Abstract
Electron energy-loss spectroscopy (EELS) involves analyzing the energy distribution of initially monoenergetic electrons after they have interacted with a specimen. This interaction is sometimes confined to a few atomic layers, as when a beam of low-energy (100–1000 eV) electrons is “reflected” from a solid surface. Because high voltages are not involved, the apparatus is relatively compact but the low penetration depth implies the use of ultrahigh vacuum. Otherwise information is obtained mainly from the carbonaceous or oxide layers on the specimen’s surface. At these low primary energies, a monochromator can reduce the energy spread of the primary beam to a few millielectron volts (1991) and if the spectrometer has comparable resolution, the spectrum contains features characteristic of energy exchange with the vibrational modes of surface atoms, as well as valence electron excitation in these atoms. The technique is therefore referred to as high-resolution electron energy-loss spectroscopy (HREELS) and is used to study the physics and chemistry of surfaces and of adsorbed atoms or molecules. Although it is an important tool of surface science, HREELS uses concepts that are somewhat different to those involved in electron microscope studies and will not be discussed further in the present volume. The instrumentation, theory, and applications of HREELS are described by Ibach and Mills (1982) and by Kesmodel (2006).
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References
Ade, H., Zhang, X., Cameron, S., Costello, C., Kirz, J., and Williams, S. (1992) Chemical contrast in x-ray microscopy and spatially resolved XANES spectroscopy of organic specimens. Science 258, 972–975.
Ahn, C. C., and Krivanek, O. L. (1983) EELS Atlas, Arizona State University and Gatan Inc., Tempe, AZ
Atwater, H. A., Wong, S. S., Ahn, C. C., Nikzad, S., and Frase, H. N. (1993) Analysis of monolayer films during molecular beam epitaxy by reflection electron energy loss spectroscopy. Surf. Sci. 298, 273–283.
Auchterlonie, G. J., McKenzie, D. R., and Cockayne, D. J. H. (1989) Using ELNES with parallel EELS for differentiating between a-Si:X thin films. Ultramicroscopy 31, 217–232.
Ball, M. D., Malis, T. F., and Steele, D. (1984) Ultramicrotomy as a specimen preparation technique for analytical electron microscopy. In Analytical Electron Microscopy – 1984, eds. D. B. Williams and D. C. Joy, San Francisco Press, San Francisco, CA, pp. 189–192.
Baumeister, W., and Hahn, M. (1976) An improved method for preparing single-crystal specimen supports: H2O2 exfoliation of vermiculite. Micron 7, 247–251.
Beamson, G., Porter, H. Q., and Turner, D. W. (1981) Photoelectron spectromicroscopy. Nature 290, 556–561.
Bennett, J. C., and Egerton, R. F. (1995) NiO test specimens for analytical electron microscopy: Round-robin results. J. Microsc. Soc. Am. 1, 143–149.
Bentley, J., Angelini, P., and Sklad, P. S. (1984) Secondary fluorescence effects on x-ray microanalysis. In Analytical Electron Microscopy – 1984, eds. D. B. Williams and D. C. Joy, San Francisco Press, San Francisco, CA, pp. 315–317.
Bihr, J., Benner, G., Krahl, D., Rilk, A., and Weimer, E. (1991) Design of an analytical TEM with integrated imaging Ω-spectrometer. In Proc. 49th Ann. Meet. Electron Microsc. Soc. Am., ed. G. W. Bailey, San Francisco Press, San Francisco, CA, pp. 354–355.
Blackstock, A. W., Birkhoff, R. D., and Slater, M. (1955) Electron accelerator and high resolution analyser. Rev. Sci. Instrum. 26, 274–275.
Boersch, H., Geiger, J., and Hellwig, H. (1962) Steigerung der Auflösung bei der Elektronen-Energieanalyse. Phys. Lett. 3, 64–66.
Bohm, D., and Pines, D. (1951) A collective description of electron interactions: II. Collective vs. individual particle aspects of the interactions. Phys. Rev. 85, 338–353.
Bonham, R. A., and Fink, M. (1974) High Energy Electron Scattering, Van Nostrand Reinhold, New York, NY.
Bravman, J. C., and Sinclair, R. (1984) The preparation of cross-section specimens for transmission electron microscopy. J. Electron Microsc. Tech. 1, 53–61.
