Abstract
Innovation in analytical surface science has evolved a panoply of tools which are sensitive to nanometer scale lengths in one dimension (typically depth). A listing of those techniques would include Auger and photoelectron spectroscopies, low energy electron diffraction, secondary ion mass spectrometry, etc.; these tools have been under development since the late 1960s and are well covered in many textbooks and reviews [15.1–5]. They are surface specific, but probe relatively large areas (i.e., > 50 nm diameter). The continued scientific/technological evolution toward smaller structures raises the need for a different class of surface analytical tools which specifically probe nanometer volume elements. Even for larger structures, the analysis of defects requires the capability to examine properties of small volume elements.
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References
L.C. Feldman, J.W. Mayer: Fundamentals of Surface and Thin Film Analysis (North Holland, NY 1986)
A.W. Czanderna (ed.): Methods of Surface Analysis (Elsevier, NY 1975)
D. Briggs, M.P. Seah (eds.): Practical Surface Analysis by Auger and X-ray Photoelectron Spectroscopy (Wiley, NY 1983)
A. Benninghoven, F.G. Rüdenauer, H.W. Werner: Secondary Ion Mass Spectrometry: Basic Concepts, Instrumental Aspects, Applications and Trends (Wiley, New York 1987)
N.H. Turner: “Surface Analysis: X-ray Photoelectron Spectroscopy and Auger Electron Spectroscopy”, Anal. Chem. 60, 337R (1988)
T.G.P. Chang, D.P. Kern, E. Kratschmer, K.Y. Lee, H.E. Luhn, M.A. McCord, S.A. Rishton, Y. Vladimirsky: IBM Journal of Research and Development 32, 462 (1988)
A. Franks: J. Phys. E. 20, 1442 (1987)
U. Köhler, J.E. Demuth, R.J. Hamers: J. Vac. Sci. Technol. A7, 2860 (1989)
AJ. Hoeven, D. Dijkkamps, EJ. Van Loenen, J.M. Lenssinck, J. Dielemann: J. Vac. Sci. Technol. A8, 207 (1990)
St. Tosch, H. Neddermeyer: J. Microsc. 152, 415 (1988)
E. Ritter, RJ. Behm, G. Potschke, J. Wintterlin: Surf. Sci. 181, 403 (1987)
X.-S. Wang, RJ. Phaneuf, E.D. Williams: J. Microsc. 152, 473 (1988)
Ph. Avouris, R. Wolkow: Phys. Rev. B39, 5091 (1989)
R.J. Behm, W. Hosier: In Chemistry and Physics of Solid Surfaces VI, ed. by R. Vanselow, R. Howe, Springer Ser. Surf. Sci. Vol. 5 (Springer, Berlin, Heidelberg 1986) p.361
J.P. Rabe: Angew. Chem. 101, 117 (1989)
H.K. Wickramasinghe: Scientific American (October), 98 (1989)
J.N. Israelachvili: Intermodular and Surface Forces (Academic, London 1985)
P.K. Hansma, V.B. Elings, O. Marti, C.E. Bracken Science 242, 157 (1988)
G. Binnig, H. Rohrer, Ch. Gerber, E. Weibel: Phys. Rev. Lett. 50, 120 (1983)
G. Binnig, H. Rohrer: Helv. Physica Acta 55, 726 (1982)
Y. Kuk, PJ. Silverman: Rev. Sci. Instrum. 60, 165 (1989)
J.S. Murday, RJ. Colton: J. Mater. Sci. and Engn. B, 6, 77 (1990)
J. Gimzewski: Physics World 2 (Aug), 25 (1989)
C.B. Duke:Tunneling in Solids (Academic, New York 1969)
