Abstract
As AlGaN/GaN high electron mobility transistors gain commercial acceptance for use in high-power and high-frequency applications, it is becoming ever important to understand the degradation mechanisms that drive failure in the field. Because of the complex nature and multifaceted operation modes of these devices, reliability studies must go beyond the typical Arrhenius accelerated life tests. To do this, we investigated the electric field-driven degradation in devices with different gate metallization, device dimensions, and electric field mitigation techniques (such as source field plate) and the effect of device fabrication processes for both dc and RF stress conditions.
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References
G. Meneghesso, G. Verzellesi, F. Danesin, F. Rampazzo, F. Zanon, A. Tazzoli, M. Meneghini, E. Zanoni, Reliability of GaN high-electron-mobility transistors: state of the art and perspectives. IEEE Trans. Device Mater. Reliab. 8, 332–343 (2008)
S. Singhal, J.C. Roberts, P. Rajagopal, T. Li, A.W. Hanson, R. Therrien, J.W. Johnson, I.C. Kizilyalli, K.J. Linthicum, GaN-ON-Si failure mechanisms and reliability improvements, in Reliability Physics Symposium Proceedings, 2006. 44th Annual., IEEE International, 2006 Boston, MA, pp. 95–98 (2006)
A. Sozza, C. Dua, E. Morvan, B. Grimber, S.L. Delage, A 3000 hours DC life test on AlGaN/GaN HEMT for RF and microwave applications. Microelectron. Reliab. 45, 1617–1621 (2005)
E. Zanoni, G. Meneghesso, M. Meneghini, A. Tazzoli, N. Ronchi, A. Stocco, F. Zanon, A. Chini, G. Verzellesi, A. Cetronio, C. Lanzieri, and M. Peroni, Long-term stability of Gallium Nitride high electron mobility transistors: a reliability physics approach, in Microwave Integrated Circuits Conference, 2009. EuMIC 2009 Strasbourg, France. European, pp. 212–217 (2009)
M. Asif Khan, High electron mobility transistor based on a GaN-AlxGa1-xN heterojunction. Appl. Phys. Lett. 63, 1214 (1993)
C. Rivera, The role of electric field-induced strain in the degradation mechanism of AlGaN/GaN high-electron-mobility transistors. Appl. Phys. Lett. 94, 053501 (2009)
M. Dammann, A. Leuther, F. Benkhelifa, T. Feltgen, W. Jantz, Reliability and degradation mechanism of AlGaAs/InGaAs and InAlAs/InGaAs HEMTs. Physica Status Solidi A 195, 81–86 (2003)
M. Piazza, C. Dua, M. Oualli, E. Morvan, D. Carisetti, F. Wyczisk, Degradation of TiAlNiAu as ohmic contact metal for GaN HEMTs. Microelectron. Reliab. 49, 1222–1225 (2009)
U. Chowdhury, J.L. Jimenez, C. Lee, E. Beam, P. Saunier, T. Balistreri, S.Y. Park, T. Lee, J. Wang, M.J. Kim, J. Joh, J.A. del Alamo, TEM observation of crack- and pit-shaped defects in electrically degraded GaNHEMTs. IEEE Electron Device Lett. 29, 1098–1100 (2008)
J.A. del Alamo, J. Joh, GaN HEMT reliability. Microelectron. Reliab. 49, 1200–1206 (2009)
J. Joh, J.A. del Alamo, Mechanisms for electrical degradation of GaN high-electron mobility transistors, in Electron Devices Meeting, 2006. IEDM ‘06. International, 2006 San Francisco, CA, pp. 1–4 (2006)
M. Faqir, G. Verzellesi, A. Chini, F. Fantini, F. Danesin, G. Meneghesso, E. Zanoni, C. Dua, Mechanisms of RF current collapse in AlGaN-GaN high electron mobility transistors. IEEE Trans. Device Mater. Reliab. 8, 240–247 (2008)
