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Depth Profiling

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Laser-Induced Breakdown Spectroscopy

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Abstract

This chapter describes laser-induced breakdown spectroscopy (LIBS) investigations for the determination of the thickness of coatings or the depth profile of an element in a surface layer.

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Authors and Affiliations

  1. Fraunhofer-Institut für Lasertechnik (ILT), Steinbachstr. 15, 52074, Aachen, Germany

    Dr. Reinhard Noll

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  1. Dr. Reinhard Noll
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Correspondence to Reinhard Noll .

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© 2012 Springer-Verlag Berlin Heidelberg

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Noll, R. (2012). Depth Profiling. In: Laser-Induced Breakdown Spectroscopy. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-20668-9_16

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  • DOI: https://doi.org/10.1007/978-3-642-20668-9_16

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  • Publisher Name: Springer, Berlin, Heidelberg

  • Print ISBN: 978-3-642-20667-2

  • Online ISBN: 978-3-642-20668-9

  • eBook Packages: Physics and AstronomyPhysics and Astronomy (R0)

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