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Proximal Probes: Techniques for Measuring at the Nanometer Scale

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Chemistry and Physics of Solid Surfaces VIII

Part of the book series: Springer Series in Surface Sciences ((SSSUR,volume 22))

Abstract

Innovation in analytical surface science has evolved a panoply of tools which are sensitive to nanometer scale lengths in one dimension (typically depth). A listing of those techniques would include Auger and photoelectron spectroscopies, low energy electron diffraction, secondary ion mass spectrometry, etc.; these tools have been under development since the late 1960s and are well covered in many textbooks and reviews [15.1–5]. They are surface specific, but probe relatively large areas (i.e., > 50 nm diameter). The continued scientific/technological evolution toward smaller structures raises the need for a different class of surface analytical tools which specifically probe nanometer volume elements. Even for larger structures, the analysis of defects requires the capability to examine properties of small volume elements.

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Murday, J.S., Colton, R.J. (1990). Proximal Probes: Techniques for Measuring at the Nanometer Scale. In: Vanselow, R., Howe, R. (eds) Chemistry and Physics of Solid Surfaces VIII. Springer Series in Surface Sciences, vol 22. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-75762-4_15

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