Brydson, R. (2001) Electron Energy Loss Spectroscopy, Bios, Oxford.
Buseck, P. R., Cowley, J. M., and Eyring, L. (1988) High-Resolution Transmission Electron Microscopy and Associated Techniques, Oxford University Press, New York, NY, and Oxford.
Castaing, R. (1975) Energy filtering in electron microscopy and electron diffraction. In Physical Aspects of Electron Microscopy and Microbeam Analysis, ed. B. Siegel, Wiley, New York, NY, pp. 287–301.
Castaing, R., and Henry, L. (1962) Filtrage magnetique des vitesses en microscopie électronique. C.R. Acad. Sci. Paris B255, 76–78.
Cazaux, J. (1983) Another expression for the minimum detectable mass in EELS, EPMA and AES. Ultramicroscopy 12, 83–86.
Chapman, H. N. (2009) X-ray imaging beyond the limits. Nat. Mater. 8, 299–301.
Chen, Z., Cochrane, R., and Loretto, M. H. (1984) Microanalysis of extracted precipitates from extracted steels. In Analytical Electron Microscopy – 1984, eds. D. B. Williams and D. C. Joy, San Francisco Press, San Francisco, CA, pp. 243–246.
Cliff, G., and Lorimer, G. W. (1975) The quantitative analysis of thin specimens. J. Microsc. 103, 203–207
Collett, S. A., Brown, L. M., and Jacobs, M. H. (1984) Demonstration of superior resolution of EELS over EDX in microanalysis. In Developments in Electron Microscopy and Analysis 1983, Inst. Phys. Conf. Ser. No. 68, ed. P. Doig, I.O.P., Bristol, pp. 103–106.
Colliex, C. (1984) Electron energy-loss spectroscopy in the electron microscope. In Advances in Optical and Electron Microscopy, eds. V. E. Cosslett and R. Barer, Academic, London, Vol. 9, pp. 65–177.
Colliex, C. (2004) Electron energy-loss spectroscopy on solids. In International Tables for Crystallography, 3rd edition, ed. E. Prince, Wiley, New York, NY, pp. 391–412.
Colliex, C., and Jouffrey, B. (1972) Diffusion inelastique des electrons dans une solide par excitation de niveaus atomiques profonds. Philos. Mag. 25, 491–514.
Cook, R. F. (1971) Combined electron microscopy and energy loss analysis of glass. Philos. Mag. 24, 835–843.
Cowley, J. M. (1982) Surface energies and surface structure of small crystals studies by use of a STEM instrument. Surf. Sci. 114, 587–606.
Curtis, G. H., and Silcox, J. (1971) A Wien filter for use as an energy analyzer with an electron microscope. Rev. Sci. Instrum. 42, 630–637.
De Graef, M. (2003) Introduction to Conventional Transmission Electron Microscopy, Cambridge University Press, Cambridge.
Disko, M. M., Ahn, C. C., and Fultz, B., eds. (1992) Transmission Electron Energy Loss Spectrometry in Materials Science. The Minerals, Metals and Materials Society, Warrendale, PA, 272 p.
Duckworth, S. P., Craven, A. J., and Baker, T. N. (1984) Comparison of carbon and noncarbon replicas for ELS. In Analytical Electron Microscopy – 1984, eds. D. B. Williams and D. C. Joy, San Francisco Press, San Francisco, CA, pp. 235–238.
Egerton, R. F. (1980f) Measurement of radiation damage by electron energy-loss spectroscopy, J. Microsc. 118, 389–399.
Egerton, R. F. (1992b) Electron energy-loss spectroscopy – EELS. In Quantitative Microbeam Analysis, eds. A. G. Fitzgerald, B. E. Storey, and D. Fabian, SUSSP, Edinburgh, and IOP, Bristol, pp. 145–168.
Egerton, R. F. (2005) Physical Principles of Electron Microscopy, Springer, New York, NY. ISBN: 978-0387-25800-0.
Egerton, R. F. (2009) Electron energy-loss spectroscopy in the TEM. Rep. Prog. Phys. 72, 016502 (25 pp). Online at stacks.iop.org/RoPP/72/016502
Egerton, R. F., and Whelan, M. J. (1974a) Electron energy-loss spectra of diamond, graphite and amorphous carbon. J. Electron Spectrosc. 3, 232–236.
