaller than that of a convex lens, the generation of a Bessel beam using an axicon is very practical. In the case of laser micro drilling of austenitic stainless steel with a Bessel beam, suitable processing conditions were investigated. The threshold fluence to make a through hole increased with an increase in the sample thickness. For samples with the same thickness, the threshold fluence increased with an increase in the crossing angle. A small crossing angle Bessel beam can drill a deep hole with a small threshold fluence. A through hole with a diameter smaller than 10 μm can be made on a stainless steel sheet 20 μm thick by using a Bessel beam with a large crossing angle. The taper of the hole drilled with the Bessel beam is smaller than that with the focused beam from the convex lens.

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Authors and Affiliations

  1. National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba East, Namiki 1-2-1, Tsukuba, Ibaraki, 305-8564, Japan

    Y. Matsuoka, Y. Kizuka & T. Inoue

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  1. Y. Matsuoka
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  2. Y. Kizuka
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  3. T. Inoue
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Correspondence to Y. Matsuoka.

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PACS

52.38.Mf; 42.62.Cf; 42.79.Bh

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Matsuoka, Y., Kizuka, Y. & Inoue, T. The characteristics of laser micro drilling using a Bessel beam. Appl. Phys. A 84, 423–430 (2006). https://doi.org/10.1007/s00339-006-3629-6

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  • DOI: https://doi.org/10.1007/s00339-006-3629-6

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