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Growth of Thin Films

  • Chapter
Surface Science

Part of the book series: Advanced Texts in Physics ((ADTP))

Abstract

When the adsorbate coverage exceeds the monolayer range, one speaks about thin film growth. The oriented growth of a crystalline film on a single-crystal substrate is referred to as epitaxy, which, in turn, is subdivided into homoepitaxy (when both film and substrate are of the same material) and heteroepitaxy (when film and substrate are different). The film growth is controlled by the interplay of thermodynamics and kinetics. The general trends in film growth are understood within the thermodynamic approach in terms of the relative surface and interface energies. On the other hand, film growth is a non-equilibrium kinetic process, in which the rate-limiting steps affect the net growth mode. In this chapter, the surface phenomena involved in thin film growth and their effect on the growth mode, as well as on the structure and morphology of the grown films, are discussed.

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Authors and Affiliations

  1. Department of Electronic Engineering, Faculty of Engineering, Osaka University, Suita, Yamada-oka 2-1, Osaka, 565-0871, Japan

    Professor K. Oura & Professor M. Katayama

  2. Vladivostok State University of Economics and Service, 690600, Vladivostok, Russia

    Professor A. V. Zotov

  3. Institute of Automation and Control Processes, 5 Radio Street, 690041, Vladivostok, Russia

    Professor V. G. Lifshits & Professor A. A. Saranin

Authors
  1. Professor K. Oura
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  2. Professor M. Katayama
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  3. Professor A. V. Zotov
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  4. Professor V. G. Lifshits
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  5. Professor A. A. Saranin
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© 2003 Springer-Verlag Berlin Heidelberg

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Oura, K., Katayama, M., Zotov, A.V., Lifshits, V.G., Saranin, A.A. (2003). Growth of Thin Films. In: Surface Science. Advanced Texts in Physics. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-05179-5_14

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  • DOI: https://doi.org/10.1007/978-3-662-05179-5_14

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-05606-2

  • Online ISBN: 978-3-662-05179-5

  • eBook Packages: Springer Book Archive

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