Egerton, R. F., Philip, J. G., and Whelan, M. J. (1974) Applications of energy analysis in a transmission electron microscope. In Electron Microscopy – 1974, 8th Int. Cong., eds. J. V. Sanders and D. J. Goodchild, Australian Academy of Science, Canberra, Vol. 1, pp. 137–140.
Ferrell, R. A. (1957) Characteristic energy losses of electrons passing through metal foils. II. Dispersion relation and short wavelength cutoff for plasma oscillations. Phys. Rev. 107, 450–462.
Fitzgerald, A. G., Storey, B. J., and Fabian, D., eds. (1992) Quantitative Microbeam Analysis, Scottish Universities Summer School in Physics, Edinburgh and Institute of Physics Publishing, Bristol and Philadelphia.
Geiger, J., Nolting, M., and Schröder, B. (1970) How to obtain high resolution with a Wien filter spectrometer. In Electron Microscopy – 1970, ed. P. Favard, Societé Francaise de Microscopie Electronique, Paris, pp. 111–112.
Genç, A., Banerjee, R., Thompson, G. B., Maher, D. M., Johnson, A. W., and Fraser, H. L. (2009) Complementary techniques for the characterization of thin film Ni/Nb multilayers. Ultramicroscopy 10, 1276–1281.
Giannuzzi, L. A., and Stevie, F. A., eds. (2005) Introduction to Focused Ion Beams, Springer, New York, NY.
Goldstein, J. I., Newbury, D. E., Echlin, P., Joy, D. C., Romig, A. D., Lyman, C., Fiori, C. E., and Lifshin, E. (2003) Scanning Electron Microscopy and X-Ray Microanalysis, 3rd edition, Springer, New York, NY.
Goodhew, P. J. (1984) Specimen Preparation for Transmission Electron Microscopy of Materials, Oxford University Press, New York, NY.
Grivet, P., and Septier, A. (1978) Ion microscopy: History and actual trends. Ann. N. Y. Acad. Sci. 306, 158–182.
Hall, T. A. (1979) Biological X-ray microanalysis. J. Microsc. 117, 145–163.
Hawkes, P., and Spence, J. C. H., eds. (2008) Science of Microscopy, Springer, New York, NY.
Hembree, G. G., and Venables, J. A. (1992) Nanometer-resolution scanning Auger electron microscopy. Ultramicroscopy 47, 109–120.
Henderson, R. (1995) The potential and limitations of neutrons, electrons and x-rays for atomic resolution microscopy of unstained biological molecules. Q. Rev. Biophys. 28 171–193.
Henkelman, R. M., and Ottensmeyer, F. P. (1974a) An energy filter for biological electron microscopy. J. Microsc. 102, 79–94.
Hillier, J., and Baker, R. F. (1944) Microanalysis by means of electrons. J. Appl. Phys. 15, 663–675.
Hines, R. L. (1975) Graphite crystal film preparation by cleavage. J. Microsc. 104, 257–261.
Hirsch, P. B., Howie, A., Nicholson, R. B., Pashley, D. W., and Whelan, M. J. (1977) Electron Microscopy of Thin Crystals, Krieger, Huntington, New York, NY.
Hitchcock, A. P. (1989) Electron-energy-loss-based spectroscopies: A molecular viewpoint. Ultramicroscopy 28, 165–183.
Hitchcock, A. P. (1994) Bibliography and data base of inner shell excitation spectra of gas phase atoms and molecules. J. Electron Spectrosc. Relat. Phenom. 67, 1–131.
Howitt, D. (1984) Ion milling of materials science specimens for electron microscopy: A review. J. Electron Microsc. Tech. 1, 405–415.
Hren, J. J., Goldstein, J. I., and Joy, D. C., eds. (1979) Introduction to Analytical Electron Microscopy, Plenum, New York, NY.
Ibach, H. (1991) Electron Energy Loss Spectrometers. Springer Series in Optical Sciences, Springer, Berlin, Vol. 63.
Ibach, H., and Mills, D. L. (1982) Electron Energy-Loss Spectroscopy and Surface Vibrations, Academic, New York, NY.
