Abstract
In this chapter, we present an overview of an optimized method for the determination of surface elastic residual stress in thin ceramic coatings by instrumented sharp indentation. The methodology is based on nanoindentation testing on focused ion beam (FIB) milled micro-pillars. Finite element modeling (FEM) of strain relief after FIB milling of annular trenches demonstrates that full relaxation of pre-existing residual stress state occurs when the depth of the trench approaches the diameter of the remaining pillar. Under this assumption, the average residual stress present in the coating can be calculated by comparing two different sets of load-depth curves: the first one obtained at the center of stress-relieved pillars, the second one on the undisturbed (residually stressed) surface. The influence of substrate’s stiffness and pillar’s edges on the indentation behavior can be taken into account by means of analytical simulations of the contact stress distributions. Finally, the effect of residual stress on fracture toughness and deformation modes of a TiN PVD coating is analyzed and discussed here.
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References
Anstis GR, Chantikul P, Lawn BR, Marshall DB (1981) A critical evaluation of indentation techniques for measuring fracture toughness: i, direct crack measurements. J Am Ceram Soc 64(9):533–538. doi:10.1111/j.1151-2916.1981.tb10320.x
Bei H, Shim S, Miller MK, Pharr GM, George EP (2007) Effects of focused ion beam milling on the nanomechanical behavior of a molybdenum-alloy single crystal. Appl Phys Lett 91(11):111915
Bemporad E, Sebastiani M, Casadei F, Carassiti F (2007) Modelling, production and characterisation of duplex coatings (HVOF and PVD) on Ti–6Al–4 V substrate for specific mechanical applications. Surf Coat Technol 201(18):7652–7662. doi:http://dx.doi.org/10.1016/j.surfcoat.2007.02.041
Bemporad E, Sebastiani M, Staia MH, Puchi Cabrera E (2008) Tribological studies on PVD/HVOF duplex coatings on Ti6Al4 V substrate. Surf Coat Technol 203(5–7):566–571. doi:http://dx.doi.org/10.1016/j.surfcoat.2008.06.055
Bolshakov A, Oliver WC, Pharr GM (1996) Influences of stress on the measurement of mechanical properties using nanoindentation: Part II. Finite element simulations. J Mater Res 11(03):760–768. doi:10.1557/JMR.1996.0092
Bull SJ (2005) Nanoindentation of coatings. J Phys D Appl Phys 38(24):R393
Bull SJ, Berasetegui EG (2006) An overview of the potential of quantitative coating adhesion measurement by scratch testing. Tribol Int 39(2):99–114. doi:http://dx.doi.org/10.1016/j.triboint.2005.04.013
Chason E, Sheldon BW, Freund LB, Floro JA, Hearne SJ (2002) Origin of compressive residual stress in polycrystalline thin films. Phys Rev Lett 88(15):156103
Chen J, Bull SJ (2009) Modelling the limits of coating toughness in brittle coated systems. Thin Solid Films 517(9):2945–2952. doi:http://dx.doi.org/10.1016/j.tsf.2008.12.054
Davis CA (1993) A simple model for the formation of compressive stress in thin films by ion bombardment. Thin Solid Films 226 (1):30-34. doi:http://dx.doi.org/10.1016/0040-6090(93)90201-Y
Detor AJ, Hodge AM, Chason E, Wang Y, Xu H, Conyers M, Nikroo A, Hamza A (2009) Stress and microstructure evolution in thick sputtered films. Acta Materialia 57(7):2055–2065. doi:http://dx.doi.org/10.1016/j.actamat.2008.12.042
Dye D, Stone HJ, Reed RC (2001) Intergranular and interphase microstresses. Curr Opin Solid State Mater Sci 5(1):31–37. doi:http://dx.doi.org/10.1016/S1359-0286(00)00019-X
Espinosa HD, Prorok BC, Fischer M (2003) A methodology for determining mechanical properties of freestanding thin films and MEMS materials. J Mech Phys Solids 51(1):47–67
FilmDoctor® (2013) software for the evaluation of mechanical contact for homogeneous and layered materials. www.siomec.de/FilmDoctor. 2013
Fischer W, Malzbender J, Blass G, Steinbrech RW (2005) Residual stresses in planar solid oxide fuel cells. J Power Sources 150:73–77. doi:http://dx.doi.org/10.1016/j.jpowsour.2005.02.014
Gelfi M, Bontempi E, Roberti R, Depero LE (2004) X-ray diffraction Debye Ring Analysis for STress measurement (DRAST): a new method to evaluate residual stresses. Acta Materialia 52(3):583–589. doi:http://dx.doi.org/10.1016/j.actamat.2003.09.041
Jakes JE, Frihart CR, Beecher JF, Moon RJ, Resto PJ, Melgarejo ZH, Suárez OM, Baumgart H, Elmustafa AA, Stone DS (2009) Nanoindentation near the edge. J Mater Res 24(03):1016–1031. doi:10.1557/jmr.2009.0076
Korsunsky AM (2009) Eigenstrain analysis of residual strains and stresses. J Strain Anal Eng Des 44(1):29–43. doi:10.1243/03093247jsa423
