Abstract
In contrast to traditional solid state physics, the physical properties of thin solid films are to a large extent defined by the properties of their surfaces and internal interfaces. Despite of material properties, geometrical parameters like film thickness are therefore essential for adequate description of their properties. For accurate and reproducible adjustment of material and geometrical film properties, numerous film deposition and growth monitoring techniques have been developed and optimized.
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Stenzel, O. (2014). Introduction. In: Optical Coatings. Springer Series in Surface Sciences, vol 54. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-54063-9_1
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DOI: https://doi.org/10.1007/978-3-642-54063-9_1
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