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Fabrication of Ultra-Small Structures: Quantum Wires

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Physics and Technology of Submicron Structures

Part of the book series: Springer Series in Solid-State Sciences ((SSSOL,volume 83))

Abstract

The ability to fabricate structures and devices with dimensions smaller than relevant physical length scales is leading to the discovery and exploitation of new physical phenomena. Electron beam lithography has been used to define most of the ultra-small objects studied to date. The limits of this method can be understood on the basis of electron scattering and electron beam resist characteristics. Except for rare cases, the electron beam defined pattern must be transferred into another material of interest, and this can impose significant limits on the minimum attainable feature size. In this paper we will describe physical and practical limits of ultra-small structure creation with an emphasis on III-V compound semiconductors. Examples of small object fabrication are given with particular consideration of the fabrication of quasi-one-dimensional wires.

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Author information

Authors and Affiliations

  1. Bell Communications Research, 331 Newman Springs Road, Red Bank, NJ, 07701, USA

    H. G. Craighead, A. Scherer & M. L. Roukes

Authors
  1. H. G. Craighead
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  2. A. Scherer
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  3. M. L. Roukes
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Editor information

Editors and Affiliations

  1. Institut für Experimentalphysik, Universität Linz, A-4040, Linz, Austria

    Helmut Heinrich

  2. Institut für Physik, Montanuniversität Leoben, A-8700, Leoben, Austria

    Günther Bauer

  3. Institut für Festkörperphysik, Universität Wien, A-1090, Wien, Austria

    Friedemar Kuchar

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© 1988 Springer-Verlag Berlin Heidelberg

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Craighead, H.G., Scherer, A., Roukes, M.L. (1988). Fabrication of Ultra-Small Structures: Quantum Wires. In: Heinrich, H., Bauer, G., Kuchar, F. (eds) Physics and Technology of Submicron Structures. Springer Series in Solid-State Sciences, vol 83. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-83431-8_1

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  • DOI: https://doi.org/10.1007/978-3-642-83431-8_1

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-83433-2

  • Online ISBN: 978-3-642-83431-8

  • eBook Packages: Springer Book Archive

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