Abstract
The main focus of the paper is the development of technological process for the production of complex 3D microstructure, from designing it by using computer generated holography to its physical 3D patterning by exploiting the process of electron beam lithography. The logo image was chosen for numerical generation, which was performed by using Gerchberg–Saxton algorithm for computer generated hologram design. Physical implementation of microstructure was performed by using a single layer polymethyl methacrylate (PMMA) as a basis for 3D microstructure, which was exposed by using e-beam lithography system e-LINEplus. After production, verification of 3D microstructure is performed by exposing it under the laser beam and qualitative analysis is performed by using atomic force microscope. Finally, improvement of mass production of complex microstructures, designed by using computer generated holography, is presented.
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Acknowledgements
This research was funded by a grant (No. MIP-026/2014) from the Research Council of Lithuania.
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Šakalys, R., Janušas, G., Palevičius, A., Grigaliūnas, V., Palevičius, P. (2016). Vibration Based Microstructure Replication and Analysis. In: Bonča, J., Kruchinin, S. (eds) Nanomaterials for Security. NATO Science for Peace and Security Series A: Chemistry and Biology. Springer, Dordrecht. https://doi.org/10.1007/978-94-017-7593-9_13
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DOI: https://doi.org/10.1007/978-94-017-7593-9_13
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