Abstract
Nanoporous thin layer of Zeolite was deposited on Silicon wafers by using a technique fully compatible with standard integrated circuit manufacture. Differently from previous attempts of Zeolite layer growth or sieve micro-membrane fabrication in situ by calcination, the proposed technique is performed at low temperature by mixing the nanoporous material with selected vegetable oils, having high iodine value, and spin coating on different substrates, including also NMOS circuits. Various tests have been carried out on urea molecules and miRNA trapping, confirming the suitability of using Zeolite as iono-electronic interface in biochemical or biophysical to electrical energy transduction processes.
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Fiorillo, A.S., Pullano, S.A., Tiriolo, R., Vinko, J.D. (2016). Iono-Electronic Interface Based on Innovative Low Temperature Zeolite Coated NMOS (Circuits) for Bio-nanosensor Manufacture. In: Bonča, J., Kruchinin, S. (eds) Nanomaterials for Security. NATO Science for Peace and Security Series A: Chemistry and Biology. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-7593-9_16
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DOI: https://doi.org/10.1007/978-94-017-7593-9_16
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