E. Burstein, S. Lundqvist (eds.): Tunneling Phenomena in Solids (Plenum, New York 1969) 15:26
T. Wolfram (ed.):Inelastic Electron Tunneling Spectroscopy, Springer Series in Solid-State Science, Vol. 4 (Springer, Berlin, Heidelberg 1978)
P.K. Hansma (ed.): Tunneling Spectroscopy (Plenum Press, New York 1982)
E.L. Wolf: Principles of Electron Tunneling Spectroscopy (Oxford University Press, New York 1985)
L. Esaki: Phys. Rev. 109, 603 (1958)
I. Giaver: Phys. Rev. Lett. 5, 147 (1960)
R.C. Jaklevic, J. Lambe: Phys. Rev. Lett. 17, 1139 (1966)
D.G. McDonald: Phys. Today 34, 37 (1981)
RD. Young: Phys. Today 21, 42 (1972)
R.D. Young, J. Ward, F. Scire: Phys. Rev. Lett. 27, 922 (1971)
R.D. Young, J. Ward, F. Scire: Rev. Sci. Instrum. 43, 999 (1972)
G. Biimig, H. Rohrer: Rev. Modern Phys. 59, 615 (1987)
P.K. Hansma, J. Tersoff: J. Appl. Phys. 61, R1 (1987)
J.E. Demuth: In Physics in a Technological World, ed. by A.P. French, American Inst, of Phys., New York 1988, p. 141
R.M. Tromp: InChemistry and Physics of Solid Surfaces VII, ed. by R. Vanselow, R. Howe, Springer Ser. Surf. Sci. Vol. 10 (Springer, Berlin, Heidelberg 1988) p.547
J.A. Golovchenko: Science 232, 48 (1986)
Proc. of the First International Conference on Scanning Tunneling Microscopy, Surf. Sei. 181 (March, 1987); Proc. of the Second International Conference on Scanning Tunneling Microscopy, J. Vac. Sci. Technol. A6 (March/April, 1988); Proc. of the Third International Conference on Scanning Tunneling Microscopy, J. Microscopy 152 (Oct/Nov/Dec, 1988); Proc. of the Fourth International Conference on Scanning Tunneling Microscopy, J. Vac. Sei. Technol. A8 (Jan/Feb, 1990); Proc. of the Topical Conference on Probing the Nanometer Scale Properties of Surfaces and Interfaces, J. Vac. Sci. Technol. A7 (July/Aug, 1989); Proc. of the Adriatico Research Conference on Scanning Tunneling Microscopy, Physica Scripta 38 (August 1988)
Y.-C. Cheng, P.J. Bryant: “Bibliography of Scanning Tunneling Microscopy/Spectroscopy and Atomic Force Microscopy”, UMKC-Physics; 1110 E. 48th St.; Kansas City, MO 64110
J.G. Simmons: J. Appl. Phys. 34, 2581 (1963)
J. Tersoff, D.R. Hamann: Phys. Rev. Lett 50, 1998 (1983)
J. Tersoff, D.R. Hamann: Phys. Rev. B31, 805 (1985)
Y. Kuk, PJ. Silverman, H.Q. Nguyen: J. Vac. Sci. Technol. A6, 524 (1988)
J. Wintterlin, J. Wiechers, Th. Gritsch, H. Höfer, RJ. Behm: J. Microsc. 152, 423 (1988)
U. Diirig, O. Züger, D.W. Pohl: J. Microsc. 152, 259 (1988)
R. Hamers, R. Tromp, J. Demuth: Phys. Rev. Lett. 56, 1972 (1986)
G. W. Stupian, M.S. Leung: J. Vac. Sci. Technol. A7, 2895 (1989)
N. Tsuda, H. Yamada, F. Ishida, M. Miyashita, R. Yamaguchi: Jap. J. Precis. Engn. 155, 146 (1989)
J.W. Lyding, S. Skala, J.S. Hubacek, R. Brockenbough, G. Gammie: Rev. Sci. Instrum. 59, 1897 (1988)
R. Sonnenfeld, P.K. Hansma: Science 232, 211 (1986)
