Abstract
The automotive industry has always been an area, where the possibility to explore more and to achieve next-gen technology remains a challenge. As the market is growing, the possibilities are being explored on a wider scale. And these growing possibilities are increasingly demanding the research for the more accurate functioning of the automotive through the use of various sensors and the integration aspects associated with them. While enhancing the quality/performance of the vehicle, the need to reduce the size of sensors always remains a challenge. Over the period of time, the technology has advanced and these challenges are taken care through the use of MEMS (Microelectro mechanical systems) integrated systems. MEMS helps in devising microscale sensors with higher accuracy in small size and low cost. In the automotive, there exists a huge need for these installing these sensors and utilizing them to refine the performance characteristics of the vehicles. This chapter aims at discussing important MEMS-based sensors and their applications in the automotive-like tire pressure and monitoring systems, engine management system, vehicle stability/passenger safety system, and emission control.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Arai N, Sekine Y, Nishimura Y et al (1990) Advance design for a bypass type of hot-wire air flow sensor. In: SAE International congress & exposition
Baney W, Chilcott D, Huang X et al (1997) A comparison between micromachined piezoresistive and capacitive pressure sensors. In: SAE international truck and bus meeting
Basu AK, Sarkar H, Bhattacharya S (2016) Fabrication and resilience measurement of thin aluminium cantilevers using scanning probe microscopy. In: Foundations and frontiers in computer, communication and electrical engineering—proceedings of the 3rd international conference on foundations and frontiers in computer, communication and electrical engineering, C2E2, 2016
Bhatt G, Kant R, Mishra K et al (2017) Impact of surface roughness on dielectrophoretically assisted concentration of microorganisms over PCB based platforms. Biomed Microdev. https://doi.org/10.1007/s10544-017-0172-5
Bhatt G, Kumar S, Sundriyal P et al (2016) Microfluidics overview. In: Microfluidics for biologists: fundamentals and applications. Springer, pp 33–83
Carter J (1996) Thermistor control of engine coolant systems. Sens Mag 65–68
Chauhan PS, Bhattacharya S (2017) Vanadium pentoxide nanostructures for sensitive detection of hydrogen gas at room temperature. J Energy Environ Sustain 2:69–74
Chauhan PS, Bhattacharya S (2018) Highly sensitive V2O5·1.6H2O nanostructures for sensing of helium gas at room temperature. Mater Lett 217:83–87. https://doi.org/10.1016/j.matlet.2018.01.056
Chauhan PS, Rai A (2017) Enhanced photocatalytic performance of vertically grown ZnO nanorods decorated with metals (Al, Ag, Au, and Au–Pd) for degradation of industrial dye. Mater Res Express 4:055004
Chou SY (1996) Nanoimprint lithography. J Vac Sci Technol B Microelectron Nanom Struct 14:4129. https://doi.org/10.1116/1.588605
Dietmayer K (1999) New concepts for contactless angle measurement in automotive applications. In: SAE international congress & exposition
Dlugos D (1998) Wiegand effect sensors theory and applications. Sens Mag 32–34
Dunbar M, Sager K (2000) A novel, media-compatible pressure sensor for automotive applications. Sens Mag
Eddy DS, Sparks DR (1998) Application of MEMS technology in automotive sensors and actuators. Proc IEEE 86:1747–1755. https://doi.org/10.1109/5.704280
Fleming WJ (2008) New automotive sensors—a review. IEEE Sens J 8:1900–1921. https://doi.org/10.1109/JSEN.2008.2006452
Fleming WJ (2001) Overview of automotive sensors. IEEE Sens J 1:296–308. https://doi.org/10.1109/7361.983469
Frodl R, Schoedlbauer D (1998) Modern concepts for low cost, high performance position sensors. In: SAE international congress & exposition, p 980
Guo Z, Li M, Liu J (2008) Highly porous CdO nanowires: preparation based on hydroxy- and carbonate-containing cadmium compound precursor nanowires, gas sensing and optical properties. Nanotechnology 19:245611. https://doi.org/10.1088/0957-4484/19/24/245611
Handtmann M, Aigner R, Meckes A, Wachutka GKM (2002) Sensitivity enhancement of MEMS inertial sensors using negative springs and active control. Sens Actuators, A Phys 97–98:153–160. https://doi.org/10.1016/S0924-4247(01)00818-4
Heinzelmann S, Pechhold F, Marto A (2006) Pressure gauge glow plug
Hellman AN, Rau KR, Yoon HH et al (2007) Laser-induced mixing in microfluidic channels. Anal Chem 79:4484–4492. https://doi.org/10.1021/ac070081i
