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High Precision Control for Nano-stage Driven by Magnetostrictive Actuator

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Intelligent Robotics and Applications (ICIRA 2013)

Part of the book series: Lecture Notes in Computer Science ((LNAI,volume 8103))

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Abstract

The nano-stage driven by magnetostrictive actuator is composed of a magnetostrictive actuator and a positioning mechanism (PM). Due to the existence of hysteretic nonlinearity in the magnetostrictive actuator and the friction behavior in the PM, the accurate position control of the nano-stage is a challenging task. This paper discusses the high precision control for the magnetostrictive nano-stage, where the hysteresis is described by Preisach model. The proposed control law ensures the zero output tracking of the controlled stage. Experimental results show the effectiveness of the proposed method.

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Author information

Authors and Affiliations

  1. Department of Electronic and Information Systems, Shibaura Institute of Technology, Minuma-ku, Saitama-city, Saitama, 337-8570, Japan

    Xinkai Chen

  2. School of Automation Science and Engineering, South China University of Technology, Tianhe District, Guangzhou, 510641, P.R. China

    Chun-Yi Su

Authors
  1. Xinkai Chen
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  2. Chun-Yi Su
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Editor information

Editors and Affiliations

  1. Department of Electrical Engineering, Pusan National University, South Korea

    Jangmyung Lee

  2. School of Mechanical Engineering, Pusan National University, Busan, South Korea

    Min Cheol Lee

  3. Intelligent Systems & Biomedical Robotics Group, School of Creative Technologies, University of Portsmouth, PO1 2DJ, England, UK

    Honghai Liu

  4. School of Mechanical Engineering, Biorobotics Laboratory, Korea University of Technology and Education, Gajeon-ri Byeongcheon-myeon 307, 330-708, Cheonan, Korea

    Jee-Hwan Ryu

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© 2013 Springer-Verlag Berlin Heidelberg

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Chen, X., Su, CY. (2013). High Precision Control for Nano-stage Driven by Magnetostrictive Actuator. In: Lee, J., Lee, M.C., Liu, H., Ryu, JH. (eds) Intelligent Robotics and Applications. ICIRA 2013. Lecture Notes in Computer Science(), vol 8103. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-40849-6_66

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  • DOI: https://doi.org/10.1007/978-3-642-40849-6_66

  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-40848-9

  • Online ISBN: 978-3-642-40849-6

  • eBook Packages: Computer ScienceComputer Science (R0)

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