Johansson, S. A. E. (1984) PIXE summary. Nucl. Instrum. Methods B3, 1–3.
Joy, D. C., and Maher, D. M. (1980c) Electron energy-loss spectroscopy. J. Phys. E (Sci. Instrum.) 13, 261–270.
Joy, D. C., Newbury, D. E., and Myklebust, R. L. (1982) The role of fast secondary electrons in degrading spatial resolution in the analytical electron microscope. J. Microsc. 128, RP1–RP2.
Joy, D. C., Romig, A. D., and Goldstein, J. I., eds. (1986) Principles of Analytical Electron Microscopy, Plenum, New York, NY.
Kincaid, B. M., Meixner, A. E., and Platzman, P. M. (1978) Carbon K-edge in graphite measured using electron energy-loss spectroscopy. Phys. Rev. Lett. 40, 1296–1299.
Klemperer, O., and Shepherd, J. P. G. (1963) On the measurement of characteristic energy losses of electrons in metals. Br. J. Appl. Phys. 14, 85–88.
Könenkamp, R., Word, R. C., Rempfer, G. F., Dixon, T., Almaraz, L., and Jones, T. (2010) 5.4-nm spatial resolution in biological photoemission electron microscopy. Ultramicroscopy 110, 899–902.
Krivanek, O. L., Mory, C., Tence, M., and Colliex, C. (1991a) EELS quantification near the single-atom detection level. Microsc. Microanal. Microstruct. 2, 257–267.
Krivanek, O. L., Chisholm, M. F., Nicolosi, V., Pennycook, T. J., Corbin, G. J., Dellby, N., Murfitt, M. F., Own, C. S., Szilagyi, Z. S., Oxley, M. P., Pantelides, S. T., and Pennycook, S. J. (2010) Atom-by-atom structural and chemical analysis by annular dark-field electron microscopy. Nature 464, 571–574.
Leapman, R. D., and Hunt, J. A. (1991) Comparison of detection limits for EELS and EDXS. Micros. Microanal. Microstruct. 2, 231–244.
Leapman, R. D., and Newbury, D. E. (1993) Trace element analysis at nanometer spatial resolution by parallel-detection electron energy-loss spectroscopy. Anal. Chem. 13, 2409–2414.
Lyman, C. E., Newbury, D. E., Goldstein, J. I., Williams, D. B., Romig, A. D., Armstrong, J. T., Echlin, P., Fiori, C. E., Joy, D. C., Lifshin, E., and Peters, K.-R. (1990) Scanning Electron Microscopy, X-Ray Microanalysis, and Analytical Electron Microscopy: A Laboratory Workbook, Plenum, New York, NY.
Lyman, C. E., Lakis, R. E., and Stenger, H. G. (1995) X-ray emission spectrometry of phase separation in Pt-Rh nanoparticles for nitric oxide reduction. Ultramicroscopy 58, 25–34.
Magee, C. W. (1984) On the use of secondary ion mass spectrometry in semiconductor device materials and process development. Ultramicroscopy 14, 55–64.
Marton, L. (1946) Electron microscopy. Rep. Prog. Phys. 10, 205–252.
McCaffrey, J. P. (1993) Improved TEM samples of semiconductors prepared by a small-angle cleavage technique. Microsc. Res. Tech. 24, 180–184.
Midgley, P. A., Saunders, M., Vincent, R., and Steeds, J. W. (1995) Energy-filtered convergent beam diffraction: Examples and future prospects. Ultramicroscopy 59, 1–13.
Miller, M. K. (2000) Atom Probe Tomography: Analysis at the Atomic Level, Springer, New York, NY, 239 p.
Miller, M. K., Russell, K. F., Thompson, K., Alvis, R., and Larson, D. J. (2007) Microsc. Microanal. 13, 428–436.
Moharir, A. V., and Prakash, N. (1975) Formvar holey films and nets for electron microscopy. J. Phys. E 8, 288–290.
Nellist, P., and Pennycook, S. J., eds. (2011) Scanning Transmission Electron Microscopy: Imaging and Analysis. Springer, New York, NY. ISBN: 978-1-4419-7199-9
Ourmadz, A., Baumann, F. H., Bode, M., and Kim, Y. (1990) Quantitative chemical lattice imaging: Theory and practice. Ultramicroscopy 34, 237–255.
