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Fundamentals of the MBE Growth Process

  • Chapter
Molecular Beam Epitaxy

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 7))

Abstract

The MBE growth process occurs on the substrate crystal surface, i.e., in the third zone of the deposition chamber arrangement (Sect. 1.1.2). Many different experiments using, for example, modulated molecular beam mass spectrometry [6.1–3] or RHEED pattern intensity oscillations [6.3–13] have been devoted to study the growth mechanism in MBE. These experiments dealt mainly with the MBE growth process of GaAs and related compounds, however, some fundamental rules creating a physical picture of the MBE growth process in general may be concluded from the wealth of data which became available [6.3,14,15].

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References

  1. C.T. Foxon, B.A. Joyce: “Fundamental Aspects of MBE”, in Current Topics in Materials Science, Vol. 7, ed. by E. Kaldis, (North-Holland, Amsterdam 1981) Chap. 1

    Google Scholar 

  2. C.T. Foxon: J. Vac. Sci. Technol. B 1, 293 (1983)

    CAS  Google Scholar 

  3. B.A. Joyce: Rep. Prog. Phys. 48, 1637 (1985)

    CAS  Google Scholar 

  4. B.F. Lewis, T.C. Lee, F.J. Grunthaner, A. Madhukar, R. Fernandez, J. Maserjian: J. Vac. Sci. Technol. B 2, 419 (1984)

    CAS  Google Scholar 

  5. B.F. Lewis, F.J. Grunthaner, A. Madhukar, T.C. Lee, R. Fernandez: J. Vac. Sci. Technol. B 3, 1317 (1985)

    CAS  Google Scholar 

  6. T.C. Lee, M.Y. Yen, P. Chen. A. Madhukar: Surf. Sci. 174, 55 (1986)

    CAS  Google Scholar 

  7. B.A. Joyce, P.J.Dobson, J.H. Neave, J. Zhang: Surf. Sci. 174, 1 (1986)

    CAS  Google Scholar 

  8. B.A. Joyce, P.J. Dobson, J.H. Neave, K. Woodbridge, J. Zhang, P.K. Larsen, B. Bölger: Surf. Sci. 168, 423 (1986)

    CAS  Google Scholar 

  9. P. Chen, J.Y. Kim, A. Madhukar, N.M. Cho: J. Vac. Sci. Technol. B 4, 890 (1986)

    CAS  Google Scholar 

  10. B.F. Lewis, R. Fernandez, A. Madhukar, F.J. Grunthaner: J. Vac. Sci. Technol. B 4, 560 (1986)

    CAS  Google Scholar 

  11. P.J. Dobson, B.A. Joyce, J.H. Neave, J. Zhang: J. Cryst. Growth 81, 1 (1987)

    CAS  Google Scholar 

  12. B.A. Joyce, J. Zhang, J.H. Neave, P.J. Dobson: Appl. Phys. A 45, 255 (1988)

    Google Scholar 

  13. T. Sakamoto: “RHEED Oscillations in MBE and Their Application to Precisely Controlled Crystal Growth”, in Proc. NATO Summer School on MBE, Ile de Bendor, June 1987

    Google Scholar 

  14. A. Madhukar: Surf. Sci. 132, 344 (1983)

    CAS  Google Scholar 

  15. A. Madhukar, S.V. Ghaisas: CRC Crit. Rev. Solid State Mater. Sci. 14, 1 (1988)

    CAS  Google Scholar 

  16. G.M. Panchenkov, V.P. Lebedev: Chemical Kinetics and Catalysis (Mir, Moscow 1976)

    Google Scholar 

  17. R. Heckingbottom, G.J. Davies, K.A. Prior: Surf. Sci. 132, 375 (1983)

    CAS  Google Scholar 

  18. M.A. Herman: Superlattices and Microstructures 2, 345 (1986)

    CAS  Google Scholar 

  19. M.A. Herman: Cryst. Res. Technol. 21, 1413 (1986)

    CAS  Google Scholar 

  20. C. Ebner, C. Rottman, M. Wortis: Phys. Rev. B 28, 4186 (1983)

    CAS  Google Scholar 

  21. J.W. Cahn, R. Kikuchi: Phys. Rev. B 31, 4300 (1985)

    CAS  Google Scholar 

  22. G.B. Stringfellow: Rep. Prog. Phys. 45, 469 (1982)

    Google Scholar 

  23. A. Zur, T.C. McGill: J. Appl. Phys. 55, 378 (1984)

    CAS  Google Scholar 

  24. C. Hsu, S. Sivananthan, X. Chu, J.P. Faurie: Appl. Phys. Lett. 48, 908 (1986)

    CAS  Google Scholar 

  25. J.M. Ballingall, M.L. Wroge, D.J. Leopold: Appl. Phys. Lett. 48, 1273 (1986)

    CAS  Google Scholar 

  26. G.W. Cullen: “The Preparation and Properties of Heteroepitaxial Silicon”, in Heteroepitaxial Semiconductors for Electronic Devices, ed. by G.W. Cullen, C.C. Wang (Springer, Berlin, Heidelberg 1978) Chap. 2

