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Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces

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The Physics and Fabrication of Microstructures and Microdevices

Part of the book series: Springer Proceedings in Physics ((SPPHY,volume 13))

Abstract

The concepts needed to understand the use of the transmission electron microscope for the microstructural characterisation of semiconductor systems are first exemplified by applications of the basic methods, as are the various approaches required for the preparation of suitable thin foils. Developments in the techniques which can now be applied to the atomic level structural and chemical characterisation of interfaces in such systems are then described mainly by considering specific problems for which the new methods have been developed. The applications considered range from the study of semiconductor/metal and semiconductor/insulator interfaces to the problems in analysing the quality of current III-V heterostructures. In conclusion the future trends in technique which will be required are discussed.

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References

  1. E.G. Britton, W.M. Stobbs: In Electron Microscopy and Analysis, 1985, ed. by G.J. Tatlock IOPCS Vol 78 ( Hilger, Bristol, 1985 ) p. 45

    Google Scholar 

  2. S.B. Newcomb, W.M. Stobbs: J. Cryst Growth (in press)

    Google Scholar 

  3. W.B. Stobbs, S.H. Stobbs: Philos. Mag. (in press)

    Google Scholar 

  4. W.M. Stobbs: In The Structure of Non Crystalline Materials, ed. by P.H. Gaskell ( Taylor and Francis, London, 1977 ) p. 253

    Google Scholar 

  5. P.E. Donovan, W.M. Stobbs: Acta Met. 29, 1419 (1986)

    Article  Google Scholar 

  6. C.B. Boothroyd, W.M. Stobbs: In Proc. EMSA Vol 44 ed. by G.W. Bailey (San Francisco, U.S.A., 1986 )

    Google Scholar 

  7. P.B. Hirsch, A. Howie, R.B. Nicholson, D.W. Pashley, M.J. Whelan: Electron Microscopy of Thin Crystals ( Butterworths, London 1965 )

    Google Scholar 

  8. G. Thomas, M.J. Goringe: Transmission Electron Microscopy of Materials ( Wiley, New York 1979 )

    Google Scholar 

  9. A. Howie, J.L. Hutchison: J. Microsc. 142, 131 (1986)

    Article  CAS  Google Scholar 

  10. D.J.H. Cockayne, I.L.F. Ray, M.J. Whelan: Philos. Mag. 20, 1265 (1969)

    Article  CAS  Google Scholar 

  11. W.M. Stobbs: In Electron Microscopy in Material Science ed. by E. Ruedl and U. Valdre (Commission European Communities 1975 )

