Abstract
The µSXRD technique is developed at the Advanced Light Source, Berkeley Lab. The technique can provide a local information about the crystal structure of materials in a microscale. This became possible due to the focusing of X-rays into a micron size spot. The numerical analysis of the X-ray diffraction allows to find and quantify not only the crystal structure and lattice parameters, but also the density of geometrically necessary dislocation density, crystal bending, polygonization and rotation, and local stress/strain probing at different conditions. The physical components of the experimental setup and the experimental procedure are also described in details in this chapter.
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References
Tamura N, MacDowell AA, Spolenak BC et al (2003) Scanning X-ray microdiffraction with submicrometer white beam for strain/stress and orientation mapping in thin films. J Synchrotron Radiat 10:137–143
Valek BC (2003) X-ray microdiffraction studies of mechanical behavior and electromigration in thin film structures. Dissertation, Stanford University
MacDowell AA, Celestre RS, Tamura N et al (2001) Submicron X-ray diffraction. Nucl Instrum Methods Phys Res 467–468:936–943
Chung JS, Ice GE (1999) Automated indexing for texture and strain measurement with broad-bandpass X-ray microbeams. J Appl Phys 86:5249–5255
Tamura N, Chung JS, Ice GE et al (1999) Strain and texture in Al-interconnect wires measured by X-ray microbeam diffraction. Mater Res Soc Proc 563:175–180
Tamura N, MacDowell AA, Celestre RS et al (2002) High spatial resolution grain orientation and strain mapping in thin films using polychromatic submicron X-ray diffraction. Appl Phys Lett 80:3724–3726
Ice GE, Larson BC (2000) 3D X-ray crystal microscope. Adv Eng Mater 2:643–646
Valek BC, Bravman JC, Tamura N et al (2002) Electromigration-induced plastic deformation in passivated metal lines. Appl Phys Lett 81:4168–4170
Tamura N, Spolenak R, Valek BC, Manceau A, Meier Chang N, Celestre RS, MacDowell AA, Padmore HA, Patel JR (2002) Submicron X-ray diffraction and its applications to problems in materials and environmental science. Rev Sci Instrum 73:1369–1372
Valek BC, Tamura N, Spolenak R et al (2003) Early stage of plastic deformation in thin films undergoing electromigration. J Appl Phys 94:3757–3761
Spolenak R, Brown WL, Tamura N et al (2003) Local plasticity of Al thin films as revealed by X-ray microdiffraction. Phys Rev Lett 90:096102–096104
Budiman AS, Tamura N, Valek BC et al (2004) Materials, technology and reliability for advanced interconnects and low-k dielectrics. Mat Res Soc Proc 812:345–350
Wu AT, Tu KN, Lloyd JR et al (2004) Electromigration-induced microstructure evolution in tin studied by synchrotron X-ray microdiffraction. Appl Phys Lett 85:2490–2492
Tamura N, Padmore HA, Patel JR (2005) High spatial resolution stress measurements using synchrotron based scanning X-ray microdiffraction with white or monochromatic beam. Mat Sci Eng 399:92–98
Wu AT, Tamura N, Lloyd JR et al (2005) Synchrotron X-ray micro-diffraction analysis on microstructure evolution in Sn under electromigration. In: MRS proceedings, vol 863, Cambridge University Press, Cambridge, pp B9–10
Budiman AS, Tamura N, Valek BC et al (2006) Crystal plasticity in Cu damascene interconnect lines undergoing electromigration as revealed by synchrotron X-ray microdiffraction. Appl Phys Lett 88:233515
Budiman AS, Tamura N, Valek BC et al (2006) Electromigration-induced plastic deformation in Cu damascene interconnect lines as revealed by synchrotron X-ray microdiffraction. In: Materials, technology and reliability of low-k dielectrics and copper interconnects proceedings of symposium F held at the 2006 MRS spring meeting, vol 914, pp 295–304
Budiman AS, Hau-Riege CS, Besser PR et al (2007) Plasticity-amplified diffusivity: dislocation cores as fast diffusion paths in Cu interconnects. In: Proceedings of 45th annual IEEE international reliability physics symposium, pp 122–127
Cahn RW (1949) Recrystallization of single crystals after plastic bending. J Inst Metals 76:121
Gilman JJ (1955) Structure and polygonization of bent zinc monocrystals. Acta Metall 3:277–288
WR Hibbard, CG Dunn (1956) Creep and recovery. American Society for Metals, Metals Park, Ohio, p 52
Patel JR (1958) Arrangements of dislocations in plastically bent silicon crystals. J Appl Phys 29:170–176
Cahn RW (1949) Recrystallization of single crystals after plastic bending. J Inst Met 76:121–141
Nye JF (1953) Some geometrical relations in dislocated crystals. Acta Metall 1:153–162
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Budiman, A.S. (2015). Synchrotron White-Beam X-ray Microdiffraction at the Advanced Light Source, Berkeley Lab. In: Probing Crystal Plasticity at the Nanoscales. SpringerBriefs in Applied Sciences and Technology. Springer, Singapore. https://doi.org/10.1007/978-981-287-335-4_2
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DOI: https://doi.org/10.1007/978-981-287-335-4_2
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