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Molecular Beam Epitaxy of III-V Compounds

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Heterojunctions and Semiconductor Superlattices

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Abstract

This paper does not intend to give a review on Molecular Beam Epitaxy (MBE) of III-V compounds, since several excellent review papers have already been published on this topic (see the bibliography section). According to the spirit of the school, our purpose is rather to give insights into the basic principles and the technology of MBE applied to the III-V compounds epitaxial growth, with particular emphasis on what we believe to be the crucial points in order to succeed in performing MBE.

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References

Vacuum and thin films technology See for example

  • A. Roth: Vacuum Technology, second edition, North Holland, Amsterdam 1982.

    Google Scholar 

  • Handbook of Thin Film Technology, Edited by L.I. Maissel and R. Glang, Mc Graw Hill New York 1970.

    Google Scholar 

Reviews articles and books on MBE

  • A.Y. Cho and J.R. Arthur: Progr. Solid State Chem., 10, 157 (1975).

    Article  Google Scholar 

  • L.L. Chang and R. Ludeke: Epitaxial Growth, p. 37, J.W. Matthews editor, Academic New York (1975)

    Google Scholar 

  • J. Massies: P. Etieime and N.T. Linh: Rev. Tech. THOMSON CSF, 8, 5, (1976).

    CAS  Google Scholar 

  • R.F.C. Farrow: Crystal Growth and Materials, 1, 237, E. Kaldis et H.J. Scheel editors, North Holland Amsterdam (1977).

    Google Scholar 

  • B.A. Joyce and C.T.Foxon: Inst. Phys. Conf. Ser. N32, p. 17, (1977).

    Google Scholar 

  • R.Z. Bachrachs Progress in crystal growth and characterization, 2, 115, Pergamon Press (1979).

    Google Scholar 

  • C.E.C. Wood: Phys. Thin Films, JJ., 35, (1979)

    Google Scholar 

  • Molecular Beam Epitaxy, Editor B.R. PAMPLIN, Pergamon, Oxford 1980. K. Ploog: Crystal: Growth, Properties and Applications, 3, 73, Springer Verlag Berlin (1980)

    Google Scholar 

  • R.Z. Bachrach: Crystal Growth, Second Edition, Brian Pamplin Editor, Pergamon (1980)

    Google Scholar 

  • K. Ploog: Ann. Rev. Mater. Sci., 11, 171, (1981). P.E. Luscher: Thin Solid Films, 83, 125, (1981). A.Y. Cho: Thin Solid Films, 100, 291, (1983)

    Google Scholar 

  • Molecular Beam Epitaxy and Heterostructures Edited by L.L. CHANG and K. PLOOG, NATO ASI Serie E N 87, Martinus Nijhoff, Dordrecht 1985

    Google Scholar 

Comprehensive bibliography on MBE

  1. K. Ploog and K. Graf: Molecular Beam Epitaxy of III-V Compounds, Springer- Verlag Berlin 1984

    Google Scholar 

  2. References explicitly cited in the text

    Google Scholar 

  3. E. Bloch: Theorie Cinetique des Gaz, Armand Colin, Paris 1921

    Google Scholar 

  4. E.H. Kennard: Kinetic Theory of Gases, Mc Graw Hill, New York 1938

    Google Scholar 

  5. R.D. Present: Kinetic Theory of Gases, Mc Graw Hill, New York 1958

    Google Scholar 

  6. M. Knudsen: The Kinetic Theory of Gases, Methuen, London 1934

    Google Scholar 

  7. R.W. Berry, P.M. Hall and M.T. Harris: Thin Film Technology, D. Van Nostrand, Princeton 1968

    Google Scholar 

  8. P.E. Luscher and D.M. Collins: in Molecular Beam Epitaxy, B.R. Pamplin Editor, Pergamon, Oxford 1980, p. 15

    Google Scholar 

  9. B.B. Dayton: 1956 Vacuum Symposium Transactions, Committee on Vacuum Techniques, Boston 1956, p. 5

    Google Scholar 

  10. R.E. Stickney, R.F. Keating, S. Yamamoto, W.J. Hastings: J. Vac. Sci. Technol. 4, 10, (1967)

    Article  CAS  Google Scholar 

  11. K.G. Gunther: Z. Naturforsch, 13a, 1081, (1958)

    Google Scholar 

  12. J.H. Neave, B.A. Joyce, P.J. Dobson, N. Norton: Appl. Phys. A, 31, 1, (1983)

    Article  Google Scholar 

  13. J.M. Van Hove, C.S. Lent, P.R. Pukite, P.I. Cohen: J. Vac. Sci. Technol. B, 1, 741 (1983)

    Article  Google Scholar 

  14. P.R. Pukite, J.M. Van Hove, P.I. Cohen: J. Vac. Sci. Technol. B, 2, 243, (1984)

    Article  CAS  Google Scholar 

  15. J.H. Neave, B.A. Joyce, P.J. Dobson: Appl. Phys. A, 34, 179, (1984)

    Article  Google Scholar 

  16. B.F. Lewis, T.C. Lee, F.J. Grunthaner, A. Madhukar, R. Fernandez, J. Maserjian: J. Vac. Sci. Technol. B, 2, 419, (1984)