A. Sarua, Piezoelectric strain in AlGaN/GaN heterostructure field-effect transistors under bias. Appl. Phys. Lett. 88, 103502 (2006)
G. Meneghesso, Hot carrier effects in AlGaAs/InGaAs high electron mobility transistors: failure mechanisms induced by hot carrier testing. J. Appl. Phys. 82, 5547 (1997)
M.J. Uren, D.G. Hayes, R.S. Balmer, D.J. Wallis, K.P. Hilton, J.O. Maclean, T. Martin, C. Roff, P. McGovern, J. Benedikt, P.J. Tasker, Control of Short-Channel Effects in GaN/AlGaN HFETs, in European Microwave Integrated Circuits Conference, 2006. The 1st, 2006. Rome, Italy, pp. 65–68 (2006)
M. Buchta, K. Beilenhoff, H. Blanck, J. Thorpe, R. Behtash, S. Heckmann, H. Jung, Z. Ouarch, M. Camiade, GaN technologies and developments: status and trends, in Microwave and Millimeter Wave Technology (ICMMT), 2010 International Conference on, 2010 Chicago, ILL., pp. 488–491 (2010)
M.A. Mastro, J.R. LaRoche, N.D. Bassim, C.R. Eddy, Simulation on the effect of non-uniform strain from the passivation layer on AlGaN/GaN HEMT. Microelectron. J. 36, 705–711 (2005)
D.K. Schroder, Semiconductor Material and Device Characterization, 2006th edn. (IEEE Press/Wiley, Piscataway/Hoboken, 2006)
O. Oda, Compound Semiconductor Bulk Materials and Characterizations (World Scientific, Singapore/Hackensack, 2007)
L. Brillson, Nanoscale luminescence spectroscopy of defects at buried interfaces and ultrathin films. J. Vac. Sci. Technol. B 19, 1762 (2001)
M. Micovic, A. Kurdoghlian, P. Hashimoto, M. Hu, M. Antcliffe, P. J. Willadsen, W. S. Wong, R. Bowen, I. Milosavljevic, A. Schmitz, M. Wetzel, and D. H. Chow, GaN HFET for W-band power applications, in Electron Devices Meeting, 2006. IEDM '06. International, 2006 Washington, DC, pp. 1–3 (2006)
S. Arulkumaran, High-temperature effects of AlGaN/GaN high-electron-mobility transistors on sapphire and semi-insulating SiC substrates. Appl. Phys. Lett. 80, 2186 (2002)
S.A. Vitusevich, S.V. Danylyuk, N. Klein, M.V. Petrychuk, A.Y. Avksentyev, V.N. Sokolov, V.A. Kochelap, A.E. Belyaev, V. Tilak, J. Smart, A. Vertiatchikh, L.F. Eastman, Separation of hot-electron and self-heating effects in two-dimensional AlGaN/GaN-based conducting channels. Appl. Phys. Lett. 82, 748–750 (2003)
S.A. Vitusevich, A.M. Kurakin, N. Klein, M.V. Petrychuk, A.V. Naumov, A.E. Belyaev, AlGaN/GaN high electron mobility transistor structures: self-heating effect and performance degradation. IEEE Trans. Device Mater. Reliab. 8, 543–548 (2008)
R. Gaska, A. Osinsky, J.W. Yang, M.S. Shur, Self-heating in high-power AlGaN-GaN HFETs. IEEE Electron Device Lett. 19, 89–91 (1998)
Y.C. Chou, D. Leung, I. Smorchkova, M. Wojtowicz, R. Grundbacher, L. Callejo, Q. Kan, R. Lai, P.H. Liu, D. Eng, A. Oki, Degradation of AlGaN/GaN HEMTs under elevated temperature lifetesting. Microelectron. Reliab. 44, 1033–1038 (2004)
M. Kuball, Measurement of temperature distribution in multifinger AlGaN/GaN heterostructure field-effect transistors using micro-Raman spectroscopy. Appl. Phys. Lett. 82, 124 (2003)
