Skip to main content

Reliability Issues in AlGaN/GaN High Electron Mobility Transistors

  • Chapter
  • First Online:
Materials and Reliability Handbook for Semiconductor Optical and Electron Devices
  • 4745 Accesses

Abstract

As AlGaN/GaN high electron mobility transistors gain commercial acceptance for use in high-power and high-frequency applications, it is becoming ever important to understand the degradation mechanisms that drive failure in the field. Because of the complex nature and multifaceted operation modes of these devices, reliability studies must go beyond the typical Arrhenius accelerated life tests. To do this, we investigated the electric field-driven degradation in devices with different gate metallization, device dimensions, and electric field mitigation techniques (such as source field plate) and the effect of device fabrication processes for both dc and RF stress conditions.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 259.00
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 329.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 329.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

References

  1. G. Meneghesso, G. Verzellesi, F. Danesin, F. Rampazzo, F. Zanon, A. Tazzoli, M. Meneghini, E. Zanoni, Reliability of GaN high-electron-mobility transistors: state of the art and perspectives. IEEE Trans. Device Mater. Reliab. 8, 332–343 (2008)

    Article  Google Scholar 

  2. S. Singhal, J.C. Roberts, P. Rajagopal, T. Li, A.W. Hanson, R. Therrien, J.W. Johnson, I.C. Kizilyalli, K.J. Linthicum, GaN-ON-Si failure mechanisms and reliability improvements, in Reliability Physics Symposium Proceedings, 2006. 44th Annual., IEEE International, 2006 Boston, MA, pp. 95–98 (2006)

    Google Scholar 

  3. A. Sozza, C. Dua, E. Morvan, B. Grimber, S.L. Delage, A 3000 hours DC life test on AlGaN/GaN HEMT for RF and microwave applications. Microelectron. Reliab. 45, 1617–1621 (2005)

    Article  Google Scholar 

  4. E. Zanoni, G. Meneghesso, M. Meneghini, A. Tazzoli, N. Ronchi, A. Stocco, F. Zanon, A. Chini, G. Verzellesi, A. Cetronio, C. Lanzieri, and M. Peroni, Long-term stability of Gallium Nitride high electron mobility transistors: a reliability physics approach, in Microwave Integrated Circuits Conference, 2009. EuMIC 2009 Strasbourg, France. European, pp. 212–217 (2009)

    Google Scholar 

  5. M. Asif Khan, High electron mobility transistor based on a GaN-AlxGa1-xN heterojunction. Appl. Phys. Lett. 63, 1214 (1993)

    Article  ADS  Google Scholar 

  6. C. Rivera, The role of electric field-induced strain in the degradation mechanism of AlGaN/GaN high-electron-mobility transistors. Appl. Phys. Lett. 94, 053501 (2009)

    Article  ADS  Google Scholar 

  7. M. Dammann, A. Leuther, F. Benkhelifa, T. Feltgen, W. Jantz, Reliability and degradation mechanism of AlGaAs/InGaAs and InAlAs/InGaAs HEMTs. Physica Status Solidi A 195, 81–86 (2003)

    Article  ADS  Google Scholar 

  8. M. Piazza, C. Dua, M. Oualli, E. Morvan, D. Carisetti, F. Wyczisk, Degradation of TiAlNiAu as ohmic contact metal for GaN HEMTs. Microelectron. Reliab. 49, 1222–1225 (2009)

    Article  Google Scholar 

  9. U. Chowdhury, J.L. Jimenez, C. Lee, E. Beam, P. Saunier, T. Balistreri, S.Y. Park, T. Lee, J. Wang, M.J. Kim, J. Joh, J.A. del Alamo, TEM observation of crack- and pit-shaped defects in electrically degraded GaNHEMTs. IEEE Electron Device Lett. 29, 1098–1100 (2008)

    Article  ADS  Google Scholar 

  10. J.A. del Alamo, J. Joh, GaN HEMT reliability. Microelectron. Reliab. 49, 1200–1206 (2009)

    Article  Google Scholar 

  11. J. Joh, J.A. del Alamo, Mechanisms for electrical degradation of GaN high-electron mobility transistors, in Electron Devices Meeting, 2006. IEDM ‘06. International, 2006 San Francisco, CA, pp. 1–4 (2006)

    Google Scholar 

  12. M. Faqir, G. Verzellesi, A. Chini, F. Fantini, F. Danesin, G. Meneghesso, E. Zanoni, C. Dua, Mechanisms of RF current collapse in AlGaN-GaN high electron mobility transistors. IEEE Trans. Device Mater. Reliab. 8, 240–247 (2008)

    Article  Google Scholar 

  13. A. Sarua, Piezoelectric strain in AlGaN/GaN heterostructure field-effect transistors under bias. Appl. Phys. Lett. 88, 103502 (2006)

