Abstract
We show by computer modelling that scanning soft X-ray microscopy using a 10 nm to 20 nm aperture in near field conditions can provide a point to point resolution in transmission of 10 nm. Implementation of this new proposal will radically move forward the present best resolution in scanned X-ray imaging of about 35 nm. The method is realistic in terms of exposure time per point with third generation synchrotron sources of soft X-rays.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
J. Kirz, C. Jacobsen, and M. Howells, Quat. Rev. Biophys. 28, 33 (1995).
E. Anderson and D. Kern, in Springer Series in Optical Sciences, Berlin, Springer Verlag, 67, 75 (1992).
T. Matthies, C. David and J. Thieme, J. Vac. Sci. Technol. B 11, 1873 (1993).
P. Charalambous, P. Anastasi, R.E. Burge, and K. Popova, Procs SPIE 1995 Symposium on Optical Science, Engineering and Instrumentation, San Diego, 2516, 2 (1995).
C. Jacobsen, S. Williams, E. Anderson, M.T. Browne, C.J. Buckley, D. Kern, J. Kirz, and X. Zhang, Opt. Comm. 86, 351 (1991).
R.E. Burge, Royal Institution Proceedings, 64, 137 (1992).
L. Novotny, D.W. Pohl, and P. Regli, J. Opt. Soc. Am. A 11, 1768 (1994).
J.L. Kahn, T.D. Milster, F.F. Froehlich, R.W. Ziolkowski, and J.B. Judkins, J. Opt. Soc. Am. A 12, 1677 (1995).
S.D. Hector, H.I. Smith, and M.L. Schattenburg, J. Vac. Sci. Technol. B 11, 2981 (1993).
R.K. Kupka, Y. Chen, F. Rousseaux, A.M. Haghiri-Gosnet and H. Launois, J. Vac. Sci. Technol. B 11,667 (1993).
R.E. Burge and X. Yuan, Procs SPIE 1995 Symposium on Optical Science, Engineering and Instrumentation, San Diego, 2516, 108 (1995).
D. Van Labeke and P. Barchiesi, in Near field optics, Eds. D.W. Pohl and D. Courjon, Kluwer Academic Publishers, Netherlands, NATO ASI series, SeriesE: Applied Sciences, 242, 157 (1993).
Ch. Girard, A. Dereux, D. Andre, A. Castiaux and J.P. Vigneron, Phys. Low-Dim. Struct., 4/5, 53 (1995).
M.G. Moharam and T.K. Gaylord, J. Opt. Soc. Am. 71, 818 (1981).
F. Baida, D. Courjon and G. Trebillon, in Near field optics, Eds. D.W. Pohl and D. Courjon, Kluwer Academic Publishers, Netherlands, NATO ASI Series, Series E: Applied Sciences, 242, 71 (1993).
E. Betzig, J.K. Trautman, T.D. Harris, J.S. Weiner and R.L. Kostelak, Science, 251, 1468 (1991).
B.L. Henke, J.C. Davis, E.M. Gullikson, and R.C.C. Perera, A Preliminary Report on the X-ray Photoabsorption Coefficient and Scattering Factors for 92 elements in the 10–10,000 eV Re,gion. (University of California, Berkeley, Calif., 1988), Rep. LBL-26259.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1998 Springer-Verlag Berlin Heidelberg
About this chapter
Cite this chapter
Burge, R.E., Yuan, XC., Knauer, J.N. (1998). A New Near-Field Scanning Transmission X-Ray Microscopy with 10-nm Resolution. In: Thieme, J., Schmahl, G., Rudolph, D., Umbach, E. (eds) X-Ray Microscopy and Spectromicroscopy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-72106-9_11
Download citation
DOI: https://doi.org/10.1007/978-3-642-72106-9_11
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-642-72108-3
Online ISBN: 978-3-642-72106-9
eBook Packages: Springer Book Archive