    Google Scholar 

  27. T.H. Myers, Y. Cheng, R.N. Bicknell, J.F. Schetzina: Appl. Phys. Lett. 42, 247 (1983)

    CAS  Google Scholar 

  28. J. Yoshino, H. Munekata, L.L. Chang: J. Vac. Sci. Technol. B 5, 683 (1987)

    CAS  Google Scholar 

  29. M.W. Geis, B.Y. Tsaur, D.C. Flanders: Appl. Phys. Lett. 41, 526 (1982)

    CAS  Google Scholar 

  30. K. Kushida, H. Takeuchi, T. Kobayashi, K. Takagi: Appl. Phys. Lett. 48, 764 (1986)

    CAS  Google Scholar 

  31. M.J. Stowell: “Defects in Epitaxial Deposits”, in Epitaxial Growth, Part B, ed. by J.W. Matthews (Academic, New York 1975) Chap. 5

    Google Scholar 

  32. J.H. van der Merwe, C.A.B. Ball: “Energy of Interfaces Between Crystals”, in Epitaxial Growth, Part B, ed. by J.W. Matthews (Academic, New York 1975) Chap. 6

    Google Scholar 

  33. J.H. van der Merwe: CRC Crit. Rev. Solid State Mater. Sci. 7, 209 (1978)

    Google Scholar 

  34. J.W. Matthews: “Coherent Interfaces and Misfit Dislocations”, in Epitaxial Growth, Part B, ed. by J.W.Matthews (Academic, New York 1975) Chap. 8

    Google Scholar 

  35. F.R.N. Nabarro: Theory of Crystal Dislocations (Clarendon, Oxford 1967)

    Google Scholar 

  36. C.B. Duke: CRC Crit. Rev. Solid State Mater. Sci. 8, 69 (1978)

    CAS  Google Scholar 

  37. F.D. Auret, J.H. van der Merwe: Thin Solid Films 23, 257 (1974)

    CAS  Google Scholar 

  38. F.C. Frank, J.H. van der Merwe: Proc. R. Soc, London 198, 205,216 (1949)

    CAS  Google Scholar 

  39. B.L. Sharma, R.K. Purohit: Semiconductor Heterojunctions (Pergamon, Oxford 1974)

    Google Scholar 

  40. J.W. Matthews: “Misfit Dislocations”, in Dislocations in Solids, Vol. 2, ed. by F.R.N. Nabarro (North-Holland, Amsterdam 1979) Chap. 7

    Google Scholar 

  41. A.I. Finch, A.G. Quarrell: Proc. Phys. Soc, London 48, 148 (1934)

    Google Scholar 

  42. W.A. Jesser, D. Kehlmann-Wilsdorf: Phys. Status Solidi 19, 95 (1967)

    CAS  Google Scholar 

  43. J.W. Matthews, A.E. Blakeslee: J. Cryst. Growth 27, 118 (1974)

    CAS  Google Scholar 

  44. T.G. Andersson, Z.G. Chen, V.D. Kulakovskii, A. Uddin, J.T. Vallin: Appl. Phys. Lett. 51, 752 (1987)

    CAS  Google Scholar 

  45. M. Kobayashi, M. Konagai, K. Takahashi, K. Urabe: J. Appl. Phys. 61, 1015 (1987)

    CAS  Google Scholar 

  46. E. Kasper, H.J. Herzog, H. Daembkes, G. Abstreiter: Mat. Res. Soc. Symp. Proc. 56, 347 (1986)

    CAS  Google Scholar 

  47. E. Kasper, H.J. Herzog, H. Jorke, G. Abstreiten Superlattices and Microstructures 3, 141 (1987)

    CAS  Google Scholar 

  48. E. Kasper: “Silicon Germanium — Heterostructures on Silicon Substrates”, in Festkörperprobleme (Advances in Solid State Physics) Vol. 27, ed. by P. Grosse (Vieweg, Braunschweig 1987) p. 265

    Google Scholar 

  49. J. Blanc: “Misfit, Strain, and Dislocations in Epitaxial Structures: Si/Si, Ge/Si, Si/Al2O3”, in Heteroepitaxial Semiconductors for Electronic Devices, ed. by G.W. Cullen, C.C. Wang (Springer, Berlin, Heidelberg 1978) Chap. 8

    Google Scholar 

  50. C.A.B. Ball, J.H. van der Merwe: “The Growth of Dislocation-Free Layers”, in Dislocations in Solids, Vol. 6, ed. by F.R.N. Nabarro (North-Holland, Amsterdam 1983) Chap. 27

    Google Scholar 

  51. W.T. Read, Jr.: Dislocations in Crystals (McGraw-Hill, New York 1953)

    Google Scholar 

  52. G.H. Olsen: J. Cryst. Growth 31, 223 (1975)

    CAS  Google Scholar 

  53. C.A.B. Ball: Phys. Status Solidi 42, 352 (1970)

    Google Scholar 

  54. J.W. Matthews, J.L. Crawford: Thin Solid Films 5, 187 (1970)

    CAS  Google Scholar 

  55. J.H. Basson, C.A.B. Ball: Phys. Status Solidi (a) 46, 707 (1978)

    CAS  Google Scholar 

  56. R. People: J. Appl. Phys. 59, 3296 (1986)

    CAS  Google Scholar 

  57. G.C. Osbourn, P.L. Gourley, I.J. Fritz, R.M. Biefold, L.R. Dawson, T.E. Zipperian: “Strained Layer Superlattices”, in Semiconductors and Semimetals, Vol. 32, ed. by R.K. Willardson, A.C. Beer (Academic, New York 1987) Chap. 2

