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Materials and Processes in Shape Memory Alloy

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MEMS Materials and Processes Handbook

Part of the book series: MEMS Reference Shelf ((MEMSRS,volume 1))

Abstract

Actuators are a key factor of micro electro mechanical systems (MEMS). In particular, shape memory alloy (SMA) is an effective material for microactuators to generate large force and large displacement. In this chapter, basic properties of SMA materials, fabrication processes of bulk and thin film SMA actuators, and application devices (medical devices, fluidic devices, switches, tactile displays and cantilevers for atomic force microscopy (AFM)) are described. Microactuators of SMA have some disadvantages such as difficulty to batch fabricate and assemble, high electric power for thermal driving, and low controllability of displacement. In this chapter, integration techniques with other MEMS technologies to overcome the disadvantages of SMA actuators also are described with introductions of typical application devices.

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Acknowledgements

The authors wish to thank Professor Masayoshi Esashi of Tohoku university for support and advices about MEMS process and development of microactuators. The authors also thank to Professor Kiyoshi Yamauchi of Tohoku university and Professor Eiji Makino of Hirosaki university for helpful advices on SMA material properties and fabrication technologies.

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Authors and Affiliations

  1. Graduate School of Science and Engineering, Yamagata University, Yonezawa, Japan

    Takashi Mineta

  2. Graduate School of Biomedical Engineering, Tohoku University, Sendai, Japan

    Yoichi Haga

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  1. Takashi Mineta
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  2. Yoichi Haga
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Correspondence to Takashi Mineta .

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  1. Dept. Electrical &, Computer Engineering, University of Maryland, College Park, 20742, Maryland, USA

    Reza Ghodssi

  2. Xerox Research Center, Phillips Road 147-16C, Dock 140 800, Webster, 20742, New York, USA

    Pinyen Lin

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Mineta, T., Haga, Y. (2011). Materials and Processes in Shape Memory Alloy. In: Ghodssi, R., Lin, P. (eds) MEMS Materials and Processes Handbook. MEMS Reference Shelf, vol 1. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-47318-5_6

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