T. Batten, A. Manoi, M.J. Uren, T. Martin, M. Kuball, Temperature analysis of AlGaN/GaN based devices using photoluminescence spectroscopy: challenges and comparison to Raman thermography. J. Appl. Phys. 107, 074502–074502-5 (2010)
T. Batten, J.W. Pomeroy, M.J. Uren, T. Martin, M. Kuball, Simultaneous measurement of temperature and thermal stress in AlGaN/GaN high electron mobility transistors using Raman scattering spectroscopy. J. Appl. Phys. 106, 094509–094509-4 (2009)
J. Kim, J.A. Freitas Jr., J. Mittereder, R. Fitch, B.S. Kang, S.J. Pearton, F. Ren, Effective temperature measurements of AlGaN/GaN-based HEMT under various load lines using micro-Raman technique. Solid-State Electron. 50, 408–411 (2006)
R. Aubry, J.C. Jacquet, C. Dua, H. Gerard, B. Dessertenne, M.A. di Forte-Poisson, Y. Cordier, S.L. Delage, Thermal characterisation of AlGaN/GaN HEMTs using micro-Raman scattering spectroscopy and pulsed I-V measurements, in Silicon Carbide and Related Materials 2003 Nice, France, Pts 1 and 2, vol. 457–460, pp. 1625–1628 (2004)
C. Chih-Yang, E.A. Douglas, K. Jinhyung, L. Liu, L. Chien-Fong, C. Byung-Hwan, D.J. Cheney, B.P. Gila, F. Ren, G.D. Via, D.A. Cullen, Z. Lin, D.J. Smith, J. Soohwan, S.J. Pearton, Electric-field-driven degradation in off-state step-stressed AlGaN/GaN high-electron mobility transistors. IEEE Trans. Device Mater. Reliab. 11, 187–193 (2011)
R. Coffie, Y. Chen, I.P. Smorchkova, B. Heying, V. Gambin, W. Sutton, Y.C. Chou, W.B. Luo, M. Wojtowicz, A. Oki, Temperature and voltage dependent RF degradation study in Algan/gan HEMTs, in Reliability Physics Symposium, 2007. Toronto, Canada. Proceedings. 45th Annual. IEEE International, pp. 568–569 (2007)
S. Demirtas, J.A. del Alamo, Critical voltage for electrical reliability of GaN high electron mobility transistors on Si substrate, in Reliability of Compound Semiconductors Digest (ROCS), 2009. Boston, MA, pp. 53–56 (2009)
S. Demirtas, J. Joh, J.A. del Alamo, High voltage degradation of GaN high electron mobility transistors on silicon substrate. Microelectron. Reliab. 50, 758–762 (2010)
J. Joh, J.A. del Alamo, J. Jimenez, A simple current collapse measurement technique for GaN high-electron mobility transistors. IEEE Electron Device Lett. 29, 665–667 (2008)
J.W. Joh, J.A. del Alamo, Critical voltage for electrical degradation of GaN high-electron mobility transistors. IEEE Electron Device Lett. 29, 287–289 (2008)
J. Joh, F. Gao, T. Palacios, J.A. del Alamo, A model for the critical voltage for electrical degradation of GaN high electron mobility transistors. Microelectron. Reliab. 50, 767–773 (2010)
C.-F. Lo, L. Liu, T.-S. Kang, R. Davies, B.P. Gila, S.J. Pearton, I.I. Kravchenko, O. Laboutin, Y. Cao, W.J. Johnson, F. Ren, Improvement of off-state stress critical voltage by using Pt-Gated AlGaN/GaN high electron mobility transistors. Electrochem. Solid-State Lett. 14, H264–H267 (2011)
E. Zanoni, F. Danesin, M. Meneghini, A. Cetronio, C. Lanzieri, M. Peroni, G. Meneghesso, Localized damage in AlGaN/GaN HEMTs induced by reverse-bias testing. IEEE Electron Device Lett. 30, 427–429 (2009)
P. Ivo, A. Glowacki, R. Pazirandeh, E. Bahat-Treidel, R. Lossy, J. Wurfl, C. Boit, G. Trankle, Influence of GaN cap on robustness of AlGaN/GaN HEMTs, in Reliability Physics Symposium, 2009. Portland, OR. I.E. International, pp. 71–75 (2009)
