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Nano/Micro-Tribological Properties of MEMS/NEMS Materials

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Nano-tribology and Materials in MEMS

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Abstract

Micro/Nano-Electro-Mechanical Systems (MEMS/NEMS) are miniaturized devices built at micro/nano-scales. At these scales, surface forces such as adhesion and friction undermine the smooth operation and operating lifetimes of the MEMS/NEMS components. MEMS/NEMS devices are traditionally made from silicon, whose tribological properties are poor. In order to enhance the tribological performance of silicon, researchers have investigated various thin films/coatings that include diamond-like carbon (DLC) coatings, self-assembled monolayers (SAMs), polymers (PMMA, PDMS and SU-8) and perfluoropolyether films (Z-15, Z-DOL and PFPE). The nano/micro-tribological properties of these materials are governed by several parameters such as their physical structure, chemical composition, surface properties that include surface energy/wettability and interfacial shear strength, and mechanical properties such as elastic modulus that influences the contact area. In this chapter, a brief overview on the nano/micro-tribological properties of adhesion, friction and wear durability of these MEMS/NEMS materials has been presented. Further, recent advancements in MEMS/NEMS structural materials and novel surface modification methods have also been mentioned.

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Authors and Affiliations

  1. Energy Research Institute @ NTU (ERIAN), Nanyang Technological University (NTU), Singapore, # 06-09, CleanTech One, 1 CleanTech Loop, 637141, Singapore

    R. Arvind Singh

  2. Department of Mechanical Engineering, National University of Singapore, 9 Engineering Drive 1, Singapore, 117576, Singapore

    N. Satyanarayana

  3. Department of Mechanical Engineering, Indian Institute of Technology, Kanpur, 208016, India

    Sujeet K. Sinha

Authors
  1. R. Arvind Singh
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  2. N. Satyanarayana
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  3. Sujeet K. Sinha
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Correspondence to R. Arvind Singh .

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Editors and Affiliations

  1. Department of Mechanical Engineering, Indian Institute of Technology, Kanpur, India

    Sujeet K. Sinha

  2. Department of Mechanical Engineering, National University of Singapore, Singapore, Singapore

    N. Satyanarayana

  3. Department of Mechanical Engineering, National University of Singapore, Singapore, Singapore

    Seh Chun Lim

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Arvind Singh, R., Satyanarayana, N., Sinha, S.K. (2013). Nano/Micro-Tribological Properties of MEMS/NEMS Materials. In: Sinha, S., Satyanarayana, N., Lim, S. (eds) Nano-tribology and Materials in MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-36935-3_9

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  • DOI: https://doi.org/10.1007/978-3-642-36935-3_9

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-36934-6

  • Online ISBN: 978-3-642-36935-3

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