    Article  ADS  Google Scholar 

  14. G. Meneghesso, Hot carrier effects in AlGaAs/InGaAs high electron mobility transistors: failure mechanisms induced by hot carrier testing. J. Appl. Phys. 82, 5547 (1997)

    Article  ADS  Google Scholar 

  15. M.J. Uren, D.G. Hayes, R.S. Balmer, D.J. Wallis, K.P. Hilton, J.O. Maclean, T. Martin, C. Roff, P. McGovern, J. Benedikt, P.J. Tasker, Control of Short-Channel Effects in GaN/AlGaN HFETs, in European Microwave Integrated Circuits Conference, 2006. The 1st, 2006. Rome, Italy, pp. 65–68 (2006)

    Google Scholar 

  16. M. Buchta, K. Beilenhoff, H. Blanck, J. Thorpe, R. Behtash, S. Heckmann, H. Jung, Z. Ouarch, M. Camiade, GaN technologies and developments: status and trends, in Microwave and Millimeter Wave Technology (ICMMT), 2010 International Conference on, 2010 Chicago, ILL., pp. 488–491 (2010)

    Google Scholar 

  17. M.A. Mastro, J.R. LaRoche, N.D. Bassim, C.R. Eddy, Simulation on the effect of non-uniform strain from the passivation layer on AlGaN/GaN HEMT. Microelectron. J. 36, 705–711 (2005)

    Article  Google Scholar 

  18. D.K. Schroder, Semiconductor Material and Device Characterization, 2006th edn. (IEEE Press/Wiley, Piscataway/Hoboken, 2006)

    Google Scholar 

  19. O. Oda, Compound Semiconductor Bulk Materials and Characterizations (World Scientific, Singapore/Hackensack, 2007)

    Book  Google Scholar 

  20. L. Brillson, Nanoscale luminescence spectroscopy of defects at buried interfaces and ultrathin films. J. Vac. Sci. Technol. B 19, 1762 (2001)

    Article  Google Scholar 

  21. M. Micovic, A. Kurdoghlian, P. Hashimoto, M. Hu, M. Antcliffe, P. J. Willadsen, W. S. Wong, R. Bowen, I. Milosavljevic, A. Schmitz, M. Wetzel, and D. H. Chow, GaN HFET for W-band power applications, in Electron Devices Meeting, 2006. IEDM '06. International, 2006 Washington, DC, pp. 1–3 (2006)

    Google Scholar 

  22. S. Arulkumaran, High-temperature effects of AlGaN/GaN high-electron-mobility transistors on sapphire and semi-insulating SiC substrates. Appl. Phys. Lett. 80, 2186 (2002)

    Article  ADS  Google Scholar 

  23. S.A. Vitusevich, S.V. Danylyuk, N. Klein, M.V. Petrychuk, A.Y. Avksentyev, V.N. Sokolov, V.A. Kochelap, A.E. Belyaev, V. Tilak, J. Smart, A. Vertiatchikh, L.F. Eastman, Separation of hot-electron and self-heating effects in two-dimensional AlGaN/GaN-based conducting channels. Appl. Phys. Lett. 82, 748–750 (2003)

    Article  ADS  Google Scholar 

  24. S.A. Vitusevich, A.M. Kurakin, N. Klein, M.V. Petrychuk, A.V. Naumov, A.E. Belyaev, AlGaN/GaN high electron mobility transistor structures: self-heating effect and performance degradation. IEEE Trans. Device Mater. Reliab. 8, 543–548 (2008)

    Article  Google Scholar 

  25. R. Gaska, A. Osinsky, J.W. Yang, M.S. Shur, Self-heating in high-power AlGaN-GaN HFETs. IEEE Electron Device Lett. 19, 89–91 (1998)

    Article  ADS  Google Scholar 

  26. Y.C. Chou, D. Leung, I. Smorchkova, M. Wojtowicz, R. Grundbacher, L. Callejo, Q. Kan, R. Lai, P.H. Liu, D. Eng, A. Oki, Degradation of AlGaN/GaN HEMTs under elevated temperature lifetesting. Microelectron. Reliab. 44, 1033–1038 (2004)

    Article  Google Scholar 

  27. M. Kuball, Measurement of temperature distribution in multifinger AlGaN/GaN heterostructure field-effect transistors using micro-Raman spectroscopy. Appl. Phys. Lett. 82, 124 (2003)

    Article  ADS  Google Scholar 

  28. T. Batten, A. Manoi, M.J. Uren, T. Martin, M. Kuball, Temperature analysis of AlGaN/GaN based devices using photoluminescence spectroscopy: challenges and comparison to Raman thermography. J. Appl. Phys. 107, 074502–074502-5 (2010)