Herberger S, Herold M, Ulmer H et al (2010) Detection of human effluents by a MOS gas sensor in correlation to VOC quantification by GC/MS. Build Environ 45:2430–2439. https://doi.org/10.1016/j.buildenv.2010.05.005
Kato N, Ikoma N, Nishikawa S (1996) Exhaust gas temperature sensor for OBD-II catalyst monitoring. In: SAE international congress & exposition
Kim DH, Yoon JY, Park HC, Kim KH (2000) CO2-sensing characteristics of SnO2 thick film by coating lanthanum oxide. Sens Actuators, B Chem 62:61–66. https://doi.org/10.1016/S0925-4005(99)00305-6
Konzelmann U, Hecht H, Lembke M (1995) Breakthrough in reverse flow detection—a new mass air flow meter using micro silicon technology. In: SAE international congress & exposition
Kraft M, White NM (2013) MEMS for automotive and aerospace applications. Elsevier
Kumar A, Gupta A, Kant R et al (2013) Optimization of laser machining process for the preparation of photomasks, and its application to microsystems fabrication. J Micro/Nanolithog. MEMS, MOEMS 12:041203. https://doi.org/10.1117/1.JMM.12.4.041203
Lacanette K (1997) Using IC temperature sensors to protect electronic systems. Sens Mag 28–34
Li X, Ramasamy R, Dutta PK (2009) Study of the resistance behavior of anatase and rutile thick films towards carbon monoxide and oxygen at high temperatures and possibilities for sensing applications. Sens Actuators, B Chem 143:308–315. https://doi.org/10.1016/j.snb.2009.09.021
Lickfelt BK, Arai H, Strock N (2013) Localization of tire for TPMS and smart entry system 1–8
Löhndorf M, Kvisterøy T, Westby E, Halvorsen E (2007) Evaluation of energy harvesting concepts for tire pressure monitoring systems. Int Work Micro Nanotechnol Power Gener Energy Convers Appl 331–334
Madni A, Wells R (2000) An advanced steering wheel sensor. Sen Mag 28–40
Mao S, Cui S, Lu G et al (2012) Tuning gas-sensing properties of reduced graphene oxide using tin oxide nanocrystals. J Mater Chem 22:11009–11013. https://doi.org/10.1039/c2jm30378g
Pawlak A, Adams J, Shirai T (1991) Novel variable reluctance sensors. In: SAE international congress & exposition
Quinto-Su PA, Lai HH, Yoon HH et al (2008) Examination of laser microbeam cell lysis in a PDMS microfluidic channel using time-resolved imaging. Lab Chip 8:408–414. https://doi.org/10.1039/b715708h
Sabetti A, Bishop R, Charboneau T, Wiecek T (1988) Automotive pressure transducer for underhood applications. In: SAE international congress & exposition
Schuster J, Czarnocki W (1997) Automotive pressure sensors: evolution of a micromachined sensor application. In: SAE international truck and bus meeting
Shaw M, Ziglioli F, Combi C, Baldo L (2008) Package design of pressure sensors for high volume consumer applications. In: Proceedings—electronic components and technology conference. pp 834–840
Shaw ML (2002) Considerations to improve battery life in direct tire pressure monitoring. In: SAE international congress & exposition. pp 580–589
Singh RK, Kumar A, Kant R et al (2014) Design and fabrication of 3-dimensional helical structures in polydimethylsiloxane for flow control applications. Microsyst Technol 20:101–111. https://doi.org/10.1007/s00542-013-1738-7
Stewart WD, Boudaoud I, Molyneaux R et al (2006) Determination of wheel sensor position using a wireless solution
Sundriyal P, Bhattacharya S (2017) Inkjet-printed electrodes on A4 paper substrates for low-cost, disposable, and flexible asymmetric supercapacitors. ACS Appl Mater Interfaces. https://doi.org/10.1021/acsami.7b11262
Treutler CPO (2001) Magnetic sensors for automotive applications. Sens Actuators, Phys. https://doi.org/10.1016/s0924-4247(01)00621-5
Weinberg H (2002) MEMS sensors are driving the automotive industry. Sens Mag 1–9
Whitesides GM, Ostuni E, Takayama S et al (2001) Soft lithography in biology and biochemistry. Annu Rev Biomed Eng 3:335–373. https://doi.org/10.1146/annurev.bioeng.3.1.335
Woerth A, Winner H, Bosch R (1999) Apparatus for determining rotational position of a rotatable element without contacting it
Yulong Z, Libo Z, Zhuangde J (2003) A novel high temperature pressure sensor on the basis of SOI layers. Sens Actuators, Phys 108–111
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2019 Springer Nature Singapore Pte Ltd.
About this chapter
Cite this chapter
Bhatt, G., Manoharan, K., Chauhan, P.S., Bhattacharya, S. (2019). MEMS Sensors for Automotive Applications: A Review. In: Bhattacharya, S., Agarwal, A., Prakash, O., Singh, S. (eds) Sensors for Automotive and Aerospace Applications. Energy, Environment, and Sustainability. Springer, Singapore. https://doi.org/10.1007/978-981-13-3290-6_12
Download citation
DOI: https://doi.org/10.1007/978-981-13-3290-6_12
Published:
Publisher Name: Springer, Singapore
Print ISBN: 978-981-13-3289-0
Online ISBN: 978-981-13-3290-6
eBook Packages: EngineeringEngineering (R0)