    Google Scholar 

  12. P.E. Donovan, W.M. Stobbs: J. Microsc. 130, 361 (1985)

    Article  Google Scholar 

  13. D. Cherns: In Proc EMSA, Vol 42, ed. by G.W. Bailey ( San Francisco, U.S.A., 1984 ) p. 376

    Google Scholar 

  14. D. Schechtman, I. Blech, D. Gratius, J.W. Cahn: Phys. Rev. Lett. 53, 1951 (1984)

    Article  Google Scholar 

  15. K.M. Knowles, W.M. Stobbs: In Proc EMSA, Vol 44, ed. by G.W. Bailey ( San Francisco, U.S.A., 1986 )

    Google Scholar 

  16. W.M. Stobbs: J. Microsc. 136, 137 (1984)

    Article  CAS  Google Scholar 

  17. J.C.H. Spence: In Proc EMSA, Vol 42 ed. by G.W. Bailey ( San Francisco, U.S.A., 1984 ) p. 364

    Google Scholar 

  18. A. Bourret, J. Thibault-Desseaux, B.N. Seidmann: J. Appl. Phys. 55, 825 (1984)

    Article  CAS  Google Scholar 

  19. W. Bergholz, J.L. Hutchison, P. Pirouz: J. Microsc., 141, 143 (1986)

    Article  CAS  Google Scholar 

  20. D.J. Smith, V.E. Cosslett, W.M. Stobbs: Interdiscip. Sci. Rev. 6, 155 (1981)

    CAS  Google Scholar 

  21. W.M. Stobbs: J. Ultramicrosc., 9, 221 (1982)

    Article  CAS  Google Scholar 

  22. S.B. Newcomb, C.B. Boothroyd, W.M. Stobbs: J. Microsc. 140, 195 (1985)

    Article  CAS  Google Scholar 

  23. N.G. Chew, A.G. Cullis: Appl. Phys. Lett. 44, 142 (1984)

    Article  CAS  Google Scholar 

  24. G. Ottavani, K.N. Tu, R.D. Thompson, J.W. Mayer, S.S. Lau: J. Appl. Phys. 54, 4614 (1983)

    Article  Google Scholar 

  25. K.N. Tu: private communication

    Google Scholar 

  26. G.J. Wood, W.M. Stobbs, D.J. Smith: Philos. Mag. A50, 375 (1984)

    CAS  Google Scholar 

  27. W.M. Stobbs, G.J. Wood, D.J. Smith: J. Ultramicrosc. 14, 145 (1984)

    Article  CAS  Google Scholar 

  28. L.D. Marks, V. Heine, D.J. Smith: Phys. Rev. Lett. 52, 656 (1984)

    Article  CAS  Google Scholar 

  29. A.J. Bourdillon, W.M. Stobbs: Ultramicrosc. 17, 147 (1985)

    Article  CAS  Google Scholar 

  30. P.E. Batson, C.R.M. Grovenor, D.A. Smith, C. Wong: In Proc EMSA, Vol 41, ed. by G.W. Bailey ( San Francisco, U.S.A., 1983 ) p. 154

    Google Scholar 

  31. A.J. Bourdillon, P.G. Self, W.M. Stobbs: Philos. Mag. A44, 1335 (1981)

    Article  CAS  Google Scholar 

  32. C.B. Boothroyd, W.M. Stobbs: Philos. Mag. (in press)

    Google Scholar 

  33. J.N. Ness, W.M. Stobbs, T.F. Page: Philos. Mag. (in press)

    Google Scholar 

  34. C.S. Baxter, W.M. Stobbs: In Electron Microscopy and Analysis 1985 ed. by G.J. Tatlock IOPCS Vol 78 ( Hilger, Bristol, 1985 ) p. 387

    Google Scholar 

  35. C.S. Baxter, W.M. Stobbs: In Kyoto International E.M. Conference (1986)

    Google Scholar 

  36. A.P. Long, M.J. Kelly, T.M. Kerr, K.M. Knowles, E.G. Britton, W.M. Stobbs: Phys, Rev. Letts, (in press)

    Google Scholar 

  37. W.O. Saxton, K.M. Knowles, W.M. Stobbs: in Electron Microscropy and Analysis 1985 ed. by G.J. Tatlock IOPCS Vol 78 ( Hilger, Bristol, 1985 ) p. 75

    Google Scholar 

  38. W.M. Stobbs: J. Microsc. 131, 47, (1983)

    Article  Google Scholar 

  39. A.J. Bourdillon, W.M. Stobbs, K. Page, R. Home, C. Wilson, B. Ambrose, L.J. Turner and G.P. Tebby: in Electron Microscopy and Analysis 1985, ed. by G.J Tatlock, IOPCS Vol 78 ( Hilger, Bristol, 1985 ) p. 161

    Google Scholar 

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Author information

Authors and Affiliations

  1. Department of Metallurgy and Materials Science, Pembroke Street, Cambridge, UK

    W. M. Stobbs

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  1. W. M. Stobbs
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Editor information

Editors and Affiliations

  1. GEC Research Ltd., East Lane, HA9 7PP, Wembley, Middlesex, England

    Michael J. Kelly

  2. Laboratoire Central de Recherches, Thomson-CSF, F-91401, Orsay, France

    Claude Weisbuch

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© 1986 Springer-Verlag Berlin Heidelberg

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Stobbs, W.M. (1986). Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces. In: Kelly, M.J., Weisbuch, C. (eds) The Physics and Fabrication of Microstructures and Microdevices. Springer Proceedings in Physics, vol 13. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-71446-7_11

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  • DOI: https://doi.org/10.1007/978-3-642-71446-7_11

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-71448-1

  • Online ISBN: 978-3-642-71446-7

  • eBook Packages: Springer Book Archive

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