J. Schneir, O. Marti, G. Remmers, D. Glaser, R. Sonnenfeld, B. Drake, P.K. Hansma, V. Elings: J. Vac. Sci. Technol. A6, 283 (1988)
R.S. Robinson: J. Microsc. 152, 541 (1988)
I. Otsuka, T. Iwasaki: J. Microsc. 152, 289 (1988)
T. Twomey, J. Wiechers, D.M. Kolb, RJ. Behm: J. Microsc. 152, 537 (1988)
MJ. Heben, M.M. Dovek, N.S. Lewis, R.M. Penner, C.E. Quate: J. Microsc. 152, 651 (1988)
J.S. Foster, J.E. Frommer: Nature 333, 542 (1988)
S.M. Lindsay, T. Thundat, L. Nagahara, U. Knipping, R.L. Rill: Science 244, 1063 (1989)
G. Binnig, H. Fucks, E. Stoll: Surf. Sci. 169, L295 (1986)
R.H. Koch, RJ. Hamers: Surf. Sci. 181, 333 (1987)
J.E. Demuth, U. Köhler, R.J. Hamers: J. Microsc. 152, 299 (1988)
J.P. Ibe, PP. Bey, Jr., SL. Brandow, R.A. Brizzolara, NA. Bumham, D.P. DiLella, K.P. Lee, C.R.K. Marrian, RJ. Colton: J. Vac. Sci. Technol. A8 July/August (1990)
M. Gehrtz, H. Strecker, H. Grimm: J. Vac. Sci. Technol. A6, 432 (1988)
R.A. Dragoset, R.D. Young, H.P. Layer, S.R. Mielezanek, E.C. Teague, RJ. Celotta: Opt. Lett. 11, 560 (1986)
D.R. Denley: J. Vae. Sci. Technol. A8, 603 (1990)
Y. Miyazaki, Y. Koga, H. Hayashi: J. Vae. Sci. Technol. A8, 628 (1990)
M. Green, M. Richter, J. Kortright, T. Barbee, R. Carr, I. Lindau: J. Vac. Sci. Technol. A6, 428 (1988)
M. Anders, M. Thaer, M. Mück, C. Heiden: J. Vac. Sci. Technol. A6, 436 (1988)
S. Okayama, M. Komuro, W. Mizutani, H. Tokumoto, M. Okana, K. Shimizu, Y. Kobayashi, F. Matsumoto, S. Wakiyama, M. Shigeno, F. Sakai, S. Fujiwara, O. Kitamura, M. Ono, K. Kajimura: J. Vac. Sci. Technol. A6, 440 (1988)
B.A. Sexton, G.F. Cotterill: J. Vac. Sci. Technol. A7, 2734 (1989)
J.A. Stroscio, R.M. Feenstra, A.P. Fein: Phys. Rev. Lett. 57, 2579 (1986)
R.M. Feenstra, J.A. Stroscio, A.P. Fein: Surf. Sci. 181, 295 (1987)
N.D. Lang: Phys. Rev. B34, 5947 (1986); B37, 10395 (1988)
RJ. Hamers, U.K. Köhler: J. Vac. Sci. Technol. A7, 2854 (1989)
R.S. Becker, B.S. Swartzentruber, J.S. Vicker, M.S. Hybertsen, S.G. Louie: Phys. Rev. Lett. 60, 116 (1988)
R.M. Trömp, RJ. Hamers, J.E. Demuth: Phys. Rev. B34, 1388 (1986)
WJ. Kaiser, R.C. Jaklevic: Surf. Sci. 181, 55 (1987)
R.M. Feennstra, J.A. Stroscio: J. Vac. Sci. Technol. B5, 923 (1987)
J.A. Stroscio, RM. Feenstra, D.M. Newns, A.P. Fein: J. Vac. Sci. Technol. A6, 499 (1988)
H.G. Le Due, WJ. Kaiser, J.A. Stern: Appl. Phys. Lett. 50, 1921 (1987)
R. Berthe, U. Hartmann, C. Heiden: J. Microsc. 152, 831 (1988)
J.R. Kirtley, C.C. Tsuei, S.I. Pack, C.C. Chi, J. Rozen, M.W. Shafer: Phys. Rev. B35, 7216
S. Pan, K.W. Ng, A.L. de Lozanne, J.M. Tarascón, L.H. Greene: Phys. Rev. B35, 7220 (1987)
M.E Hawley, K.E. Gray, D.W. Capone II, O.G. Hinks: Phys. Rev. B35, 7224 (1987)
M. Naito, D.P.E. Smith, M.D. Kirk, B. Oh, M.R. Hahn, K. Chai, D.B. Mitzi, JZ. Sun, DJ. Webb, M.R. Beasley, O. Fischer, T.H. Geballe, R.H. Hammond, A. Kapitulnik, C.F. Quate: Phys. Rev. B35, 7228 (1987)