Raether, H. (1965) Solid State Excitations by Electrons. Springer Tracts in Modern Physics, Springer, Berlin, Vol. 38, pp. 84–157.
Raether, H. (1980) Excitation of Plasmons and Interband Transitions by Electrons. Springer Tracts in Modern Physics, Springer, New York, NY, Vol. 88.
Reichelt, R., König, T., and Wangermann, G. (1977) Preparation of microgrids as specimen supports for high resolution electron microscopy. Micron 8, 29–31.
Reimer, L., and Kohl, H. (2008) Transmission Electron Microscopy: Physics of Image Formation, 5th edition, Springer, New York, NY.
Ritsko, J. J. (1981) Inelastic electron scattering spectroscopy of graphite intercalation compounds. In 39th Ann. Proc. Electron Microsc. Soc. Am., ed. G. W. Bailey, Claitor’s Publishing, Baton Rouge, LA, pp. 174–177.
Rivière, J. C. (1982) Surface-specific analytical techniques. Philos. Trans. R. Soc. Lond. A305, 545–589.
Robinson, B. W., and Graham, J. (1992) Advances in electron microprobe trace-element analysis. J. Comput. Assist. Microsc. 4, 263–265.
Rose, H., and Plies, E. (1974) Entwurf eines fehlerarmen magnetishen Energie-Analysators. Optik 40, 336–341.
Rudberg, E. (1930) Characteristic energy losses of electrons scattered from incandescent solids. Proc. R. Soc. Lond. A127, 111–140
Ruthemann, G. (1941) Diskrete Energieverluste schneller Elektronen in Festkörpern. Naturwissenschaften 29, 648.
Schattschneider, P. (1986) Fundamentals of Inelastic Electron Scattering, Springer, Vienna.
Schlossmacher, P., Klenov, D. O., Freitag, B., and von Harrach, H. S. (2010) Microsc. Today 18, 14–20.
Schröder, B. (1972) Electron-spectroscopic study of amorphous germanium and silicon films at energy losses below 1 eV. In Electron Microscopy – 1972, ed. V. E. Cosslett. The Institute of Physics, London, pp. 154–155.
Shuman, H., Somlyo, A. V., and Somlyo, A. P. (1976) Quantitative electron-probe micro-analysis of biological thin sections: Methods and validity. Ultramicroscopy 1, 317–339.
Shuman, H., Kruit, P., and Somlyo, A. P. (1984) Trace-element quantitation in ELS. In Analytical Electron Microscopy – 1984, eds. D. B. Williams and D. C. Joy, San Francisco Press, San Francisco, CA, p. 77.
Spence, J. C. H. (2005) Diffractive (lensless) imaging. In Science of Microscopy, eds. P.W. Hawkes and J. C. H. Spence, ,Springer, New York, NY, Vol. 2, pp. 1196–1227.
Spence, J. C. H. (2006) Absorption spectroscopy with sub-angstrom beams: ELS in STEM. Rep. Prog. Phys. 69, 725–758.
Spence. J. C. H. (2009) High Resolution Electron Microscopy, Oxford University Press, Oxford.
Steeds, J. W. (1984) Electron crystallography. In Quantitative Electron Microscopy, eds. J. N. Chapman and A. J. Craven, SUSSP Publications, Edinburgh, pp. 49–96.
Tatlock, G. J., Baxter, A. G., Devenish, R. W., and Hurd, T. J. (1984) EELS analysis of extracted particles from steels. In Analytical Electron Microscopy – 1984, eds. D. B. WIlliams and D. C. Joy, San Francisco Press, San Francisco, CA, pp. 227–230.
Terauchi, M., Takahashi, H., Handa, N., Murano, T., Koike, M., Kawachi, T., Imazono, T., Koeda, M., Nagano, T., Sasai, H., Oue, Y., Onezawa, Z., and Kuramoto, S. (2010a) Li K-emission measurements using a newly developed SXES-TEM instrument. Microsc. Micronal. 16 (Suppl. 2), 1308–1309.
