Abstract
The different steps of thin film preparation by a sol-gel process are discussed: preparation of the starting solutions, control of the viscosity of the sol, deposition methods and thermal treatments. Transmission Electron Microscopy (TEM), Scanning Electron Microscopy (SEM) and Waveguide Raman Spectroscopy (WRS) are used to obtain structural characterization of the layers. The option of matrix doping is cited. Some optical properties of thin films using waveguide techniques and non-linear properties are underlined.
Résumé
Les différentes étapes d’élaboration de couches minces par le procédé sol-gel sont présentées: préparation des solutions de départ, viscosité du sol, méthodes de dépôt et traitements thermiques. Des mesures par microscopie électronique à transmission, à, balayage, et par spectroscopic Raman en configuration guidante, ont été menées pour caractériser la structure des couches. Les possibilités de dopage de la matrice sont rappelees. Quelques propriétés optiques des couches minces utilisant des techniques de guidage optique et des propriétés non linéaires sont soulignées.
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References
W. Geffcken, and E. Berger, Deutsches Reichs Patent 736411, May 6, (1939), assigned to Jenser Glaswek Schott and Gen., Jena
D.P. Partlow, and T.W. O’Keeffe, Appl. Optics, 29, (1990), 1526
H.G. Floch, J.J. Priotton, and I.M. Thomas, Thin Solid Films, 175, (1989), 173
W.L. Warren, P.M. Lenahan, C.J. Brinker, G.R. Shaffer, C.S. Ashley and S.T. Reed, “Better Ceramics Through Chemistry IV”, Eds. B.J.J. Zelinski, C.J. Brinker, D.E. Clark, and D.R. Ulrich, Mat Res. Soc. Symp. Proc., vol. 180, Mat. Res. Soc, Pittsburgh, PA (1990) 413
T. Bein, G.C. Frye, and C.J. Brinker, J. Am. Chem. Soc., 11 1, (1989), 7640
C.J. Brinker, A.J. Hurd and K.J. Ward, “Ultrastrueture Processing of Advanced Ceramics”, Eds. J.D. Mackenzie, and D.R. Ulrich, Wiley, NY (1988) 223
M.A. Anderson, M.J. Geiselmann, and Q. Xu, J.Membrane Sci. 39, (1988), 243
S. Hirano and K. Kato, J. of Non-Cryst. Solids, 100, (1988), 538
S.A. Kramer, G. Kordas, J. McMillan, G.C. Hilton and D.J. Van Harlingen, Appl. Phys. Lett. 53, (1988), 156
J. Fukushima, K. Kodaira, and T. Masushita, J. Mater. Sci., 58, (1984), 595
C.J. Brinker, and G.W. Scherer, Sol-Gel Science, Academic Press, New York (1990)
J. Livage, M. Henry, C. Sanchez, Progress in Solid State Chemistry 18, (1988), 259
T. Mizuno, J. Phalippou, and J. Zarzycki, Glass Technology 26, (1985), 9
L.C. Klein, Sol-Gel Optics Processing and Applications, Ed L.C. Klein, Kluwer Academic Publishers, New York, (1994), 141
Y. Levy, C. Imbert, J. Cipriani. S. Racine and R. Dupeyrat, Opt. Commun. 11, (1974), 66
J. Mugnier, B. Varrel, M. Bathat, C. Bovier, and J.Serughetti, J. Mater. Sci. Lett. 11, (1992), 875–877
T. Ohsaka, F. Izumi and Y. Fujiki, J. Raman Spectrosc. 7, (1978), 321
Y. Wang, J. Phys. Chem. 95, (1983), 1119
E. Vogel, M.J. Weber, and D.M. Krol, Phys. Chem. of Glass, 32, (1991), 2310
A.Othmani, J.C. Plenet, E.Bernstein, C. Bovier, J.Dumas, P. Riblet, P. Gilliot, R. Levy and J.B. Grun, J. of Crystal Growth, 144, (1991), 141
Y. Nosaka, K. Tanaka, and N. Fuji, Appli. Phys. Lett. 62, (1993), 1863
L.T. Cheng, N. Herron, and Y. Wang, J. Appl. Phys 66, (1989), 3417
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Plenet, J.C. et al. (1998). Preparation of Thin Films Using a Sol-Gel Method. In: Caliste, JP., Truyol, A., Westbrook, J.H. (eds) Thermodynamic Modeling and Materials Data Engineering. Data and Knowledge in a Changing World. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72207-3_27
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DOI: https://doi.org/10.1007/978-3-642-72207-3_27
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