Abstract
A novel dual-pulse voltage driver has been proposed to reduce dielectric charging in micro-electromechanical system (MEMS) switch, leading to a longer switch lifetime. Mathematical and transient circuit models have been utilized to simulate dielectric charging in the RF MEMS switch, enabling the analysis of charge built-up at the switch dielectric and substrate brought about by the actuation voltage curve used. The proposed dual-pulse actuation signal has shown to improve the lifetime of the RF MEMS switch as it minimizes the charge built-up during its long continuous operation. Practical experiment on the commercial TeraVicta TT712-68CSP MEMS switch shows that the proposed actuation voltage can reduce the pull in/out voltage shift and therefore prolong the switch lifetime. The technique has also shown to reduce switching bounces.
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Hung, L.C., Wong, W.S.H. (2010). Longer MEMS Switch Lifetime Using Novel Dual-Pulse Voltage Driver. In: Ao, SI., Gelman, L. (eds) Electronic Engineering and Computing Technology. Lecture Notes in Electrical Engineering, vol 60. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-8776-8_5
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DOI: https://doi.org/10.1007/978-90-481-8776-8_5
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