Tiemeijer, P. C., van Lin, J. H. A., and de Long, A. F. (2001) First results of a monochromatized 200 kV TEM. Microsc. Microanal. 7 (Suppl. 2), 234–235.
Timsit, R. S., Hutchinson, J. L., and Thornton, M. C. (1984) Preparation of metal specimens for HREM by ultramicrotomy. Ultramicroscopy 15, 371–374.
Titchmarsh, J. M. (1989) Comparison of high spatial resolution in EDX and EELS analysis. Ultramicroscopy 28, 347–351.
Tucker, D. S., Jenkins, E. J., and Hren, J. J. (1985) Sectioning spherical aluminum oxide particles for transmission electron microscopy. J. Electron Microsc. Tech. 2, 29–33.
Varela, M., Findlay, S. D., Lupini, A. R., Christen, H. M., Borisevich, A. Y., Dellby, N., Krivanek, O. L., Nellist, P. D., Oxley, M. P., Allen, L. J., and Pennycook, S. J. (2004) Spectroscopic imaging of single atoms within a bulk solid. Phys. Rev. Lett. 92, 095502 (4 pages).
Wang, Z. L. (1993) Electron reflection, diffraction and imaging of bulk crystal surfaces in TEM and STEM. Rep. Prog. Phys. 56, 997–1065.
Wang, Z. L. (1995) Elastic and Inelastic Scattering in Electron Diffraction and Imaging, Plenum, New York, NY.
Wang, Z. L. (1996) Reflection Electron Microscopy and Spectroscopy for Surface Analysis, Cambridge University Press, Cambridge, UK.
Wang, Y., and Nastasi, M. (2010) Handbook of Modern Ion Beam Materials Analysis, Materials Research Society, Warrendale, PA.
Watanabe, M., and Williams, D. B. (2006) The quantitative analysis of thin specimens: A review of progress from the Cliff-Lorimer to the new ζ-factor methods. J. Microsc. 221, 89–109.
Watanabe, M., Okunishi, E., and Aoki, T. (2010a) Atomic-level chemical analysis by EELS and XEDS in aberration-corrected scanning transmission electron microscopy. Microsc. Microanal. 16 (Suppl. 2), 66–67.
Watts, J., and Wolstenholme, J. (2005) An Introduction to Surface Analysis by XPS and AES, Wiley, New York, NY.
Williams, D. B. (1987) Practical Analytical Electron Microscopy in Materials Science, revised edition, Techbooks, Herndon, VA.
Williams, D. B., and Carter, C. B. (2009) Transmission Electron Microscopy: A Textbook for Materials Science, 2nd edition, Springer, New York, NY. ISBN: 978-0-387-76502-0.
Wittry, D. B. (1969) An electron spectrometer for use with the transmission electron microscope. Brit. J. Appl. Phys. (J. Phys. D) 2, 1757–1766.
Zaluzec, N. J. (1988) A beginner's guide to electron energy loss spectroscopy. EMSA Bull. 16, 58–63 and 72–80.
Zewail, A. H., and Thomas, J. M. (2010) 4D Electron Microscopy: Imaging in Space and Time, Imperial College Press, London.
Zuo, J. M. (1992) Automatettice parameter measurement from HOLZ lines and their use for the measurement of oxygen content in YBa2Cu3O7-δ from nanometer-sized region. Ultramicroscopy 41, 211–223.
Terauchi, M., Koike, M., Kukushima, K., and Kimura, A. (2010b) Development of wavelength-dispersive soft x-ray emission spectrometers for transmission electron microscopes – an introduction of valence electron spectroscopy for transmission electron microscopy. J. Electron Microsc. 59, 251–261.
Watanabe, M., Kanno, M., and Akunishi, E. (2010b) Atomic-level chemical analysis by EELS and XEDS in aberration-corrected scanning transmission electron microscopy. JEOL News. 45, 8–15.
Zaluzec, N. J. (1984) K- and L-shell cross sections for x-ray microanalysis in an AEM. In Analytical Electron Microscopy – 1984, eds. D. B. Williams and D. C. Joy, San Francisco Press, San Francisco, CA, pp. 279–284.
Brown, L. M. (1997) A synchrotron in a microscope. In Proc. EMAG97 (Cambridge), Inst. Phys. Conf. Ser., Vol. 153, pp. 17–21.
