Abstract
SOI MEMS provides a class of high dynamic range sensors with superior properties at the cost of lower bandwidth. The present work discusses the development and signal conditioning for one such acceleration sensor along with its back-end signal conditioning and a robust ΔΣ front-end output. Design stages and trade-offs are decided specific to applications and device capabilities. Co-simulation results for the device signal conditioning are found, and good linearity is observed in the same. The sensor hence designed aims specific to low bandwidth, low range, high precision applications in acceleration sensing.
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Juneja, D., Kar, S., Chatterjee, P., Sen, S. (2012). SOI MEMS Based Over-Sampling Accelerometer Design with ΔΣ Output. In: Rahaman, H., Chattopadhyay, S., Chattopadhyay, S. (eds) Progress in VLSI Design and Test. Lecture Notes in Computer Science, vol 7373. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-31494-0_14
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DOI: https://doi.org/10.1007/978-3-642-31494-0_14
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