Skip to main content

Inverse Doping Profile of MOSFETs via Geometric Programming

  • Chapter
  • First Online:
Scientific Computing in Electrical Engineering SCEE 2010

Part of the book series: Mathematics in Industry ((TECMI,volume 16))

  • 1403 Accesses

Abstract

In this study, we optimize one-dimensional doping profiles between the interface of semiconductor and oxide to the substrate in metal-oxide-semiconductor field-effect transistors (MOSFETs). For a set of given current-voltage curves, the problem is modelled as a geometric programming (GP) problem. The MOSFET’s DC characteristics including the on- and off-state currents are simultaneously derived as functions of the doping profile in the GP problem.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

eBook
USD 16.99
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 109.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. Sze, S.M.: Physics of Semiconductor Device, 2nd edn., Wiley, New York (1981)

    Google Scholar 

  2. Djomehri, I.J., Antoniadis, D.A.: Inverse Modeling of Sub-100 nm MOSFETs Using I-V and C-V. IEEE Trans. Electron Dev. 49, 568–575 (2002)

    Article  Google Scholar 

  3. Li. Y., Yu, S.M.: A coupled-simulation-and-optimization approach to nanodevice fabrication with minimization of electrical characteristics fluctuation. IEEE Trans. Semiconductor Manufacturing 20, 432–438 (2007)

    Google Scholar 

  4. Leitao, A., Markowich, P.A., Zubelli, J.P.: On inverse doping profile problems for the stationary voltage-current map. Inverse Problems 22, 1071–1088 (2006)

    Article  MATH  MathSciNet  Google Scholar 

  5. Lahaye, D.J.P., Drago, C.R.: Exploiting model hierarchy in semiconductor design using manifold mapping. In: Roos, J., Costa, L. (eds.) Scientific Computing in Electrical Engineering SCEE 2008, vol. 20, pp. 445–452 (2010)

    Google Scholar 

  6. Boyd, S., Kim, S.J., Vandenberghe, L., Zubelli, J.P.: A tutorial on geometric programming. Opt. Eng. 8, 67–127 (2007)

    Article  MATH  Google Scholar 

  7. Kortanek, K., Xu, X., Ye, Y.: An infeasible interior-point algorithm for solving primal and dual geometric programs. Math. Prog. 76, 155–181 (1996)

    MathSciNet  Google Scholar 

  8. Boyd, S., Vandenberghe, L.: Convex Optimization, Cambridge, UK (2004)

    Google Scholar 

Download references

Acknowledgements

This work was supported in part by Taiwan National Science Council (NSC) under Contract NSC-97-2221-E-009-154-MY2 and NSC-99-2221-E-009-175.

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Yiming Li .

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 2012 Springer-Verlag Berlin Heidelberg

About this chapter

Cite this chapter

Li, Y., Chen, YC. (2012). Inverse Doping Profile of MOSFETs via Geometric Programming. In: Michielsen, B., Poirier, JR. (eds) Scientific Computing in Electrical Engineering SCEE 2010. Mathematics in Industry(), vol 16. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-22453-9_37

Download citation

Publish with us

Policies and ethics