    Google Scholar 

  58. W.I. Wang, E.E. Mendez, T.S. Kuan, L. Esaki: Appl. Phys. Lett. 47, 826 (1985)

    CAS  Google Scholar 

  59. S. Subbanna, H. Kroemer, J.L. Merz: J. Appl. Phys. 59, 488 (1986)

    CAS  Google Scholar 

  60. P.N. Uppal, J.S. Ahearn, D.P. Musser: J. Appl. Phys. 62, 3766 (1987)

    CAS  Google Scholar 

  61. T. Takamori, T. Fukunaga, J. Kobayashi, K. Ishida, H. Nakashima: Jpn. J. Appl. Phys. 26, 1097 (1987)

    CAS  Google Scholar 

  62. W.T. Wang, R.F. Marks, L. Vina: J. Appl. Phys. 59, 937 (1986)

    CAS  Google Scholar 

  63. L. Vina, W.I. Wang: Appl. Phys. Lett. 48, 36 (1986)

    CAS  Google Scholar 

  64. J.M. Ballingall, C.E.C. Wood: Appl. Phys. Lett. 41, 947 (1982)

    CAS  Google Scholar 

  65. H.L. Strömer: Surf. Sci. 132, 519 (1983)

    Google Scholar 

  66. W.I. Wang, E.E. Mendez, Y. Iye, B. Lee, M.H. Kim, G.E.Stillman: J. Appl. Phys. 60, 1834 (1986)

    CAS  Google Scholar 

  67. G.D. Kramer, R.K. Tsui, J.A. Curless, M.S. Peffley: “Properties of AlGaAs Grown by MBE on Lenticular Substrates”, in GaAs and Related Compounds 1986 Inst. Phys. Conf. Ser. 83: (Inst, of Phys., Bristol 1987) p. 117

    Google Scholar 

  68. S. Sivananthan, X. Chu, J. Reno, J.P. Faurie: J. Appl. Phys. 60, 1359 (1986)

    CAS  Google Scholar 

  69. S. Sivananthan, X. Chu, J.P. Faurie: J. Vac. Sci. Technol. B 5, 694 (1987)

    CAS  Google Scholar 

  70. L.I. Maissei, R. Glang (eds.): Handbook of Thin Film Technology (McGraw-Hill, New York 1970)

    Google Scholar 

  71. H. Kroemer: J. Cryst. Growth 81, 193 (1987)

    CAS  Google Scholar 

  72. H. Kroemer: Surf. Sci. 132, 543 (1983)

    CAS  Google Scholar 

  73. P.N. Uppal, H. Kroemer: J. Appl. Phys. 58, 2195 (1985)

    CAS  Google Scholar 

  74. W.A. Harrison, E.A. Kraut, J.R. Waldrop, R.W. Grant: Phys. Rev. B 18, 4402 (1978)

    CAS  Google Scholar 

  75. S.L. Wright, H. Kroemer, M. Inada: J. Appl. Phys. 55, 2916 (1984)

    CAS  Google Scholar 

  76. R.C. Pond, J.P. Gowers, B.A. Joyce: Surf. Sci. 152/153, 1191 (1985)

    Google Scholar 

  77. R.K. Willardson, H.L. Goering (ed.): Compound Semiconductors, Vol. 1 (Reinhold, London 1962) p. 241

    Google Scholar 

  78. A.Y. Cho, M.B. Panish, I. Hayashi: In Proc. 3rd Int. Symp. GaAs and Related Compounds 1970 (Inst, of Phys. London 1970) p. 18

