Abstract
The harmonic and intermodulation performance of a two parallel-plate topology under electrostatic actuation formed of a multi-tone RF plus bias signal is presented. The special case of relatively small input amplitudes is considered in detail, and closed-form mathematical expressions for the even- and odd-order harmonics and intermodulation products of any order are obtained. The results show that the third-order intermodulation products type ω j +ω l –ω r are dominant. The results obtained are in excellent agreement with the previously reported measurements and simulation results.
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© 2011 Springer-Verlag Berlin Heidelberg
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Abuelma’atti, M.T. (2011). Harmonic and Intermodulation Performance of RF MEMS Variable Capacitors. In: Zheng, D. (eds) Advances in Electrical Engineering and Electrical Machines. Lecture Notes in Electrical Engineering, vol 134. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-25905-0_15
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DOI: https://doi.org/10.1007/978-3-642-25905-0_15
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