H. Heinzelmann, D. Anselmetti, R. Wiesendanger, H.-R. Hidber, H.-J. Güntherodt, M. Düggelist, R. Auggenheim, H. Schmidt, G. Güntherodt: J. Microsc. 152, 399 (1988)
R. Laiko, M. Aarnio, L. Heikkilä, H. Snellman, I. Kirschner: J. Microsc. 152, 407 (1988)
H.F. Hess, R.B. Robinson, R.C. Dynes, J.M. Valles, Jr., J.V. Waszczak: Phys. Rev. Lett. 62, 214 (1989)
WJ. Kaiser, L.D. Bell: Phys. Rev. Lett. 60, 1406 (1988); 61, 2368 (1988)
J.H. Coombs, J.K. Gimzewski: J. Microscopy 152, 841 (1988)
M.A. McCord, R.F.W. Pease: J. Vac. Sei. Technol. B3, 198 (1985)
H.-W. Fink: IBM J. Res. Devel. 30, 460 (1986)
H.-W. Fink: Physica Scripta 38, 260 (1988)
R. Allenspach, A. Bischof: Appl. Phys. Lett. 54, 587 (1989)
B. Reihl, J.K. Gimzewski: Surf. Sci. 189, 36 (1987)
J.H. Coombs, J.K. Gimzewski, B. Reihl, J.K. Sass, R.R. Schüttler: J. Microscopy 152, 325
G. Binnig, C.F. Quate, Ch. Gerber: Phys. Rev. Lett. 56, 930 (1986)
G. Binnig, Ch. Gerber, E. Stoll, T.R. Albrecht, C.F. Quate: Surf. Sci. 189/190, 1 (1987)
T.R. Albrecht, C.F. Quate: J. Appl. Phys. 62, 2599 (1987)
T.R. Albrecht, C.F. Quate:J. Vac. Sci. Technol. A6, 271 (1988)
C.M. Mate, G.M. McClelland, R. Erlandsson, S. Chiang: Phys. Rev. Lett. 59, 1942 (1987)
O. Marti, B. Drake, P.K. Hansma: Appl. Phys. Lett. 51, 484 (1987)
H. Heinzelmann, P. Grütter, E. Meyer, H. Hidber, L. Rosenthaler, M. Ringger, H.-J. Güntherodt: Surf. Sci. 189/190, 29 (1987)
H. Heinzelmann, E. Meyer, P. Griitter, H.-R. Hidber, L. Rosenthaler, H.-J. Güntherodt: J. f Vac. Sei. Technol. A6, 275 (1988)
H. Heinzelmann, E. Meyer, H.-J. Güntherodt: Surf. Sci. 221, 1 (1989)
S. Alexander, L. Hellemans, O. Marti, J. Schneir, V. Elings, P. Hansma, M. Longmire, J. Gurley: J. Appl. Phys. 65, 164 (1989)
J.B. Pethica: Phys. Rev. Lett. 57, 3235 (1986)
J.B. Pethica, W.C. Oliver: Physica Scripta T19, 61 (1987)
HJ. Mamin, E. Ganz, D.W. Abraham, R.E. Thompson, J. Clarke: Phys. Rev. B34, 9015 (1986)
C.M. Mate, R. Erlandsson, GM. McClelland, S. Chiang: Surf. Sci. 208, 473 (1989)
A.L. Weisenhorn, P.K. Hansma, T.R. Albrecht, C.F. Quate: Appl. Phys. Lett. 54,2651 (1989)
Y. Martin, C.C. Williams, HJC. Wickramasinghe: J. Appl. Phys. 61, 4723 (1987)
R. Erlandsson, G.M. McClelland, CM. Mate, S. Chiang: J. Vac. Sci. Technol. A6, 266 (1988)
D. Rugar, HJ. Mamin, R. Erlandsson, J.E. Stem, B.D. Terris: Rev. Sci. Instrum. 59, 2337 (1988)
G. Neubauer, S.R. Cohen, G.M. McClelland: InInterfaces between Polymers, Metals, and Ceramics, ed. by B.M. DeKoven, A J. Gellman, R. Rosenberg, MRS Proceedings, 1989
U. Dürig, J.K. Gimzewski, D.W. Pohl: Phys. Rev. Lett. 57, 2403 (1986)
PJ. Bryant, R.G. Miller, R. Yang: Appl. Phys. Lett. 52, 2233 (1988)
J.B. Pethica, A.P. Sutton: J. Vac. Sci. Technol. A6, 2490 (1988)
N.A. Burnham, RJ. Colton: J. Vac. Sci. Technol. A7, 2906 (1989)
N.A. Bumham, D.D. Dominguez, R.L. Mowery, RJ. Colton: Phys. Rev. Lett. 64,1931 (1990)
U. Landman, W.D. Luedtke, M.W. Ribarsky: J. Vac. Sci. Technol. A7, 2829 (1989)
