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High Numerical-Aperture X-Ray Condensers for Transmission X-Ray Microscopes

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X-Ray Microscopy and Spectromicroscopy

Abstract

In the near future transmission X-ray microscopes (TXM) will be installed at undulator X-ray sources, which generate highly collimated X-ray beams. To match a TXM to such a source X-ray condenser-monochromators of smaller light collecting area and increased numerical aperture (NA) are required. This can be achieved with the concept of dynamical aperture synthesis. Herein an off-axis zone plate with comparatively “coarse” zones is used, which can be processed with high diffraction efficiency with standard ebeam lithography methods. The numerical aperture of any existing X-ray micro objective can be matched for dark and bright field imaging. A monochromaticity of several thousand is possible and the homogeneity of the intensity distribution in the object field is enhanced compared to a zone plate linear monochromator used in TXMs at the moment.

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© 1998 Springer-Verlag Berlin Heidelberg

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Niemann, B. (1998). High Numerical-Aperture X-Ray Condensers for Transmission X-Ray Microscopes. In: Thieme, J., Schmahl, G., Rudolph, D., Umbach, E. (eds) X-Ray Microscopy and Spectromicroscopy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72106-9_35

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  • DOI: https://doi.org/10.1007/978-3-642-72106-9_35

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-72108-3

  • Online ISBN: 978-3-642-72106-9

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