Brown, K. L., Belbeoch, R., and Bounin, P. (1964) First- and second-order magnetic optics matrix equations for the midplane of uniform-field wedge magnets. Rev. Sci. Instrum. 35, 481–485.
Browne, M. T. (1979) Electron energy analysis in a vacuum generators HB5 STEM. In Scanning Electron Microscopy, SEM Inc., A. M. F. O’Hare, Chicago, IL, Part 2, pp. 827–834.
Chen, C. H., Joy, D. C., Chen, H. S., and Hauser, J. J. (1986) Observation of anomalous plasmon linewidth in the icosahedral Al-Mn quasicrystals. Phys. Rev. Lett. 57, 743–746.
Daniels, J., Festenberg, C. V., Raether, H., and Zeppenfeld, K. (1970) Optical constants of solids by electron spectroscopy. In Springer Tracts in Modern Physics, Springer, New York, NY, Vol. 54, pp. 78–135.
Dexpert, H., Lynch, J. P., and Freund, E. (1982) Sensitivity limits in x-ray emission spectroscopy of catalysts. In Developments in Electron Microscopy and Analysis, Inst. Phys. Conf. Ser. No. 61, I.O.P., Bristol, pp. 171–174.
Dravid, V. P., Zhang, H., and Wang, Y. Y. (1993) Inhomogeneity of charge carrier concentration along the grain boundary plane in oxide superconductors. Physica C 213, 353–358.
Fallon, P. J. (1992) Microscopy and Spectroscopy of CVD Diamond, Diamond-Like Carbon and Similar Materials. Ph.D. Thesis, University of Cambridge, Cambridge, UK.
Fink, J. (1989) Recent developments in energy-loss spectroscopy. In Advances in Physics and Electron Physics, Academic, London, Vol. 75, pp. 121–232.
Fiori, C. E., Gibson, C. C., and Leapman, R. D. (1980) Electrostatic deflection system for use with an electron energy-loss spectrometer. In Microbeam Analysis – 1980, ed. D. B. Wittry, San Francisco Press, San Francisco, CA, pp. 225–228.
Batson, P. E. (1992a) Electron energy loss studies in semiconductors. In Transmission Electron Energy Loss Spectrometry in Materials Science, eds. M. M. Disko, C. C. Ahn, and B. Fulz, The Minerals, Metals and Materials Society, Warrendale, PA, pp. 217–240.
Goldstein, J. I., Costley, J. L., Lorimer, G. W., and Reed, S. J. B. (1977) Quantitative x-ray analysis in the electron microscope. In Scanning Electron Microscopy, Part 1, pp. 315–324.
Gubbens, A. J., Barfels, M., Trevor, C., Twesten, R., Mooney, P., Thomas, P., Menon, N., Kraus, B., Mao, C., and McGinn, B. (2010) The GIF Quantum, a next generation post-column imaging energy filter. Ultramicroscopy 110, 962–970.
Hawkes, P., ed. (2008) Aberration-corrected electron microscopy. In Advances in Imaging and Electron Physics, Academic, New York, NY, Vol. 153.
Ahn, C. C., ed. (2004) Transmission Electron Energy Loss Spectrometry in Materials Science and the EELS Atlas, Wiley, New York, NY.
Isaacson, M. (1981) All you might want to know about ELS (but were afraid to ask): A tutorial. In Scanning Electron Microscopy, SEM Inc., A. M. F. O'Hare, IL, Part 1, pp. 763–776.
Joy, D. C. (1979) The basic principles of electron energy-loss spectroscopy. In Introduction to Analytical Electron Microscopy, Plenum, New York, NY, pp. 223–244.
Joy, D. C., and Maher, D. M. (1977) Sensitivity limits for thin specimen x-ray analysis. In Scanning Electron Microscopy, Part 1, pp. 325–334.
Katterwe, H. (1972) Object analysis by electron energy spectroscopy in the infra-red region. In Electron Microscopy – 1972, The Institute of Physics, London, pp. 154–155.
Kesmodel, L. L. (2006) High-resolution electron energy-loss spectroscopy (HREELS). In Encyclopedia of Surface and Colloid Science, 2nd edition, eds. P. Somasundaran and A. Hubbard, Taylor and Francis.