R. Erlandsson, G. Hadziioannou, C.M. Mate, G.M. McClelland, S. Chiang: J. Chem. Phys. 89, 5190 (1988)
Y. Martin, C.C. Williams, H.K. Wickramasinghe: J. Appl. Phys. 61, 4723 (1987)
Y. Martin, H.K. Wickramasinghe: Appl. Phys. Lett. 50, 1455 (1987)
G.M. McClelland, R. Erlandsson, S. Chiang: In Review of progress in Quantitative Non- Destructive Evaluation, Vol. 6, Plenum, New York, NY 1987
U. Landman, W.D. Luedtke, A. Nitzan: Surf. Sci. 210, L177 (1989)
P. Grütter, E. Meyer, H. Heinzelmann, L. Rosenthaler, H.-R. Hidber, H.-J. Güntherodt: J. Vac. Sci. Technol. A6, 279 (1988)
T. Göddenhenrich, U. Hartmann, M. Anders, C. Heiden: J. Microsc. 152, 527 (1988)
U. Hartmann: J. Vac. Sci. Technol. A8, 411 (1990)
U. Hartmann, C. Heiden: J. Microsc. 152, 281 (1988)
J J. Saenz, N. Garcia, P. Grütter, E. Meyer, H. Heinzelmann, R. Wiesendanger, L. Rosenthaler, H.R. Hidber, H.-J. Güntherodt: J. Appl. Phys. 62, 4293 (1987)
Y. Martin, D.W. Abraham, H.K. Wickramasinghe: Appl. Phys. Lett. 52, 1103 (1988)
P. Muralt, H. Meier, D.W. Pohl, H.W.M. Salemink: Appl. Phys. Lett. 50, 1352 (1987)
D.W. Abraham, C.C. Williams, H.K. Wickramasinghe: J. Microsc. 152, 863 (1988)
H.J. Mamin, D. Rugar, J.E. Stern, B.D. Terris, S.E. Lambert: Appl. Phys. Lett. 53, 1563
Y. Martin, D. Rugar, H.K. Wickramasinghe: Appl. Phys. Lett. 52, 245 (1988)
J.N. Israelachvili: J. Coll. Interf. Sci. 110, 263 (1986)
J.N. Israelachvili, P.M. McGuiggan, A.M. Homola: Science 240, 189 (1988)
J. Van Alsten, S. Granick: Phys. Rev. Lett. 61, 2570 (1988)
U. Dürig, D.W. Pohl, F. Rohner: J. Appl. Phys. 59, 3318 (1986)
U. Dürig, D.W. Pohl, F. Rohner: IBM J. Res. Develop. 30, 478 (1986)
D.W. Pohl, U.Ch. Fischer, U.T. Dürig: J. Microscopy 152, 853 (1988)
A. Lewis, M. Isaacson, A. Harootunian, A. Muray: Ultramicroscopy 13, 227 (1984)
K. Dransfeld: J. Microscopy 152, 35 (1988)
U. Ch. Fischer, D.W. Pohl: Phys. Rev. Lett. 62, 458 (1989)
C.C. Williams, H.K. Wickramasinghe: Appl. Phys. Lett. 49, 1587 (1986)
Y. Manassen, RJ. Hamers, J.E. Demuth, AJ. Castellano Jr.: Phys. Rev. Lett. 62, 2531 (1989)
P.K. Hansma, B. Drake, O. Marti, S.A.C. Gould, C.B. Prater: Science 243, 641 (1989)
RP. Feynman: “There’s Plenty of Room at the Bottom”, in Miniaturization, ed. by H.D. Gilbert (Reinhold, New York 1961), pp. 282–296
C. Schneiker, S. Hameroff, M. Voelker, J. He, E. Dereniak, R. McCuskey: J. Microsc. 152, 585 (1988)
T.R. Albrecht, S. Akamine, MJ. Zdeblich, CF. Quate: J. Vac. Sci. Technol. A8, 317 (1990)
A.D. Wilson: Solid State Technology, May, 249 (1986)
Nanostructure Technology in IBM Journal of Research and Development 32,440–514 (1988)
R.W. Devenish, DJ. Eaglesham, D.M. Mäher, C.J. Humphreys: Ultramicroscopy 28, 324 (1989)
P.G. Blauner, J.S. Ro, Y. Butt, J. Melngailis: J. Vac. Sci. Technol. B7, 609 (1989)
A.E. Bell, K. Rao, L.W. Swanson: J. Vac. Sci. Technol. B6, 306 (1988)
M.A. McCord, R.F.W. Pease: Surf. Sci. 181, 278 (1987)