Korsunsky AM, Sebastiani M, Bemporad E (2009) Focused ion beam ring drilling for residual stress evaluation. Mater Lett 63(22):1961–1963. doi:http://dx.doi.org/10.1016/j.matlet.2009.06.020
Korsunsky AM, Sebastiani M, Bemporad E (2010) Residual stress evaluation at the micrometer scale: Analysis of thin coatings by FIB milling and digital image correlation. Surf Coat Technol 205(7):2393-2403. doi:http://dx.doi.org/10.1016/j.surfcoat.2010.09.033
Marks NA, McKenzie DR, Pailthorpe BA (1996) Molecular-dynamics study of compressive stress generation. Phys Rev B 53(7):4117–4124
Oliver WC, Pharr GM (1992) An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J Mater Res 7(06):1564–1583. doi:10.1557/JMR.1992.1564
Oliver WC, Pharr GM (2004) Measurement of hardness and elastic modulus by instrumented indentation: advances in understanding and refinements to methodology. J Mater Res 19(01):3–20. doi:10.1557/jmr.2004.19.1.3
Pao C-W, Foiles SM, Webb EB III, Srolovitz DJ, Floro JA (2007) Thin film compressive stresses due to adatom insertion into grain boundaries. Phys Rev Lett 99(3):036102
Pauleau Y (2001) Generation and evolution of residual stresses in physical vapour-deposited thin films. Vacuum 61(2–4):175–181. doi:http://dx.doi.org/10.1016/S0042-207X(00)00475-9
Roy RK, Lee K-R (2007) Biomedical applications of diamond-like carbon coatings: A review. J Biomed Mater Res B Appl Biomater 83B(1):72–84. doi:10.1002/jbm.b.30768
Schwarzer N, Hermann I, Chudoba T, Richter F (2001) Contact modelling in the vicinity of an edge. Surf Coat Technol 146–147:371–377. doi:http://dx.doi.org/10.1016/S0257-8972(01)01418-9
Sebastiani M, Bemporad E, Carassiti F, Schwarzer N (2010) Residual stress measurement at the micrometer scale: focused ion beam (FIB) milling and nanoindentation testing. Phil Mag 91(7–9):1121–1136. doi:10.1080/14786431003800883
Sebastiani M, Eberl C, Bemporad E, Pharr GM (2011) Depth-resolved residual stress analysis of thin coatings by a new FIB–DIC method. Mater Sci Eng: A 528(27):7901–7908. doi:http://dx.doi.org/10.1016/j.msea.2011.07.001
Song X, Yeap KB, Zhu J, Belnoue J, Sebastiani M, Bemporad E, Zeng K, Korsunsky AM (2012) Residual stress measurement in thin films at sub-micron scale using Focused Ion Beam milling and imaging. Thin Solid Films 520(6):2073–2076. doi:http://dx.doi.org/10.1016/j.tsf.2011.10.211
Suresh S, Giannakopoulos AE (1998) A new method for estimating residual stresses by instrumented sharp indentation. Acta Materialia 46(16):5755–5767. doi:http://dx.doi.org/10.1016/S1359-6454(98)00226-2
Teixeira V (2002) Residual stress and cracking in thin PVD coatings. Vacuum 64(3–4):393–399. doi:http://dx.doi.org/10.1016/S0042-207X(01)00327-X
Toonder JD, Malzbender J, With GD, Balkenende R (2002) Fracture Toughness and Adhesion Energy of Sol-gel Coatings on Glass. J Mater Res 17(01):224–233. doi:10.1557/JMR.2002.0032
Tsui TY, Oliver WC, Pharr GM (1996) Influences of stress on the measurement of mechanical properties using nanoindentation: part I. experimental studies in an aluminum alloy. J Mater Res 11(03):752–759. doi:10.1557/JMR.1996.0091
Uchic MD, Dimiduk DM, Florando JN, Nix WD (2004) Sample dimensions influence strength and crystal plasticity. Science 305(5686):986–989. doi:10.1126/science.1098993
Wang L, Bei H, Gao YF, Lu ZP, Nieh TG (2011) Effect of residual stresses on the hardness of bulk metallic glasses. Acta Mater 59(7):2858–2864. doi:http://dx.doi.org/10.1016/j.actamat.2011.01.025
Windischmann H (1987) An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering. J Appl Phys 62(5):1800–1807
Withers PJ, Bhadeshia HKDH (2001) Residual stress. Part 1—Measurement techniques. Mater Sci Technol 17(4):355–365
Ye J, Shimizu S, Sato S, Kojima N, Noro J (2006) Bidirectional thermal expansion measurement for evaluating Poisson’s ratio of thin films. Appl Phys Lett 89(3):031913
Acknowledgments
Authors would like to acknowledge Daniele De Felicis for technical assistance during FIB analyses, performed at the interdepartmental laboratory of electron microscopy of university of Roma Tre, Rome Italy (http://www.lime.uniroma3.it), and prof. Laura Depero (University of Brescia) for XRD residual stress measurements.
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Sebastiani, M., Bemporad, E., Schwarzer, N., Carassiti, F. (2014). Effects of Residual Stress on Nano-Mechanical Behavior of Thin Films. In: Tiwari, A. (eds) Nanomechanical Analysis of High Performance Materials. Solid Mechanics and Its Applications, vol 203. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6919-9_14
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