Abstract
Using methods of the X-ray diffraction and Raman backscattering.were studied properties of AlGaAs/GaAs (100) MOCVD heterostructures which have been grown up at low temperature (LT). It is established, that dependence on Al concentration of AlGaAs solid solutions crystal lattice parameter does not submit to classical Vegard's law, and values of parameters are less than at GaAs.
Methods of Raman backscattering.shown that at high concentration of a carbon acceptor atoms concentrate on defects of a crystal lattice of AlGaAs solid solution with formation of carbon nanoclusters is confirmed.
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The scientific research is performed with support of the Russian Fund of Basic researches 09-02-97505-r_center_a, 09-02-90719-mob_st.
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Seredin, P. et al. (2010). XRD and Raman Study of Low Temperature AlGaAs/GaAs (100) Heterostructures. In: Gusev, E., Garfunkel, E., Dideikin, A. (eds) Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3807-4_18
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