References
S. Matsumoto, Y. Sato, M. Tsutsumi andN. Setaka,J. Mater. Sci. 17 (1982) 3106.
M. Kamo, Y. Sato, S. Matsumoto andN. Setaka,J. Cryst. Growth 62 (1983) 642.
B. V. Spitsyn, L. L. Bouilov andB. V. Derjaguin,J. Cryst. Growth 52 (1981) 219.
S. Aisenberg andR. Chabot,J. Appl. Phys. 42 (1971) 2953.
E. G. Spencer, P. H. Schmidt, D. C. Joy andF. G. Sansaione,Appl. Phys. Lett. 29 (1976) 118.
C. Weissmantel, K. Bewilogua, D. Dietrich, H. J. Erier, H. Jhinneberg, S. Klose, W. Nowick andG. Reisse,Thin solid Films 72 (1980) 19.
T. Mohri andY. Namba,J. Appl. Phys. 55 (1984) 3276.
R. F. Davis, Z. Sitar, B. E. Williams, H. S. Kong, H. J. Kim, J. W. Palmour, J. A. Edmond, J. Ryu, J. T. Glass andC. H. Carter,Mater. Sci. Engng B1 (1988) 77.
A. T. Collins, Diamond, SiC and related wide bandgap semiconductors162 (1990) 3.
W. A. Yarbrough,J. Vac. Sci. Technol. A9 (1990) 1145.
G. Q. Ke, Z. J. Xing, X. T. Yin, K. T. Chen andY. H. Shen,Vacuum 43 (1990) 1043.
B. R. Stoner andJ. T. Glass,Appl. Phys. Lett. 60 (1992) 698.
General Technology Center of Japan, Diamond thin Film Technology (1990) p. 119.
Mutsukasu Kamo, Yoichiro Sato andSobuo Setaka,Jpn J. Chem. 10 (1984) 1642.
D. Turnbull,J. Chem. Soc. 18 (1950) 198.
D. A. Poter andK. E. Eastering, in “Phase transformations in metals and alloys” (Van Nostrand Reinhold, New York 1980) p. 197.
J. Ferron andE. C. Goldberg,Surf. Sci. 275 (1992) 114.
R. K. Wild,Vacuum 31 (1981) 183.
T. W. Haas andJ. T. Grant,Appl. Phys. Lett. 16 (1970) 172.
S. Craig andG. L. Harding,Surf. Sci. 124 (1983) 591.
T. W. Haas, J. T. Grant andG. J. Dooley, in “Adsorption-desorption phenomena” (Academic Press, 1972) p. 359.
Idem., J. Appl. Phys. 43 (1972) 1853.
L. Ramovist,ibid. 42 (1971) 2113.
P. G. Lurie andJ. M. Wilson,Surf. Sci. 65 (1977) 476.
F. Pons, L. Le. Hericy andJ. P. Langeron,ibid. 69 (1977) 547.
M. P. Hooker andJ. T. Grant,ibid. 62 (1977) 21.
R. Ducoros, G. Piquard, B. Weber andA. Carrsuto,ibid. Surf. Sci. (1976) 513.
G. W. Tyndall andN. P. Hacker, Diamond, SiC and related wide bandgap semiconductors162 (1990) 173.
Author information
Authors and Affiliations
Rights and permissions
About this article
Cite this article
Lee, C.R., Leem, J.Y. & Chun, B.S. The AES and micro-raman characteristics of diamond thin films grown by EACVD as the nucleation free energy increases. J Mater Sci Lett 14, 361–365 (1995). https://doi.org/10.1007/BF00592150
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1007/BF00592150