    Article  CAS  Google Scholar 

  17. M.N. Charase, L. Goldstein, Proc. of the “3eme Seminaire Epitaxie par tfets Moleculaires”, Carry Le-Rouet, France 1984, Edited by CNRS - Sophia Antipolis, p. 135

    Google Scholar 

  18. B.A. Joyce: in “Molecular Beam Epitaxy and Heterostructures” p. 37, ed. by L.L. Chang and K. Ploog, NATO ASI Serie E N° 87, Martinus Nijhoff, Dordrecht 1985

    Google Scholar 

  19. J.R. Arthur: Surf. Sci. 43, 449, (1974)

    Article  CAS  Google Scholar 

  20. C.T. Foxon, B.A. Joyce: Surf. Sci. 64, 293, (1977)

    Article  CAS  Google Scholar 

  21. C.T. Foxon, B.A. Joyce: Surf. Sci. 50, 434, (1975)

    Article  CAS  Google Scholar 

  22. B.A. Joyce, C.T. Foxon: Inst. Phys. Conf. Ser. N° 32, p. 17, (1977)

    Google Scholar 

  23. C.E.C. Wood, D.V. Morgan, L. Rathbun: J. Appl. Phys. 53, 4524, (1982)

    Article  CAS  Google Scholar 

  24. B. Goldstein, D. Szostak, Appl. Phys. Lett. 26, 685, (1975)

    Article  CAS  Google Scholar 

  25. C.T. Foxon, B.A. Joyce: J. Cryst. Growth 44, 75, (1978)

    Article  CAS  Google Scholar 

  26. D. Bonnevie, D.Huet: J. Phys. (Paris) 43, C5, 445, (1982)

    Google Scholar 

  27. J. Massies, J.F. Rochette, P. Delescluse: Proc. Third International Conf. on MBE, San Francisco 1984, to be published in J. Vac. Sci. Technol. B, 3, March-April 1985

    Google Scholar 

  28. K. Ploog: Ann. Rev. Mater. Sci., 11, 171, (1981)

    Article  CAS  Google Scholar 

  29. C.E.C. Wood: in “Molecular Beam Epitaxy and Heterostructures”, p. 149, ed. by L.L. Chang and K. Ploog: NATO ASI Serie E N° 87, Martinus Nijhoff, Dordrecht 1985

    Google Scholar 

  30. A.Y. Cho, J.R. Arthur: Prog. Solid State Chem. 10, 157, (1975) and references there in

    Google Scholar 

  31. D. Delagebeaudeuf, P. Delescluse, P. Etienne, M. Laviron, J. Chaplart, N.T. Linh: Electron. Lett. 16, 667, (1980)

    Article  Google Scholar 

  32. P.N. Tung, P. Delescluse, D. Delagebeaudeuf, M. Laviron, J. Chaplart, N.T. Linh: Electron. Lett. 18, 109 and 517, (1982)

    Google Scholar 

  33. M. Laviron, D. Delagebeaudeuf, P. Delescluse, P. Etienne, J. Chaplart, N.T. Linh: Appl. Phys. Lett. 40, 530, (1982)

    Article  CAS  Google Scholar 

  34. J. Massies, J.F. Rochette, P. Delescluse, P. Etienne, J. Chevrier, N.T. Linh, Electron. Lett. 18, 758, (1982)

    Article  CAS  Google Scholar 

  35. A.Y. Cho: Thin Solid Films, 100, 291, (1983)

    Article  CAS  Google Scholar 

  36. M. Heiblum, E.E. Mendez, L. Osterling: J. Appl. Phys. 54, 6982, (1983)

    Article  CAS  Google Scholar 

  37. P. Etienne, J. Massies, N.T. Linh: J. Phys. E, 10, 1153, (1977)

    Article  CAS  Google Scholar 

  38. A.Y. Cho, J.C. Tracy, Jr: United States Patent 3, 969, 164, (1976)

    Google Scholar 

  39. K. Ploog: in Crystals: Growth, Properties, and Applications Vol. 3, p. 73, Springer-Verlag 1980 5 J.C.M. Hwang, H. Temkin, T.M. Brennan, R. E. Frahm: Appl. Phys. Lett. 42, 66, (1983)