    Google Scholar 

  79. A.D. Katnani, D.J. Chadi: Phys. Rev. B 31, 2554 (1985)

    CAS  Google Scholar 

  80. E.E. Mendez, W.I. Wang, L.L. Chang, L. Esaki: Phys. Rev. B 30, 1087 (1984)

    CAS  Google Scholar 

  81. D.A. Broido, L.J. Sham: Phys. Rev. B 31, 888 (1985)

    CAS  Google Scholar 

  82. T.S. Low, G.E. Stillman, A.Y. Cho, H. Morkoç, A. Calawa: Appl. Phys. Lett. 40, 611 (1982)

    CAS  Google Scholar 

  83. T.S. Low, G.E. Stillman, D.M. Collins, S. Tiwari, L.F. Eastman: Appl. Phys. Lett. 40, 1034 (1982)

    CAS  Google Scholar 

  84. G.E. Stillman, T.S. Low, B. Lee: Solid State Commun. 53, 1041 (1985)

    CAS  Google Scholar 

  85. K.C. Rustagi, W. Weber: Solid State Commun. 18, 673 (1976)

    CAS  Google Scholar 

  86. S.B. Ogale, M. Thomsen, A. Madhukar: Mater. Res. Soc. Symp. Proc. 94, 83 (1987)

    CAS  Google Scholar 

  87. M.Y. Yen, A. Madhukar, B.F. Lewis, R. Fernandez, L. Eng, F.J. Grunthaner: Surf. Sci. 174, 606 (1986)

    CAS  Google Scholar 

  88. H.C. Casey, Jr., M.B. Panish: Heterostructure Lasers (Academic, New York 1978) Part B, Chap. 7

    Google Scholar 

  89. W.I. Wang: J. Appl. Phys. 58, 3244 (1985)

    CAS  Google Scholar 

  90. T.S. Kuan, T.F. Kuech, W.I. Wang, E.L. Wilkie: Phys. Rev. Lett. 54, 201 (1985)

    CAS  Google Scholar 

  91. T.S. Kuan, W.I. Wang, E.L. Wilkie: Appl. Phys. Lett. 51, 51 (1987)

    CAS  Google Scholar 

  92. P.M. Petroff, A.Y. Cho, F.K. Reinhart, A.C. Gossard, W. Weigmann: Phys. Rev. Lett. 48, 170 (1982)

    CAS  Google Scholar 

  93. Y.E. Ihm, N. Otsuka, J. Klem, H. Morkoç: Appl. Phys. Lett. 51, 2013 (1987)

    CAS  Google Scholar 

  94. S.V. Ghaisas, A. Madhukar: Phys.Rev. Lett. 56, 1066 (1986)

    CAS  Google Scholar 

  95. A. Madhukar, S.V. Ghaisas: Appl. Phys. Lett. 47, 247 (1985)

    CAS  Google Scholar 

  96. S.V. Ghaisas, A. Madhukar: J. Vac. Sci. Technol. B 3, 540 (1985)

    CAS  Google Scholar 

  97. S.B. Ogale, M. Thomsen, A. Madhukar: Appl. Phys. Lett. 52, 568 (1988)

    Google Scholar 

  98. D.J. Chadi: J. Vac. Sci. Technol. A 5, 834 (1987)

    CAS  Google Scholar 

  99. D.J. Frankel, C. Yu, J.P. Harbison, H.H. Farrel: J. Vac. Sci. Technol. B 5, 1113 (1987)

    CAS  Google Scholar 

  100. P.K. Larsen, D.J. Chadi: Phys. Rev. B 37, 8282 (1988)

    CAS  Google Scholar 

  101. H.H. Farrell, J.P. Harbison, L.D. Peterson: J. Vac. Sci. Technol. B 5, 1482 (1987)

    CAS  Google Scholar 

  102. M. Thomsen, A. Madhukar: J. Cryst. Growth 80, 275 (1987)

    CAS  Google Scholar 

  103. M. Thomsen, S.V. Ghaisas, A. Madhukar: J. Cryst. Growth 84, 79 (1987)

    CAS  Google Scholar 

  104. M. Thomsen, A. Madhukar: J. Cryst. Growth 84, 98 (1987)

    CAS  Google Scholar 

  105. P.W. Atkins: Physical Chemistry (Oxford University Press, Oxford 1978)

    Google Scholar 

  106. J.M. Blakely: Introduction to the Properties of Crystal Surfaces (Pergamon, Oxford 1979)

    Google Scholar 

  107. J.P. Gaspard: “Physisorption and Chemisorption”, in Interfacial Aspects of Phase Transformations, ed. by B. Mutaftschiev, NATO Adv. Stud. Inst. Ser. C, Vol. 87 (D. Reidel, Dordrecht 1982)

    Google Scholar 

  108. C.T. Foxon, M.R.Boudry, B.A. Joyce: Surf. Sci. 44, 69 (1974)

    CAS  Google Scholar 

  109. J.R. Arthur: Surf. Sci. 43, 449 (1974)

    CAS  Google Scholar 

  110. C.T. Foxon, B.A. Joyce: Surf. Sci. 50, 434 (1975)

    CAS  Google Scholar 

  111. C.T. Foxon, B.A. Joyce: Surf. Sci. 64, 293 (1977)

    CAS  Google Scholar 

  112. C.T. Foxon: Acta Electron. 21, 139 (1978)

    CAS  Google Scholar 

  113. L.L. Chang, K. Ploog (eds.): Molecular Beam Eiptaxy and Heterostructures, NATO ASI Ser., Ser. E, no. 87 (Martinus Nijhoff, Dordrecht 1985)

    Google Scholar 

  114. E.H.C. Parker (ed.): The Technology and Physics of Molecular Beam Epitaxy (Plenum, New York 1985)

    Google Scholar 

  115. K. Ploog: “Molecular Beam Epitaxy of III-V Compounds”, in Crystals-Growth, Properties and Applications, Vol. 3, ed. by H.C. Freyhardt (Springer, Berlin, Heidelberg 1980) p. 73