M.A. McCord, R.F.W. Pease: J. Vac. Sci. Technol. B6, 293 (1988)
M.A. McCord, R.F.W. Pease: J. Vac. Sci. Technol. B5, 430 (1987)
C.R.K. Marrian, RJ. Colton: Appl. Phys. Lett. 56, 755 (1990)
J.S. Foster, J.E. Frommer, P.C. Amett: Nature 331, 324 (1988)
R. Kaneko, E. Hamada: J. Vac. Sci. Technol. A8, 577 (1990)
RH. Bernhardt, G.C. McGonigal, R. Schneider, DJ. Thomson: J. Vac. Sci. Technol. A8,667 (1990)
J.P. Rabe, S. Buchholz, AM. Ritcey: J. Vac. Sci. Technol. A8, 629 (1990)
T.R. Albrecht, M.M. Dovek, C.A. Lang, P. Grütter, CP. Quate, S.WJ. Kuan, C.W. Frank, R.F.W. Pease: J. Appl. Phys. 64, 1178 (1988)
M.M. Dovek, T.R. Albrecht, S.WJ. Kuan, C.A. Lang, R. Emch, P. Grütter, C.W. Frank, R.F.W. Pease, C.F. Quate: J. Microscopy 152, 229 (1988)
M.A. McCord, R.F.W. Pease: J. Vac. Sci. Technol. B4, 86 (1986)
RM. Silver, E.E. Ehrichs, A.L. de Lozanne: Appl. Phys. Lett. 51, 247 (1987)
E.E. Ehrichs, R.M. Silver, A.L. de Lozanne: J. Vac. Sci. Technol. A6, 540 (1988)
M.A. McCord, D.P. Kern, T.H.P. Chang: J. Vac. Sci. Technol. B6, 1877 (1988)
R.S. Becker, J.A. Golovchenko, B.S. Swartzentruber: Nature 325, 419 (1987)
T.R. Albrecht, M.M. Dovek, M.D. Kirk, C.A. Lang, C.F. Quate, D.P.E. Smith: Appl. Phys. Lett. 55, 1727 (1989)
J. Schneir, P.K. Hansma, V. Elings, J. Gurley, K. Wickramasinghe, R. Sonnenfeld: Proc. Spie. 892, 16 (1988)
K. Terashima, M. Kondoh, T. Yoshida: J. Vac. Sci. Technol. A8, 581 (1990)
E.E. Ehrich, A.L. de Lozanne: J. Vac. Sci. Technol. A8, 571 (1990)
C.W. Lin, F.-RP. Fan, AJ. Bard: J. Electrochem. Soc. 134, 1038 (1987)
O.E. Hüsser, D.H. Craston, AJ. Bard: J. Vac. Sci. Technol. B6, 1873 (1988)
U. Staufer, R. Wiesendanger, L. Eng, L. Rosenthaler, H.R. Hidber, H.-J. Güntherodt, N. Garcia: Appl. Phys. Lett. 51, 244 (1987)
U. Staufer, R. Wiesendanger, L. Eng, L. Rosenthaler, H.R. Hidber, H.-J. Güntherodt: J. Vac. Sci. Technol. A6, 537 (1988)
U. Staufer, L. Scandeila, R. Wiesendanger: Z. Phys. B 77, 281 (1989)
L. Nagahara, SM. Lindsay, T. Thundat, U. Knipping: J. Microscopy 152, 145 (1988)
R. Emch, J. Nogami, MM. Dovek, C.A. Lang, C.F. Quate: J. Microscopy 152, 129 (1988)
M.A. McCord, R.F.W. Pease: Appl. Phys. Lett. 50, 569 (1987)
R.C. Jaklevic, L. Elie: Phys. Rev. Lett. 60, 120 (1988)
G. Van de Walle, H. Van Kempen, P. Wyder: Surf. Sci. 167, L219 (1986)
WJE. Packard, Y. Liang, N. Dai, J.D. Dow, R. Nicolaides, R.C. Jaklevic, WJ. Kaiser: J. Microscopy 152, 715 (1988)
J. Schneir, R. Sonnenfeld, O. Marti, P.K. Hansma, J.E. Demuth, RJ. Hamers: J. Appl. Phys. 63, 717 (1988)
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Murday, J.S., Colton, R.J. (1990). Proximal Probes: Techniques for Measuring at the Nanometer Scale. In: Vanselow, R., Howe, R. (eds) Chemistry and Physics of Solid Surfaces VIII. Springer Series in Surface Sciences, vol 22. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-75762-4_15
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