Abstract
The semiconductor technology started its triumphant march in the beginning of the sixties; a few circuit functions were integrated on a monolithic silicon chip a few mm2 in size. With the development of so-called MOS technology (MOS = metal oxide semiconductor) the key step towards extremely high integration densities was taken successfully in the middle of the sixties. In 1964, G. E. Moore, then director of the research department at Intel, predicted an annual doubling of the number of circuit functions per chip. The actual trend, a quadruplication every third year, is shown in Fig. 2.1.
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© 1987 Springer-Verlag Heidelberg
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Hörbst, E., Müller-Schloer, C., Schwärtzel, H. (1987). Introduction to Semiconductor Technology for Integrated Circuits. In: Design of VLSI Circuits. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-95525-9_2
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DOI: https://doi.org/10.1007/978-3-642-95525-9_2
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