Abstract
This paper presents the modeling of electrothermally actuated bimorph actuator for out-of-plane actuation application. Al-Si bimorph was optimized for higher displacement applications. Temperature distribution analysis of the Al-Si bimorph combination was chosen due to their larger displacement range. The modeling of Al-Si was performed with FEM and analytical analysis. Temperature distribution across the bimorph actuator with respect to length and applied voltage was optimized using FEM, lumped, and analytical analysis. The maximum temperature across Al-Si bimorph was achieved around 106 °C without convection and 85 °C with convection.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Xie, H., Fedder, G.: CMOS z-axis capacitive accelerometer with comb-finger sensing. In: Proceedings IEEE Micro Electro Mechanical Systems (MEMS), pp. 496–501 (2000)
Yazdi, N., Ayazi, F., Najafi, K.: Micromachined inertial sensors. Proc. IEEE 86(8), 1640–1659 (1998)
Albarbar, A., Mekid, S., Starr, A., Pietruszkiewicz, R.: Suitability of MEMS accelerometers for condition monitoring: an experimental study. Sensors 8, 784–799 (2008)
Mere, V., Vikram Maharshi, A., Agarwal, A.: Thermally actuated MEMS micromirror: design aspects. Asian J. Phys. 23(4), 00–001 (2014a)
Milanovic, V., Matus, G.A., Mccormick, D.T.: Gimbal-Less monolithic silicon actuators for tip-tilt-piston micromirror applications. selected topics in quantum electronics. IEEE J. 10(3), 462–471 (2004)
Maharshi, V., Mere, V., Agarwal, A.: Deaign and fabrication of electro thermal 1-D micro mirror. In: IEEE Electron Devices Kolkata Conference (EDKCON), pp. 419–422. kolkata. India (2018)
Mere, V., Vikram Maharshi, A., Agarwal, A.: Thermally actuated MEMS micromirror: design aspects. Asian J. Phys. 23, 631–640 (2014b)
Abdel-Rahman, E.M., Younis, M.I., Nayfeh, A.H.: Characterization of the mechanical behavior of an electrostatically actuated microbeam. J. Micromech. Microeng. 12(6), 759–766 (2002)
Hassanzadeh, A.: Design Considerations for Basic MEMS Electrostatic Actuators. 978–1–4244–3325–4/09/©2009 IEEE
Harris, N.R., Hill, M., Torah, R., Townsend, R., Beeby, S., White, N.M., Ding, J.: A multilayer thick-film PZT actuator for MEMs applications. Sens. Actuators A 132, 311–316 (2006)
Kanno, I.: Piezoelectric MEMS for energy harvesting. J. Phys.: Conf. Ser. 660, 012001 (2015)
Ogando, K., La Forgia1, N., Zárate, J.J., Pastoriza, H.: Design and characterization of a fully compliant out-of-plane thermal actuator. Sens. Actuators A 188, 349–358 (2012)
Jia, K., Pal, S., Xie, H.: An electrothermal tip–tilt–piston micromirror based on folded dual s-shaped bimorphs. J. Microelectromech. Syst. 18(5) (2009)
Moulton, T., Anantha Suresh, G.K.: Micromechanical Devices with embedded electro-thermal-compliant actuation. Sens. Actuators A 90, 38±48 (2001)
Nilesh, D., Mankameandg, K., Suresh, A.: Comprehensive thermal modelling and characterization of an electro-thermal-compliant micro actuator. J. Micromech. Microeng. 11, 452–462 (2001)
Xie, H., Pan, Y., Fedder, G.K.: A SCS CMOS micromirror for optical coherence tomographic imaging. In: The Fifteenth IEEE International Conference on Micro Electro Mechanical Systems, 2002, pp. 495–498. IEEE (2002)
Maharshi, V., Mere, V., Agarwal, A.: Multi-layered [Au/Si3N4/SiO2] thermal actuator realization using metal passivated TMAH micro-machining. Eng. Res. Express, IOP 1, 015006 (2019)
Todd, S.T.: Electrothermomechanical Modelling Of a 1-D Electro thermal MEMS Micromirror
Acknowledgements
The authors acknowledge the support of Smart Sensor Labs at CSIR- CEERI Pilani.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2021 The Author(s), under exclusive license to Springer Nature Singapore Pte Ltd.
About this paper
Cite this paper
Maharshi, V., Mere, V., Agarwal, A. (2021). Modeling of Electrothermal Microactuator. In: Mukherjee, S., Datta, A., Manna, S., Sahoo, S.K. (eds) Computational Mathematics, Nanoelectronics, and Astrophysics. CMNA 2018. Springer Proceedings in Mathematics & Statistics, vol 342. Springer, Singapore. https://doi.org/10.1007/978-981-15-9708-4_9
Download citation
DOI: https://doi.org/10.1007/978-981-15-9708-4_9
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-15-9707-7
Online ISBN: 978-981-15-9708-4
eBook Packages: Mathematics and StatisticsMathematics and Statistics (R0)