Krivanek, O. L., Gubbens, A. J., and Dellby, N. (1991b) Developments in EELS instrumentation for spectroscopy and imaging.
Kruit, P., Shuman, H., and Somlyo, A. P. (1984) Detection of x-rays and electron energy-loss events in time coincidence. Ultramicroscopy 13, 205–214.
Leapman, R. D. (1984) Electron energy-loss microspectroscopy and the characterization of solids. In Electron Beam Interactions with Solids, SEM Inc., A. M. F. O’Hare, IL, pp. 217–233.
Levi-Setti, R. (1983) Secondary electron and ion imaging in scanning-ion microscopy. In Scanning Electron Microscopy, SEM, Inc., A. M. F. O'Hare, IL, Part 1, pp. 1–22.
Reimer, L., ed. (1995) Energy-Filtering Transmission Electron Microscopy. Springer Series in Optical Sciences, Springer, Heidelberg, Vol. 71.
Schattschneider, P., ed. (2010) Linear and Chiral Dichroism in the Electron Microscope, PanStanford Publishing. ISBN 9789814267489.
Schmidt, P. F., Fromme, H. G., and Pfefferkorn, G. (1980) LAMMA investigations of biological and medical specimens. In Scanning Electron Microscopy, SEM Inc., A. M. F. O’Hare, IL, Part II, pp. 623–634.
Seah, M. P. (1983) A review of quantitative Auger electron spectroscopy. In Scanning Electron Microscopy – 1983, SEM Inc., A. M. F. O'Hare, Chicago, IL, Part II, pp. 521–536.
Silcox, J. (1977) Inelastic electron scattering as an analytical tool. In Scanning Electron Microscopy, SEM Inc., A. M. F. O’Hare, IL, Part 1, pp. 393–400.
Silcox, J. (1979) Analysis of the electronic structure of solids. In Introduction to Analytical Electron Microscopy, Plenum, New York, NY, pp. 295–304.
Spence, J. C. H., and Zuo, J. M. (1992) Electron Microdiffraction, Plenum, New York, NY.
Stender, P., Heil, T., Kohl, H., and Schmitz, G. (2009) Quantitative comparison of energy-filtering transmission electron microscopy and atom probe tomography. Ultramicroscopy 109, 612–618.
Zandvliet, H. J. W., and Van Houselt, A. (2009) Scanning tunneling spectroscopy. Ann. Rev. Anal. Chem. 2, 37–55.
Ostyn, K. M., and Carter, C. B. (1982) Effects of ion-beam thinning on the structure of NiO. In Electron Microscopy – 1982, 10th Int. Cong., Deutsche Gesellschaft für Elektronenmikroskopie, Part 1, pp. 191–192.
Garratt-Reed, A. J. (1981) Measurement of carbon in V(C, N) precipitates extracted from HSLA steels on aluminum replicas. In Quantitative Microanalysis with High Spatial Resolution, Metals Society, London, pp. 165–168.
Krause, M. O., and Oliver, J. H. (1979) Natural widths of atomic K and L levels. J. Phys. Chem. Ref. Data 8, 329–338.
Oleshko,V. P., Murayama, M., and Howe, J. M. (2002) Use of plasmon spectroscopy to evaluate the mechanical properties of materials at the nanoscale. Microsc. Microanal. 8, 350–364.
Garcia de Abajo, F. J. (2010) Optical excitations in electron microscopy. Rev. Mod. Phys. 82, 209–275.
Colliex, C., Cosslett, V. E., Leapman, R. D., and Trebbia, P. (1976a) Contribution of electron energy-loss spectroscopy to the development of analytical electron microscopy. Ultramicroscopy 1, 301–315.
Chan, H. M., and Williams, D. B. (1985) Quantitative analysis of lithium in Al–Li alloys by ionization energy loss spectroscopy. Philos. Mag. B 52, 1019–1032.
Egerton, R. F. (1993) Oscillator-strength parameterization of inner-shell cross sections. Ultramicroscopy 50, 13–28.
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Egerton, R. (2011). An Introduction to EELS. In: Electron Energy-Loss Spectroscopy in the Electron Microscope. Springer, Boston, MA. https://doi.org/10.1007/978-1-4419-9583-4_1
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