    Article  Google Scholar 

  40. D. Bonnevie and D. Huet: J. Phys. (Paris) 43, C5 - 445 (1982)

    Article  Google Scholar 

  41. J.P. Contour, J. Massies, A. Saletes: Jpn. J. Appl. Phys. 24, L563, (1985)

    Article  Google Scholar 

  42. J. Massies, J.P. Contour: J. Appl. Phys. 58, 806 (1985)

    Article  CAS  Google Scholar 

  43. J. Massies, J.P. Contour: Appl. Phys. Lett. 46, 1150 (1985)

    Article  CAS  Google Scholar 

  44. J.P. Contour, J. Massies, A. Saletes, P. Staib: Appl. A 38, 45 (1985)

    Article  Google Scholar 

  45. J. Massies, F. Lemaire-Dezaly: J. Appl. Phys. 55, 3136 (1984) and 57, 237, (1985)

    Article  CAS  Google Scholar 

  46. G.J. Davies, R. Heckingbottom, H. Ohno, C.E.C. Wood, A.R. Calawa: Appl. Phys. Lett. 37, 290, 1980 )

    Article  CAS  Google Scholar 

  47. J. Massies, P. Devoldere, N.T. Linh: J. Vac. Sci. Technol. 15, 1353, (1978)

    Article  CAS  Google Scholar 

  48. C. Raisin: Private Communication (1984)

    Google Scholar 

  49. C.E.C. Wood, D. Desimone, K. Singer, G.W. Wicks: J. Appl. Phys. 53, 4230 (1982)

    Article  CAS  Google Scholar 

  50. T.A. Flaim, P.D. Ownby: J. Vac. Sci. Technol. 8, 661, (1971)

    Article  CAS  Google Scholar 

  51. K.Y. Cheng, A.Y. Cho, W.R. Wagner, W.A. Bonner: J. Appl. Phys. 52, 1015 (1981)

    Article  CAS  Google Scholar 

  52. J. Massies, M. Sauvage-Simkin: Appl. Phys. A, 32, 27, (1983)

    Article  Google Scholar 

  53. A.Y. Cho, K.Y. Cheng: Appl. Phys. Lett. 38, 360 (1981)

    Article  CAS  Google Scholar 

  54. K.Y. Cheng, A.Y. Cho, W.R. Wagner: Appl. Phys. Lett. 39, 607, (1981)

    Article  CAS  Google Scholar 

  55. K. Alavi, P.M. Petroff, W.R. Wagner, A.Y. Cho: J. Vac. Sci. Technol. B1, 146, (1983)

    Article  CAS  Google Scholar 

  56. A.Y. Cho: J. Appl. Phys. 47, 2841, (1976)

    Article  CAS  Google Scholar 

  57. J. Massies, P. Devoldere, P. Etienne, N.T. Linh: in: Proc. 7th Intern. Vacuum Congr. and 3rd Inter. Conf. on Solid Surfaces (Vienna, 1977), R. Dobrozemsky et al. Editors, Vol. 1, p. 639 J. Massies, P. Etienne, F. Dezaly, N.T. Linh: Surface Sci. 99, 121, (1980)

    Google Scholar 

  58. P. Drathen, W. Ranke, K. Jacobi: Surface Sci. 77, L 162 (1978)

    Google Scholar 

  59. R.Z. Bachrach, R.S. Bauer, P. Chiaradia, G.V. Hansson: J. Vac. Sci. Technol. 19, 335, (1981)

    Article  CAS  Google Scholar 

  60. C.T. Foxon, B.A. Joyce: J. Crystal Growth 44, 75, (1978)

    Article  CAS  Google Scholar 

  61. R. Ludeke: J. Vac. Sci. Technol. 17, 1241, (1980)

    Article  CAS  Google Scholar 

  62. A.Y. Cho, I. Hayashi: J. Appl. Phys. 42, 4422, (1971)

    Article  CAS  Google Scholar 

  63. R. Nottenburg, H.J. Buhlmann, M. Frei, M. Illegems: Appl. Phys. Lett. 44, 71, (1984)

    Article  CAS  Google Scholar 

  64. A. Saletes, J. Massies, G. Neu, J.P. Contour: Electron. Lett. 20, 872, (1984)

    Article  CAS  Google Scholar 

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Author information

Authors and Affiliations

  1. Laboratoire Physique du Solide et Energie Solaire, CNRS Sophia Antipolis, F-06560, Valbonne, France

    J. Massies

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  1. J. Massies
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Editor information

Editors and Affiliations

  1. Laboratoire de Physique des Solides, ISEN, 41 Boulevard Vauban, F-59046, Lille Cedex, France

    Guy Allan  & Michel Lannoo  & 

  2. Laboratoire de Physique, Ecole Normale Supérieure, 24 rue Lhomond, F-75231, Paris Cedex 05, France

    Gérald Bastard  & Michel Voos  & 

  3. Université Scientifique et Médicale de Grenoble, Centre de Physique, Côte des Chavants, F-74310, Les Houches, France

    Nino Boccara

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© 1986 Springer-Verlag Berlin Heidelberg

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Massies, J. (1986). Molecular Beam Epitaxy of III-V Compounds. In: Allan, G., Lannoo, M., Bastard, G., Voos, M., Boccara, N. (eds) Heterojunctions and Semiconductor Superlattices. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-71010-0_15

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  • DOI: https://doi.org/10.1007/978-3-642-71010-0_15

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  • Online ISBN: 978-3-642-71010-0

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