    Article  ADS  Google Scholar 

  29. T. Batten, J.W. Pomeroy, M.J. Uren, T. Martin, M. Kuball, Simultaneous measurement of temperature and thermal stress in AlGaN/GaN high electron mobility transistors using Raman scattering spectroscopy. J. Appl. Phys. 106, 094509–094509-4 (2009)

    Article  ADS  Google Scholar 

  30. J. Kim, J.A. Freitas Jr., J. Mittereder, R. Fitch, B.S. Kang, S.J. Pearton, F. Ren, Effective temperature measurements of AlGaN/GaN-based HEMT under various load lines using micro-Raman technique. Solid-State Electron. 50, 408–411 (2006)

    Article  ADS  Google Scholar 

  31. R. Aubry, J.C. Jacquet, C. Dua, H. Gerard, B. Dessertenne, M.A. di Forte-Poisson, Y. Cordier, S.L. Delage, Thermal characterisation of AlGaN/GaN HEMTs using micro-Raman scattering spectroscopy and pulsed I-V measurements, in Silicon Carbide and Related Materials 2003 Nice, France, Pts 1 and 2, vol. 457–460, pp. 1625–1628 (2004)

    Google Scholar 

  32. C. Chih-Yang, E.A. Douglas, K. Jinhyung, L. Liu, L. Chien-Fong, C. Byung-Hwan, D.J. Cheney, B.P. Gila, F. Ren, G.D. Via, D.A. Cullen, Z. Lin, D.J. Smith, J. Soohwan, S.J. Pearton, Electric-field-driven degradation in off-state step-stressed AlGaN/GaN high-electron mobility transistors. IEEE Trans. Device Mater. Reliab. 11, 187–193 (2011)

    Article  Google Scholar 

  33. R. Coffie, Y. Chen, I.P. Smorchkova, B. Heying, V. Gambin, W. Sutton, Y.C. Chou, W.B. Luo, M. Wojtowicz, A. Oki, Temperature and voltage dependent RF degradation study in Algan/gan HEMTs, in Reliability Physics Symposium, 2007. Toronto, Canada. Proceedings. 45th Annual. IEEE International, pp. 568–569 (2007)

    Google Scholar 

  34. S. Demirtas, J.A. del Alamo, Critical voltage for electrical reliability of GaN high electron mobility transistors on Si substrate, in Reliability of Compound Semiconductors Digest (ROCS), 2009. Boston, MA, pp. 53–56 (2009)

    Google Scholar 

  35. S. Demirtas, J. Joh, J.A. del Alamo, High voltage degradation of GaN high electron mobility transistors on silicon substrate. Microelectron. Reliab. 50, 758–762 (2010)

    Article  Google Scholar 

  36. J. Joh, J.A. del Alamo, J. Jimenez, A simple current collapse measurement technique for GaN high-electron mobility transistors. IEEE Electron Device Lett. 29, 665–667 (2008)

    Article  ADS  Google Scholar 

  37. J.W. Joh, J.A. del Alamo, Critical voltage for electrical degradation of GaN high-electron mobility transistors. IEEE Electron Device Lett. 29, 287–289 (2008)

    Article  ADS  Google Scholar 

  38. J. Joh, F. Gao, T. Palacios, J.A. del Alamo, A model for the critical voltage for electrical degradation of GaN high electron mobility transistors. Microelectron. Reliab. 50, 767–773 (2010)

    Article  Google Scholar 

  39. C.-F. Lo, L. Liu, T.-S. Kang, R. Davies, B.P. Gila, S.J. Pearton, I.I. Kravchenko, O. Laboutin, Y. Cao, W.J. Johnson, F. Ren, Improvement of off-state stress critical voltage by using Pt-Gated AlGaN/GaN high electron mobility transistors. Electrochem. Solid-State Lett. 14, H264–H267 (2011)

    Article  Google Scholar 

  40. E. Zanoni, F. Danesin, M. Meneghini, A. Cetronio, C. Lanzieri, M. Peroni, G. Meneghesso, Localized damage in AlGaN/GaN HEMTs induced by reverse-bias testing. IEEE Electron Device Lett. 30, 427–429 (2009)

    Article  ADS  Google Scholar 

  41. P. Ivo, A. Glowacki, R. Pazirandeh, E. Bahat-Treidel, R. Lossy, J. Wurfl, C. Boit, G. Trankle, Influence of GaN cap on robustness of AlGaN/GaN HEMTs, in Reliability Physics Symposium, 2009. Portland, OR. I.E. International, pp. 71–75 (2009)