    Google Scholar 

  116. J. Singh, A. Madhukar: J. Vac. Sci. Technol. 20, 716 (1982)

    CAS  Google Scholar 

  117. J. Singh, K.K. Bajaj: J. Vac. Sci. Technol. B 2, 576 (1984)

    CAS  Google Scholar 

  118. J. Singh, K.K. Bajaj: J. Vac. Sci. Technol. B 2, 276 (1984)

    CAS  Google Scholar 

  119. J. Singh, S. Dudley, K.K. Bajaj: J. Vac. Sci. Technol. B 4, 878 (1986)

    CAS  Google Scholar 

  120. J. Singh, K.K. Bajaj: Superlattices and Microstructures 2, 185 (1986)

    CAS  Google Scholar 

  121. S. Dudley, J. Singh, K.K. Bajaj: J. Vac. Sci. Technol. B 5, 712 (1987)

    CAS  Google Scholar 

  122. P.R. Berger, P.K. Bhattacharya, J. Singh: J. Appl. Phys. 61, 2856 (1987)

    CAS  Google Scholar 

  123. J.P. Faurie, M. Boukerche, J. Reno, S. Sivananthan, C. Hsu: J. Vac. Sci. Technol. A 3, 55 (1985)

    CAS  Google Scholar 

  124. J.P. Faurie: J. Cryst. Growth 81, 483 (1987)

    CAS  Google Scholar 

  125. J. Reno, R. Sporken, Y.J. Kim, C. Hsu, J.P. Faurie: Appl. Phys. Lett. 51, 1545 (1987)

    CAS  Google Scholar 

  126. M. Pessa, P. Huttunen, M.A. Herman: J. Appl. Phys. 54, 6047 (1983)

    CAS  Google Scholar 

  127. M.A. Herman, O. Jylhä, M. Pessa: J. Cryst. Growth 66, 480 (1984)

    CAS  Google Scholar 

  128. M. Pessa, O. Jylhä: Appl. Phys. Lett. 45, 646 (1984)

    CAS  Google Scholar 

  129. M.A. Herman; M. Vulli, M. Pessa: J. Cryst. Growth 73, 403 (1985)

    Google Scholar 

  130. M.A. Herman, O. Jylhä, M. Pessa: Cryst. Res. Technol. 21, 841 (1986)

    CAS  Google Scholar 

  131. M.A. Herman, O. Jylhä, M. Pessa: Cryst. Res. Technol. 21, 969 (1986)

    CAS  Google Scholar 

  132. M.A. Herman, P. Juza, W. Faschinger, H. Sitter: Cryst. Res. Technol. 23, 3 (1988)

    Google Scholar 

  133. P. Juza, H. Sitter, M.A. Herman: Appl. Phys. Lett. 53, 1396 (1988)

    CAS  Google Scholar 

  134. CHX. Goodman, M. Pessa: J. Appl. Phys. 60, R. 65 (1986)

    Google Scholar 

  135. J.B. Taylor, I. Langmuir: Phys. Rev. 44, 423 (1933)

    CAS  Google Scholar 

  136. D.A. King: CRC Crit. Rev. Solid State Mater. Sci. 7, 167 (1978)

    CAS  Google Scholar 

  137. A. Cassuto, D.A. King: Surf. Sci. 102, 388 (1981)

    CAS  Google Scholar 

  138. M. Alnot, A. Cassuto: Surf. Sci. 112, 325 (1981)

    CAS  Google Scholar 

  139. R.S. Chambers, G. Ehrlich: Surf. Sci. 186, L535 (1987)

    CAS  Google Scholar 

  140. P. Summerside, E. Sommer, R. Teshima, H.J. Kreuzer: Phys. Rev. B 25, 6235 (1982)

    CAS  Google Scholar 

  141. H.J. Kreuzer, Z.W. Gortel: Physisorption Kinetics, Springer Ser. Surf. Sci., Vol. 1 (Springer, Berlin, Heidelberg 1986)

    Google Scholar 

  142. J.H. Neave, B.A. Joyce, P.J. Dobson, N. Norton: Appl. Phys. A31, 1 (1983)

    CAS  Google Scholar 

  143. B.A. Joyce, P.J. Dobson, J.H. Neave, J. Zhang: Surf. Sci. 178, 110 (1986)

    CAS  Google Scholar 

  144. T.C. Lee, M.Y. Yen, P. Chen, A. Madhukar: J. Vac. Sci. Technol. A 4, 884 (1986)

    CAS  Google Scholar 

  145. A. Madhukar: “The atomistic nature of compound semiconductor interfaces and the role of growth interruption”, in Proc. MRS Symp. on Epitaxy of Semiconductor Layered Sturctures, Boston, Nov. 1987

    Google Scholar 

  146. M. Tanaka, H. Sakaki, J. Yoshino, T. Furuta: Surf. Sci. 174, 65 (1986)

    CAS  Google Scholar 

  147. M. Tanaka, H. Sakaki: J. Cryst. Growth 81, 153 (1987)

    CAS  Google Scholar 

  148. D. Bimberg, D. Mars, J.N. Miller, R. Bauer, D. Oertel: J. Vac. Sci. Technol. B 4, 1014 (1986)

    CAS  Google Scholar 

  149. D. Bimberg, D. Mars, J.N. Miller, R. Bauer, D. Oertel, J. Christen: Superlattices and Microstructures 3, 79 (1987)

    CAS  Google Scholar 

  150. D. Bimberg, J. Christen, T. Fukunaga, H. Nakashima, D.E. Mars, J.N. Miller: J. Vac. Sci. Technol. B 5, 1191 (1987); and to be published in Acta Phys. Polon. (1989)

