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Electron Beam Lithography and Dry Etching Techniques for the Fabrication of Quantum Wires in GaAs and AlGaAs Epilayer Systems

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Physics and Technology of Submicron Structures

Part of the book series: Springer Series in Solid-State Sciences ((SSSOL,volume 83))

Abstract

Research on transport in low dimensional semiconductor systems has recently progressed from simple layered structures to patterned devices of much greater complexity. The development of fabrication techniques capable of machining materials to quantum dimensions has been partly responsible for this interest. Many fascinating phenomena have been investigated in such structures, including localisation and trapping effects, universal conductance fluctuations[1], Aharanov-Bohm oscillations[2] and quenching of the Hall effect[3]. In this paper the technology for fabricating quantum wire and related structures in GaAs and GaAs-AlGaAs is described and some measurements of quantum interference phenomena in n+ GaAs wires are presented.

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References

  1. W.S. Skocpol in Physics and Fabrication of Microstructures and Microdevices, ed. Kelly M.J. and Weisbuch C. ( Springer, Berlin, 1986 )

    Google Scholar 

  2. K. Ishibashi, Y. Takagoki, K. Gamo, S. Namba, S. Ishida, K. Murase, Y Aogaki and M. Kawabe Proc. Univ.Tokyo Int. Symp on Anderson Localisation 1987 & Solid State Commun. 64, 8858, 1987

    Google Scholar 

  3. M.L. Roukes, A. Scherer, S.J. Allen Jr., H.G. Craighead, R.M. Ruthen, E.D. Beebe and J.P. Herbison. Phys. Rev. Lett. 59, 3011, 1987

    Article  Google Scholar 

  4. K.K. Choi, D.C. Tsui and K. Alavi. Phys. Rev. Lett B32, 5540, 1985

    Google Scholar 

  5. H. van Houten, B.J. van Wees, M.G.J. Heijmann and J.P. Andre. Appl. Phys. Lett. 49, 1781, 1986

    Google Scholar 

  6. T.J. Thornton, M. Pepper, H. Ahmed, D. Andrews and G.J. Davies Phys. Rev. Lett. 56, 1198, 1986

    Article  Google Scholar 

  7. A. Scherer, M.L. Roukes, H.G. Craighead, R.M. Ruthen, E.D. Beebe and J.P. Herbison “Ulta-narrow channels defined in GaAs-AIGaAs by low energy ion damage”, submitted to Appl.Phys. Lett.

    Google Scholar 

  8. A.C. Gossard, J.H. English, P.M. Petroff, J. Gibed, G.J. Dolan and S.J. Pearton J. Cryst. Growth 81, 101, 1987

    Article  Google Scholar 

  9. J.H. Davies, “Electronic properties of narrow semiconducting wires near threshold”, to be published.

    Google Scholar 

  10. A.N. Broers; W.W. Molzen, J.J. Cuomo and N.D. Wittels Appl. Phys. Lett. 29, 596, 1976

    Google Scholar 

  11. G.A.C. Jones et al. in Proceedings of Microelectronic Engineering 1986, Interlaken, Switzerland (Elsevier, Holland )

    Google Scholar 

  12. H.G. Craighead J. Appl. Phys. 55, 4430, 1984

    Article  Google Scholar 

  13. L.D. Jackel, R.E. Howard, P.M. Mankiewich, H.G. Craighead and R.W. Epworth Appl. Phys. Lett. 45, 698, 1984

    Article  Google Scholar 

  14. S.A. Rishton and D.P. Kern J. Vac. Sci. Technol B5, 135–141, 1987

    Article  Google Scholar 

  15. S.A. Rishtop, PhD thesis, Glasgow University 1984

    Google Scholar 

  16. S.Thoms, S.P. Beaumont, C.D.W. Wilkinson, J. Frost and C.R. Stanley “Ultrasmall device fabrication using dry etching of GaAs” Proceedings of Microelectronic Engineering 1986, Interlaken, Switzerland (Elsevier, Holland )

    Google Scholar 

  17. R. Cheung, S. Thorns, S.P. Beaumont, G. Doughty, V. J. Law and C.D.W. Wilkinson Electronics Letters 23, 857, 1987

    Article  Google Scholar 

  18. P.C. Main, L. Eaves, R.P. Taylor, G.P. Whittington, S. Thorns, S.P. Beaumont and C.D.W. Wilkinson Proc. 18th Int. Conf. on the Physics of Semiconductors, Stockholm 1986 p 1591 (World Scientific Press)

    Google Scholar 

  19. R.P. Taylor, M.L. Leadbeater, G.P. Whittington, P.C. Main, L. Eaves, S.P. Beaumont, I. McIntyre, S. Thorns and C.D.W. Wilkinson Proc. 2D Conf. Santa Fe 1987 (to be published in Surf. Sci. 1988 )

    Google Scholar 

  20. R.A. Webb, these proceedings.

    Google Scholar 

  21. M.L. Leadbeater, R.P. Taylor, P.C. Main, L. Eaves, S.P. Beaumont, I. McIntyre, S. Thorns and C.D.W. Wilkinson Proc 14th Int. Conf. GaAs and Related Compounds, Crete 1987. (loP Conf. Ser. 1988 )

    Google Scholar 

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Author information

Authors and Affiliations

  1. Nanoelectronics Research Centre, Department of Electronics and Electrical Engineering, University of Glasgow, Glasgow, G128QQ, Scotland, UK

    S. P. Beaumont, C. D. W. Wilkinson, S. Thoms, R. Cheung & I. McIntyre

  2. Department of Physics, University of Nottingham, Nottingham, NG72RD, UK

    R. P. Taylor, M. L. Leadbeater, P. C. Main & L. Eaves

Authors
  1. S. P. Beaumont
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  2. C. D. W. Wilkinson
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  3. S. Thoms
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  4. R. Cheung
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  5. I. McIntyre
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  6. R. P. Taylor
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  7. M. L. Leadbeater
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  8. P. C. Main
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  9. L. Eaves
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Editor information

Editors and Affiliations

  1. Institut für Experimentalphysik, Universität Linz, A-4040, Linz, Austria

    Helmut Heinrich

  2. Institut für Physik, Montanuniversität Leoben, A-8700, Leoben, Austria

    Günther Bauer

  3. Institut für Festkörperphysik, Universität Wien, A-1090, Wien, Austria

    Friedemar Kuchar

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© 1988 Springer-Verlag Berlin Heidelberg

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Beaumont, S.P. et al. (1988). Electron Beam Lithography and Dry Etching Techniques for the Fabrication of Quantum Wires in GaAs and AlGaAs Epilayer Systems. In: Heinrich, H., Bauer, G., Kuchar, F. (eds) Physics and Technology of Submicron Structures. Springer Series in Solid-State Sciences, vol 83. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-83431-8_2

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  • DOI: https://doi.org/10.1007/978-3-642-83431-8_2

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-83433-2

  • Online ISBN: 978-3-642-83431-8

  • eBook Packages: Springer Book Archive

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