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A Novel Approach for the Preparation of Metal Oxide/CNTs Composites for Sensing Applications

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Sensors and Microsystems

Part of the book series: Lecture Notes in Electrical Engineering ((LNEE,volume 54))

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Abstract

In this report we describe the preparation of metal oxide coated–carbon nanotubes (MeOx/CNTs) with a controlled thickness of the inorganic coating by a new atomic layer deposition (ALD) process based on non-aqueous sol-gel reactions. The as deposited films are amorphous and the coatings on the inside and outside the nanotube present a high conformality. The electrical and sensing properties of thin films of VOx-coated carbon nanotubes prepared by ALD have been investigated. The developed VOx/CNTs-based sensor devices show enhanced performance for NO2 monitoring compared to uncoated CNTs-based sensors.

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Reference

  1. M. Ritala and M. Leskela, In Handbook of Thin Film Materials (Ed. H.S. Nalwa), Vol. 1, Academic Press, San Diego, CA, 103–159 (2002).

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  2. E. Rauwel, G. Clavel, M. -G. Willinger, P. Rauwel and N. Pinna, Angew. Chem., Int. Ed., 47, 3592–3595 (2008).

    Article  Google Scholar 

  3. M. -G. Willinger, G. Neri, E. Rauwel, A. Bonavita, G. Micali and N. Pinna, Nano Lett., 8, 4201–4204 (2008).

    Article  Google Scholar 

  4. M. G. Willinger, G. Neri, A. Bonavita, G. Micali, E. Rauwel, T. Herntrich and N. Pinna, Phys. Chem. Chem. Phys. (in press).

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Author information

Authors and Affiliations

  1. Department of Industrial Chemistry and Materials Engineering, University of Messina, C/da di Dio, Vill. S. Agata, 98166, Messina, Italy

    G. Neri, A. Bonavita, G. Micali, G. Rizzo & N. Pinna

  2. Department of Chemistry, CICECO, University of Aveiro, 3810–193, Aveiro, Portugal

    M.-G. Willinger & E. Rauwel

Authors
  1. G. Neri
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  2. A. Bonavita
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  3. G. Micali
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  4. G. Rizzo
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  5. M.-G. Willinger
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  6. E. Rauwel
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  7. N. Pinna
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Corresponding author

Correspondence to G. Neri .

Editor information

Editors and Affiliations

  1. Dipto. Ingegneria Elettrica, UniversitĂ  di Pavia, Via Ferrata 1, Pavia, 27100, Italy

    Piero Malcovati

  2. Dipto. Fisica, UniversitĂ  Milano-Bicocca, Piazza della Scienza 3, Milano, 20126, Italy

    Andrea Baschirotto

  3. Dipto. Ingegneria Elettronica, UniversitĂ  di Roma, Tor Vergata, Via del Politecnico 1, Roma, 00133, Italy

    Arnaldo d'Amico

  4. Dipto. Ingegneria Eletronica, Universita di Roma - Tor Vergata, Via Orazio Raimondo, Roma, 00173, Italy

    Corrado Natale

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Neri, G. et al. (2010). A Novel Approach for the Preparation of Metal Oxide/CNTs Composites for Sensing Applications. In: Malcovati, P., Baschirotto, A., d'Amico, A., Natale, C. (eds) Sensors and Microsystems. Lecture Notes in Electrical Engineering, vol 54. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-3606-3_9

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  • DOI: https://doi.org/10.1007/978-90-481-3606-3_9

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  • Publisher Name: Springer, Dordrecht

  • Print ISBN: 978-90-481-3605-6

  • Online ISBN: 978-90-481-3606-3

  • eBook Packages: EngineeringEngineering (R0)

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