    CAS  Google Scholar 

  151. D. Bimberg, J. Christen, T. Fukunaga, H. Nakashima, D.E. Mars, J.N. Miller: to be published in Superlattices and Microstructures (1988)

    Google Scholar 

  152. H. Sakaki, M. Tanaka, J. Yoshino: Jpn. J. Appl. Phys. 24, L417 (1985)

    Google Scholar 

  153. T. Fukunaga, K.L.I. Kobayashi, H. Nakashima: Jpn. J. Appl. Phys. 24; L510 (1985)

    Google Scholar 

  154. M. Tanaka, H. Sakaki, J. Yoshino: Jpn. J. Appl. Phys. 25, L155 (1986)

    CAS  Google Scholar 

  155. T. Fukunaga, H. Nakashima: Jpn. J. Appl. Phys. 25, L856 (1986)

    CAS  Google Scholar 

  156. M. Tanaka, H. Ichinose, T. Furuta, Y. Ishida, H. Sakaki: In Proc. 3rd Int. Conf. Modulated Semiconductor Structures, Montpellier, France, July 1987, p. 85

    Google Scholar 

  157. T. Sakamoto, H. Funabashi, K. Ohta, T. Nakagawa, J.J. Kawai, T. Kojima: Jpn J. Appl. Phys. 23, L657 (1984)

    Google Scholar 

  158. T. Sakamoto, H. Funabashi, K. Ohta, T. Nakagawa, N.J. Kawai, T. Kojima, Y. Bando: Superlattices and Microstructures 1, 347 (1985)

    CAS  Google Scholar 

  159. H. Watanabe, A. Usui: “Atomic Layer Epitaxy”, in Inst. Phys. Conf. Ser. 83, GaAs and Related Compounds 1986 (Inst, of Phys., Bristol 1987) p. 1