    Google Scholar 

  42. T. Beechem, A. Christensen, S. Graham, D. Green, Micro-Raman thermometry in the presence of complex stresses in GaN devices. J. Appl. Phys. 103, 124501–124501-8 (2008)

    Article  ADS  Google Scholar 

  43. J. Jungwoo, X. Ling, J.A. del Alamo, Gate current degradation mechanisms of GaN high electron mobility transistors, in Electron Devices Meeting, 2007. IEDM 2007. Washington, DC. IEEE International, pp. 385–388 (2007)

    Google Scholar 

  44. J. Joh, J.A. del Alamo, K. Langworthy, S. Xie, T. Zheleva, Role of stress voltage on structural degradation of GaN high-electron-mobility transistors. Microelectron. Reliab. Corrected Proof (In Press)

    Google Scholar 

  45. J.D. Guo, F.M. Pan, M.S. Feng, R.J. Guo, P.F. Chou, C.Y. Chang, Schottky contact and the thermal stability of Ni on n-type GaN. J. Appl. Phys. 80, 1623–1627 (1996)

    Article  ADS  Google Scholar 

  46. N. Miura, T. Nanjo, M. Suita, T. Oishi, Y. Abe, T. Ozeki, H. Ishikawa, T. Egawa, T. Jimbo, Thermal annealing effects on Ni/Au based Schottky contacts on n-GaN and AlGaN/GaN with insertion of high work function metal. Solid-State Electron. 48, 689–695 (2004)

    Article  ADS  Google Scholar 

  47. H. Jung, R. Behtash, J.R. Thorpe, K. Riepe, F. Bourgeois, H. Blanck, A. Chuvilin, U. Kaiser, Reliability behavior of GaN HEMTs related to Au diffusion at the Schottky interface. Physica Status Solidi (C) 6, S976–S979 (2009)

    Article  ADS  Google Scholar 

  48. W. Gotz, N.M. Johnson, C. Chen, H. Liu, C. Kuo, W. Imler, Activation energies of Si donors in GaN. Appl. Phys. Lett. 68, 3144–3146 (1996)

    Article  ADS  Google Scholar 

  49. T. Mattila, R.M. Nieminen, Ab initio study of oxygen point defects in GaAs, GaN, and AlN. Phys. Rev. B 54, 16676 (1996)

    Article  ADS  Google Scholar 

  50. J.C. Zolper, R.G. Wilson, S.J. Pearton, R.A. Stall, Ca and O ion implantation doping of GaN. Appl. Phys. Lett. 68, 1945–1947 (1996)

    Article  ADS  Google Scholar 

  51. M.R. Holzworth, N.G. Rudawski, S.J. Pearton, K.S. Jones, L. Lu, T.S. Kang, F. Ren, J.W. Johnson, Characterization of the gate oxide of an AlGaN/GaN high electron mobility transistor. Appl. Phys. Lett. 98, 122103–3 (2011)

    Article  ADS  Google Scholar 

  52. Lu Liu, T. Kang, D. Cullen, L. Zhou, J. Kim, C. Chang, E. Douglas, S. Jang, D.J. Smith, S. J. Pearton, J.W. Johnson, F. Ren, Effect of source field plate on the characteristics of off-state, step-stressed AlGaN/GaN high electron mobility transistors. J. Vac. Sci. Technol. B 29, 032204 (2011)

    Article  Google Scholar 

  53. A. Chini, V. Di Lecce, M. Esposto, G. Meneghesso, E. Zanoni, RF degradation of GaN HEMTs and its correlation with DC stress and I-DLTS measurements, in Microwave Integrated Circuits Conference, 2009. EuMIC 2009. Lille, France. European, pp. 132–135 (2009)

    Google Scholar 

  54. E.A. Douglas, S.J. Pearton, B. Poling, G.D. Via, L. Liu, F. Ren, Electrochem. Solid-State Lett. 14, H464 (2011)

    Article  Google Scholar 

Download references

Acknowledgments

The work performed at UF is supported by an AFOSR MURI monitored by James Hwang and Gregg Jessen.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Stephen J. Pearton .

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2013 Springer Science+Business Media New York

About this chapter

Cite this chapter

Douglas, E.A., Liu, L., Lo, C.F., Gila, B.P., Ren, F., Pearton, S.J. (2013). Reliability Issues in AlGaN/GaN High Electron Mobility Transistors. In: Ueda, O., Pearton, S. (eds) Materials and Reliability Handbook for Semiconductor Optical and Electron Devices. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-4337-7_13

Download citation

  • DOI: https://doi.org/10.1007/978-1-4614-4337-7_13

  • Published:

  • Publisher Name: Springer, New York, NY

  • Print ISBN: 978-1-4614-4336-0

  • Online ISBN: 978-1-4614-4337-7

  • eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)

Publish with us

Policies and ethics