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The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches

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Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators

Abstract

The present work attempts to provide a better insight on the dielectric charging in RF-MEMS capacitive switches that constitutes a key issue limiting parameter of their commercialization. The dependence of the charging process on the nature of dielectric materials widely used in these devices, such as SiO2, Si3N4, AlN, Al2O3, Ta2O5, HfO2, which consist of covalent or ionic bonds and may exhibit piezoelectric properties is discussed taking into account the effect of deposition conditions and resulting material stoichiometry. Another key issue parameter that accelerates the charging and discharging processes by providing enough energy to trapped charges to be released and to dipoles to overcome potential barriers and randomize their orientation is the temperature will be investigated too. Finally, the effect of device structure will be also taken into account.

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Authors and Affiliations

  1. Solid State Physics Section, Physics Department, University of Athens, Panepistimiopolis Zografos, Athens, 15784, Greece

    George Papaioannou

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  1. George Papaioannou
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Correspondence to George Papaioannou .

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Editors and Affiliations

  1. Qualcomm MEMS Technologies, Inc., Junction Avenue 2581, San Jose, 95134, USA

    Evgeni Gusev

  2. Inst. Advanced Materials Devices &, Nanotechnology, Rutgers University, Taylor Road 610, Piscataway, 08854, USA

    Eric Garfunkel

  3. A.E Ioffe Physico-Technical Institute, Russian Academy of Sciences, Polytekhnicheskaya ul. 26, St. Petersburg, 194021, Russian Federation

    Arthur Dideikin

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Papaioannou, G. (2010). The Impact of Dielectric Material and Temperature on Dielectric Charging in RF MEMS Capacitive Switches. In: Gusev, E., Garfunkel, E., Dideikin, A. (eds) Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators. NATO Science for Peace and Security Series B: Physics and Biophysics. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3807-4_11

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  • DOI: https://doi.org/10.1007/978-90-481-3807-4_11

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