    Google Scholar 

  160. Y. Aoyagi, A. Doi, S. Iwai, S. Namba: J. Vac. Sci. Technol. B 5, 1460 (1987)

    CAS  Google Scholar 

  161. B.T. McDermott, N.A. El-Masry, M.A. Tischler, S.M. Bedair: Appl. Phys. Lett. 51, 1830 (1987)

    CAS  Google Scholar 

  162. S.P. DenBaars, C.A. Beyler, A. Hariz, P.D.Dapkus: Appl. Phys. Lett. 51, 1530 (1987)

    CAS  Google Scholar 

  163. K. Mori, M. Yoshida, A. Usui, H. Ferao: Appl. Phys. Lett. 52, 27 (1988)

    CAS  Google Scholar 

  164. T. Suntola, J. Hyvaerinen: Annu. Rev. Mater. Sci. 15, 177 (1985)

    CAS  Google Scholar 

  165. J. Nishizawa, H. Abe, T. Kurabayashi: J. Electrochem. Soc. 132, 1197 (1985)

    CAS  Google Scholar 

  166. J. Nishizawa, H. Abe, T. Kurabayashi, N. Sakurai: J. Vac. Sci. Technol. A 4, 706 (1986)

    CAS  Google Scholar 

  167. G. Oya, M. Yoshida, Y. Sawada: Appl. Phys. Lett. 51, 1143 (1987)

    CAS  Google Scholar 

  168. M.B. Panish: J. Electrochem. Soc. 127, 2729 (1980)

    CAS  Google Scholar 

  169. M.B. Panish, H. Temkin, S. Sumski: J. Vac. Sci. Technol. B 3, 687 (1985)

    Google Scholar 

  170. M.B. Panish, H. Temkin, R.A. Hamm, S.N.G. Chu: Appl. Phys. Lett. 49, 164 (1986)

    CAS  Google Scholar 

  171. W.T. Tsang: Appl. Phys. Lett. 45, 1234 (1984)

    CAS  Google Scholar 

  172. W.T. Tsang: J. Cryst. Growth 81, 261 (1987)

    CAS  Google Scholar 

  173. E. Tokumitsu, Y. Kudou, M. Konagai, K. Takahashi: J. Appl. Phys. 55, 3163 (1984)

    CAS  Google Scholar 

  174. E. Tokumitsu, Y. Kudou, M. Konagai, K. Takahashi: Jpn. J. Appl. Phys. 24, 1189 (1985)

    CAS  Google Scholar 

  175. E. Tokumitsu, T. Katoh, R. Kimura, M. Konagai, K. Takahashi: Jpn. J. Appl. Phys. 25, 1211 (1986)

    CAS  Google Scholar 

  176. M. Pessa, O. Jylhä, M.A. Herman: J. Cryst. Growth 67, 255 (1984)

    CAS  Google Scholar 

  177. T. Yao: Jpn. J. Appl. Phys. 25, L942 (1986)

    CAS  Google Scholar 

  178. T. Takeda, T. Yao, T. Kurosu, M. Iida: In Extend. Abstr. 17th Conf. Solid State Dev. Mater., Tokyo, 1985, p. 221

    Google Scholar 

  179. T. Yao: Jpn. J. Appl. Phys. 25, L544 (1986)

    CAS  Google Scholar 

  180. T. Yao, T. Takeda: Appl. Phys. Lett. 48, 160 (1986)

    CAS  Google Scholar 

  181. T. Yao, T. Takeda, R. Watanuki: Appl. Phys. Lett. 48, 1615 (1986)

    CAS  Google Scholar 

  182. J.A. Venables, G.D.T. Spiller, M. Hanbuecken: Rep. Prog. Phys. 47, 399 (1984)

    Google Scholar 

  183. Y. Horikoshi, M. Kawashima, H. Yamaguchi: Jpn. J. Appl. Phys. 25, L 868 (1986)

    Google Scholar 

  184. A. Salokatve, J. Varrio, J. Lammasniemi, H. Asonen, M. Pessa: Appl. Phys. Lett. 51, 1340 (1987)

    CAS  Google Scholar 

  185. J. Varrio, H. Asonen, A. Salokatve, M. Pessa, E. Raimala, J. Keinonen: Appl. Phys. Lett. 51, 1801 (1987)

    CAS  Google Scholar 

  186. J. Nishizawa, T. Kurabayashi, H. Abe, A. Nozoe: Surf. Sci. 185, 249 (1987)

    CAS  Google Scholar 

  187. J. Nishizawa, H. Shimawaki, Y. Sakuma: J. Electrochem. Soc. 134, 3155 (1987)

    CAS  Google Scholar 

  188. J. Nishizawa, T. Kurabayashi, H. Abe, N. Sakurai: J. Electrochem. Soc. 134, 945 (1987)

    CAS  Google Scholar 

  189. J. Nishizawa, T. Kurabayashi, J. Hoshina: J. Electrochem. Soc. 134, 502 (1987)

    CAS  Google Scholar 

  190. G.J. Davies, D. Williams: “III-V MBE Growth Systems”, in [6.113, p. 15]

    Google Scholar 

  191. K.A. Prior, G.J. Davies, R. Heckingbottom: J. Cryst. Growth 66, 52 (1984)

    Google Scholar 

  192. R. Heckingbottom: “The Application of Thermodynamics to Molecular Beam Epitaxy”, in [6.112, p. 71]

    Google Scholar 

  193. C.E.C. Wood: “MBE III-V Compounds: Dopant Incorporation, Characteristics and Behavior”, in [6.112, p. 149]

    Google Scholar 

  194. C.E.C. Wood: “Dopant Incorporation, Characteristics and Behavior”, in [6.113, p. 61]

    Google Scholar 

  195. K. Seeger: Semiconductor Physics — An Introduction, 3rd ed., Springer Ser. Solid-State Sci., Vol. 40 (Springer, Berlin, Heidelberg 1985)

    Google Scholar 

  196. R. Heckingbottom, C.J. Todd, G.J. Davies: J. Electrochem. Soc. 127, 444 (1980)

    CAS  Google Scholar 

  197. D.L. Miller (ed.): Molecular Beam Epitaxy Workshop 1986, Proc. 7th USA MBE Workshop; J. Vac. Sci. Technol. B 5, no. 3 (1987)

    Google Scholar 

  198. C.T. Foxon, J.J. Harris (eds.): Molecular Beam Epitaxy 1986, Proc. 4th Int. Conf.; J. Cryst. Growth 81, nos. 1–4 (1987)

    Google Scholar 

  199. F. Rosenberger: Fundamentals of Crystal Growth I, Springer Series in Solid-State Sci., Vol. 5 (Springer, Berlin, Heidelberg 1979) Chap. 2

    Google Scholar 

  200. M. Heyen, H. Bruch, K.H. Bachern, P. Balk: J. Cryst. Growth 42, 127 (1977)

    CAS  Google Scholar 

  201. H.C. Casey, M.B. Panish: J. Cryst. Growth 13/14, 818 (1972)

    Google Scholar 

  202. D.T.J. Hurle: In Proc. 6th Int. Symp. on GaAs and Related Compounds, Inst. Phys. Conf. Ser. 33A (Inst, of Phys., Bristol 1977) p. 113