T. Beechem, A. Christensen, S. Graham, D. Green, Micro-Raman thermometry in the presence of complex stresses in GaN devices. J. Appl. Phys. 103, 124501–124501-8 (2008)
J. Jungwoo, X. Ling, J.A. del Alamo, Gate current degradation mechanisms of GaN high electron mobility transistors, in Electron Devices Meeting, 2007. IEDM 2007. Washington, DC. IEEE International, pp. 385–388 (2007)
J. Joh, J.A. del Alamo, K. Langworthy, S. Xie, T. Zheleva, Role of stress voltage on structural degradation of GaN high-electron-mobility transistors. Microelectron. Reliab. Corrected Proof (In Press)
J.D. Guo, F.M. Pan, M.S. Feng, R.J. Guo, P.F. Chou, C.Y. Chang, Schottky contact and the thermal stability of Ni on n-type GaN. J. Appl. Phys. 80, 1623–1627 (1996)
N. Miura, T. Nanjo, M. Suita, T. Oishi, Y. Abe, T. Ozeki, H. Ishikawa, T. Egawa, T. Jimbo, Thermal annealing effects on Ni/Au based Schottky contacts on n-GaN and AlGaN/GaN with insertion of high work function metal. Solid-State Electron. 48, 689–695 (2004)
H. Jung, R. Behtash, J.R. Thorpe, K. Riepe, F. Bourgeois, H. Blanck, A. Chuvilin, U. Kaiser, Reliability behavior of GaN HEMTs related to Au diffusion at the Schottky interface. Physica Status Solidi (C) 6, S976–S979 (2009)
W. Gotz, N.M. Johnson, C. Chen, H. Liu, C. Kuo, W. Imler, Activation energies of Si donors in GaN. Appl. Phys. Lett. 68, 3144–3146 (1996)
T. Mattila, R.M. Nieminen, Ab initio study of oxygen point defects in GaAs, GaN, and AlN. Phys. Rev. B 54, 16676 (1996)
J.C. Zolper, R.G. Wilson, S.J. Pearton, R.A. Stall, Ca and O ion implantation doping of GaN. Appl. Phys. Lett. 68, 1945–1947 (1996)
M.R. Holzworth, N.G. Rudawski, S.J. Pearton, K.S. Jones, L. Lu, T.S. Kang, F. Ren, J.W. Johnson, Characterization of the gate oxide of an AlGaN/GaN high electron mobility transistor. Appl. Phys. Lett. 98, 122103–3 (2011)
Lu Liu, T. Kang, D. Cullen, L. Zhou, J. Kim, C. Chang, E. Douglas, S. Jang, D.J. Smith, S. J. Pearton, J.W. Johnson, F. Ren, Effect of source field plate on the characteristics of off-state, step-stressed AlGaN/GaN high electron mobility transistors. J. Vac. Sci. Technol. B 29, 032204 (2011)
A. Chini, V. Di Lecce, M. Esposto, G. Meneghesso, E. Zanoni, RF degradation of GaN HEMTs and its correlation with DC stress and I-DLTS measurements, in Microwave Integrated Circuits Conference, 2009. EuMIC 2009. Lille, France. European, pp. 132–135 (2009)
E.A. Douglas, S.J. Pearton, B. Poling, G.D. Via, L. Liu, F. Ren, Electrochem. Solid-State Lett. 14, H464 (2011)
Acknowledgments
The work performed at UF is supported by an AFOSR MURI monitored by James Hwang and Gregg Jessen.
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Douglas, E.A., Liu, L., Lo, C.F., Gila, B.P., Ren, F., Pearton, S.J. (2013). Reliability Issues in AlGaN/GaN High Electron Mobility Transistors. In: Ueda, O., Pearton, S. (eds) Materials and Reliability Handbook for Semiconductor Optical and Electron Devices. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-4337-7_13
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DOI: https://doi.org/10.1007/978-1-4614-4337-7_13
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