Abstract
In this chapter we review the fabrication of silicon based nanochannels and their use in capillarity studies. Static capillarity measurements of the pressure in isolated liquid plugs confined in hydrophilic nanochannels, confirm the existence of capillary negative pressure, quantitatively in accordance with the Young-Laplace equation. The negative pressure can be quantified through measurement of the elasto-capillary deformation of the channel capping due to the pressure difference with the atmospheric pressure. By measuring the capillary filling dynamics in nanochannels of uniform and accurately defined height, different (apparent) viscosity effects in confinement have been revealed. One effect (visible in insulating sub-100-nm channels) is likely to be related to the influence of the electrical double layer (an electroviscous effect), while the other effect (visible in conductive sub-50 nm channels) seems to be related to a decrease in the effective channel due to a thin immobile layer close to the polar or charged channel wall.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Stern MB, Geis MW, Curtin JE (1997) Nanochannel fabrication for chemical sensors. J Vac Sci Technol B 15:2887–2891
Turner SW, Perez AM, Lopez A, Craighead HG (1998) Monolithic nanofluid sieving structures for DNA manipulation. J Vac Sci Technol B 16:3835–3840
Han J, Craighead HG (1999) Entropic trapping and sieving of long DNA molecules in a nanofluidic channel. J Vac Sci Technol A 17:2142–2147
Haneveld J, Jansen H, Berenschot E, Tas N, Elwenspoek M (2003) Wet anisotropic etching for fluidic 1D nanochannels. J Micromech Microeng 13:S62–S66
Haneveld J (2006) Nanochannel fabrication and characterization using bond micromachining. Ph.D. Thesis, University of Twente
Persson F, Thamdrup LH, Mikkelsen MBL, Jaarlgard SE, Skafte-Pedersen P, Bruus H, Kristensen A (2007) Double thermal oxidation scheme for the fabrication of SiO2 nanochannels. Nanotechnology 18(245301):1–4
Haneveld J, Tas NR, Brunets N, Jansen HV, Elwenspoek M (2008) Capillary filling of sub-10 nm nanochannels. J Appl Phys 104(014309):1–6
Huygens C (1672) An extract of a letter of M. Hugens to the author of the Journal des Scavans of July 25. 1672. Attempting to render the cause of that odd phenomenon of the quicksilver remaining suspended far above the usual height in Torricellian experiment. Philos Trans 7:5027–5030
Sir Isaac Newton (1721) Opticks: or a treatise of the reflections, refraction, inflections and colours of light, 3rd Book, 3rd edn, pp 365–366
Dixon HH, Joly J (1895) On the ascent of sap. Philos Trans R Soc Lond B 186:563–576
Berthelot M (1850) Sur quelques phénomènes de dilatation forcée des liquides. Annales de chimie et de Physique 30:232–237
Briggs LJ (1950) Limiting negative pressure of water. J Appl Phys 21:721–722
Fisher JC (1948) The fracture of liquids. J Appl Phys 19:1062–1067
Kelvin L (1870) On the equilibrium vapour at a curved surface of liquid. Proc R Soc Edinb 7:63–68
Wiig EO, Juhola AJ (1949) The adsorption of water vapor on activated charcoal. J Am Chem Soc 71:561–568
Fisher LR, Israelachvili JN (1980) Determination of the capillary pressure in menisci of molecular dimensions. Chem Phys Lett 76:325–328
Tas NR, Mela P, Kramer T, Berenschot JW, van den Berg A (2003) Capillarity induced negative pressure of water plugs in nanochannels. Nano Lett 3:1537–1540
van Honschoten JW, Escalante M, Tas NR, Elwenspoek M (2009) Formation of liquid menisci in flexible nanochannels. J Colloid Interface Sci 329:133–139
Tas NR, Escalante M, van Honschoten JW, Jansen HV, Elwenspoek M (2010) Capillary negative pressure measured by nanochannel collapse. Langmuir 26:1473–1476
Bocquet L, Charlaix E (2010) Nanofluidics, from bulk to interfaces. Chem Soc Rev 39:1073–1095