    Google Scholar 

  203. J.B. Mullin: J. Cryst. Growth 42, 77 (1977)

    CAS  Google Scholar 

  204. E. Venhoff, M. Maier, K.H. Bachern, P. Balk: J. Cryst. Growth 53, 598 (1981)

    Google Scholar 

  205. M.A. Savva: J. Electrochem. Soc. 123, 1498 (1976)

    CAS  Google Scholar 

  206. D.J. Ashen, P.J. Dean, D.T.J. Hurle, J.B. Mullin, A.M. White, P.D. Greene: J. Phys. Chem. Solids 36, 1041 (1975)

    CAS  Google Scholar 

  207. G.J. Davies, D.A. Andrews, R. Heckingbottom: J. Appl. Phys. 52, 7214 (1981)

    CAS  Google Scholar 

  208. O.M. Uy, D.W. Muenow, P.J. Ficalora, J.L. Margrave: Trans. Faraday Soc. 64, 2998 (1968)

    CAS  Google Scholar 

  209. M.B. Panish: J. Electrochem. Soc. 127, 2729 (1980)

    CAS  Google Scholar 

  210. D.A. Andrews, R. Heckingbottom, G.J. Davies: J. Appl. Phys. 60, 1009 (1986)

    CAS  Google Scholar 

  211. K. Ploog: J. Cryst. Growth 81, 304 (1987),

    CAS  Google Scholar 

  212. K. Ploog, M. Hauser, A. Fischer: Appl. Phys. A 45, 233 (1988)

    Google Scholar 

  213. C.E.C. Wood, G. Metze, J. Berry, L.F. Eastman, J. Appl. Phys. 51, 383 (1980)

    CAS  Google Scholar 

  214. K. Ploog, A. Fischer, H. Künzel: J. Electrochem. Soc. 127, 400 (1981)

    Google Scholar 

  215. A. Zrenner, H. Reisinger, F. Koch, K. Ploog: In Proc. 17th Int. Conf. on Phys. of Semicond., San Francisco 1984, ed. by J.D. Chadi, W.A. Harrison (Springer, Berlin, Heidelberg 1985) p. 325

    Google Scholar 

  216. E.F. Schubert, Y. Horikoshi, K. Ploog: Phys. Rev. B 32, 1085 (1985)

    CAS  Google Scholar 

  217. K. Ploog, A. Fischer, E.F. Schubert: Surf. Sci. 174, 120 (1986)

    CAS  Google Scholar 

  218. E.F. Schubert, A. Fischer, K. Ploog: IEEE Trans. ED-33, 625 (1986)

    Google Scholar 

  219. K. Ploog. Annu. Rev. Mater Sci. 11, 171 (1981)

    CAS  Google Scholar 

  220. E. Miyauchi, H. Hashimoto: J. Vac. Sci. Technol. A 4, 933 (1986)

    CAS  Google Scholar 

  221. E. Miyauchi, H. Arimoto, H. Hashimoto, T. Utsumi: J. Vac. Sci. Technol. B 1, 1113 (1983)

    CAS  Google Scholar 

  222. J.C. Bean: J. Cryst. Growth 81, 411 (1987)

    CAS  Google Scholar 

  223. Y. Ota: J. Appl. Phys. 51, 1102 (1980)

    CAS  Google Scholar 

  224. M. Naganuma, K. Takahashi: Appl. Phys. Lett. 27, 342 (1975)

    CAS  Google Scholar 

  225. N. Matsunaga, T. Suzuki, K. Takahashi: J. Appl. Phys. 49, 5710 (1978)

    CAS  Google Scholar 

  226. J.C. Bean, R. Dingle: Appl. Phys. Lett. 35, 925 (1979)

    CAS  Google Scholar 

  227. Y. Matsushima, S.I. Gonda, Y. Makita, S. Mukai: J. Cryst. Growth 43, 281 (1978)

    CAS  Google Scholar 

  228. H. Sugiura: J. Appl. Phys. 51, 2630 (1980)

    CAS  Google Scholar 

  229. H. Jorke, H.J. Herzog, H. Kibbel: Appl. Phys. Lett. 47, 511 (1985)

    CAS  Google Scholar 

  230. H. Jorke, H. Kibbel: J. Electrochem. Soc. 133, 774 (1986)

    CAS  Google Scholar 

  231. H. Jorke, A. Casel, H. Kibbel, H.J. Herzog: In Proc. 2nd Int. Symp. on Si-MBE, Honolulu 1987

    Google Scholar 

  232. R.A. Metzger, F.G. Allen: J. Appl. Phys. 55, 931 (1984)

    CAS  Google Scholar 

  233. M. Tabe, K. Kajiyama: Jpn. J. Appl. Phys. 22, 423 (1983)

    CAS  Google Scholar 

  234. R.A.A. Kubiak, W.Y. Leong, E.H.C. Parker: Appl. Phys. Lett. 46, 565 (1985)

    CAS  Google Scholar 

  235. R.A.A. Kubiak, W.Y. Leong, E.H.C. Parker: J. Electrochem. Soc. 132, 2738 (1985)

    CAS  Google Scholar 

  236. R.A.A. Kubiak, W.Y. Leong, E.H.C. Parker: J. Vac. Sci. Technol. B 3, 588 (1985)

    Google Scholar 

  237. W.Y. Leong, R.A.A. Kubiak, E.H.C. Parker: In Silicon MBE, ed. by J.C. Bean (Electrochemical Society, Pennington, NJ 1985) p. 140

    Google Scholar 

  238. C.T. Foxon, J.A. Harvey, B.A. Joyce: J. Phys. Chem. Solids 34, 1693 (1973)

    CAS  Google Scholar 

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Authors and Affiliations

  1. Institute of Physics, Polish Academy of Sciences, al. Lotnikow 46, PL-02-668, Warszawa, Poland

    Dr. Marian A. Herman

  2. Institut für Experimentalphysik, Johannes-Kepler-Universität, A-4040, Linz/Auhof, Austria

    Dr. Helmut Sitter

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Herman, M.A., Sitter, H. (1989). Fundamentals of the MBE Growth Process. In: Molecular Beam Epitaxy. Springer Series in Materials Science, vol 7. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-97098-6_6

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