Washburn EW (1921) The dynamics of capillary flow. Phys Rev 17:273–283
Hibara A, Saito T, Kim H-B, Tokeshi M, Ooi T, Nakao M, Kitamori T (2002) Nanochannels on a fused-silica microchip and liquid properties investigated by time-resolved fluorescence measurements. Anal Chem 74:6170–6176
Tas NR, Haneveld J, Jansen HV, Elwenspoek M, van den Berg A (2004) Capillary filling speed of water in nanochannels. Appl Phys Lett 85:3274–3276
Han A, Mondin G, Hegelbach NG, de Rooij NF, Staufer U (2006) Filling kinetics of liquids in nanochannels as narrow as 27 nm by capillary force. J Colloid Interface Sci 293:151–157
van Delft KM, Eijkel JCT, Mijatovic D, Druzhinina TS, Rathgen H, Tas NR, van den Berg A, Mugele F (2007) Micromachined Fabry-Perot interferometer with embedded nanochannels for nanoscale fluid dynamics. Nano Lett 7:345–350
Schoch RB, Han J, Renaud P (2008) Transport phenomena in nanofluidics. Rev Mod Phys 80:839–883
Levine S, Marriott JR, Robinson K (1975) Theory of Electrokinetic flow in a narrow parallel-plate channel. J Chem Soc Faraday Trans 2(71):1–11
Mortensen NA, Kristensen A (2008) Electroviscous effects in capillary filling of nanochannels. Appl Phys Lett 92(063110):1–3
Jansen KGH, Hoang HT, Floris J, de Vries J, Tas NR, Eijkel JCT, Hankemeier T (2008) Anal Chem 80:8095–8101
Thamdrup LH, Persson F, Bruus H, Kristensen A, Flyvbjerg H (2007) Experimental investigation of bubble formation during capillary filling of SiO2 nanoslits. Appl Phys Lett 91(163505):1–3
Derjaguin BV, Churaev NV (1974) Structural component of disjoining pressure. J Colloid Interface Sci 49:249–255
Israelachvili JN, Adams GE (1978) Measurement of forces between two mica surfaces in aqueous electrolyte solutions in the range 0–100 nm. J Chem Soc Faraday Trans 74:975–1001
Pashley RM (1981) Hydration forces between mica surfaces in aqueous electrolyte solutions. J Colloid Interface Sci 80:153–162
Pashley RM (1981) DLVO and hydration forces between mica surfaces in Li+, Na+, K+ and Cs+ electrolyte solutions: a correlation of double-layer and hydration forces with surface cation exchange properties. J Colloid Interface Sci 83:531–546
Pashley RM, Israelachvili JN (1984) Molecular layering of water in thin films between mica surfaces and its relation to hydration forces. J Colloid Interface Sci 101:511–523
Horn RG, Smith DT, Haller W (1989) Surface forces and viscosity of water measured between silica sheets. Chem Phys Lett 162:404–408
Churaev NV, Sobolev VD, Zorin ZM (1971) Special discussion in thin liquid films and boundary layers. Academic, New York, pp 213–220
Israelachvili JN (1986) Measurement of the viscosity of liquids in very thin films. J Colloid Interface Sci 110:263–271
Raviv U, Laurat P, Klein J (2001) Fluidity of water confined to subnanometre films. Nature 413:51–54
Raviv U, Klein J (2002) Fluidity of bound hydration layers. Science 297:1540–1543
Li T-D, Gao J, Szoszkiewicz R, Landman U, Riedo E (2007) Structures and viscous water in subnanometer gaps. Phys Rev B 75(115415):1–5
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2014 Springer Science+Business Media Dordrecht
About this paper
Cite this paper
Tas, N., Brunets, N., van Honschoten, J.W., Haneveld, J., Jansen, H.V. (2014). Static and Dynamic Capillarity in Silicon Based Nanochannels. In: Mercury, L., Tas, N., Zilberbrand, M. (eds) Transport and Reactivity of Solutions in Confined Hydrosystems. NATO Science for Peace and Security Series C: Environmental Security. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-7534-3_3
Download citation
DOI: https://doi.org/10.1007/978-94-007-7534-3_3
Published:
Publisher Name: Springer, Dordrecht
Print ISBN: 978-94-007-7533-6
Online ISBN: 978-94-007-7534-3
eBook Packages: Earth and Environmental ScienceEarth and Environmental Science (R0)