Abstract
This paper will focus on current and future automotive applications of MEMS (Microelectromechanical Systems), and MST (Microsystem Technologies). Current product developments in pressure sensors, accelerometers, angular rate sensors, and other MEMS/MST devices are presented. Market figures for automotive electronics and automotive sensors from 2000-2005 are given. The migration from traditional electromechanical and discrete sensor solutions to those embodying MEMS/MST is addressed.
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References
R.H. Grace, “Semiconductor Sensors and Microstructures in Automotive Applications”, Sensors and Actuators, Society of Automotive Engineers International Conference Proceedings, 1991, pp.245–260.
C. Webber, “Automotive Sensor Market Trends”, Presented at 1999 Sensors Marketing Conference, Strategy Analytics, San Diego, CA, Feb. 1999.
R.H. Grace, “Commercialization Issues of MEMS/MST/Micromachines”, Sensors Expo Proceedings, Detroit, Michigan, September 2000.
R. Schelling, “A Low-Cost Angular Rate Sensor for Automotive Applications in Surface Micromachining Technology”, Third Annual International Conference on Advanced Microsystems for Automotive Applications Proceedings, March 1999.
I. Toshihiko, J. Terada, “Angular Rate Sensor for Automotive Application,” Sensors and Actuators, Society of Automotive Engineers International Conference Proceedings, 1995, pp. 49–56.
N. Weinberg et. al., “Micromachined Comb Drive Tuning Fork Gyroscope for Commercial Applications,” Sensors Expo Proceedings, Sept., 1994, pp. 187–194.
J. Johnson, S. Zarabaldi, D. Sparks, “Surface Micromachined Angular Rate Sensor, Sensors and Actuators”, Society of Automotive Engineers International Conference Proceedings, 1995, pp. 77–83.
M. Mattes, J. Seefeldt, “A One Chip, Polysilicon, Surface Micromachined Pressure Sensor with Integrated CMOS Signal Conditioning Electronics,” Society of Automotive Engineers International Conference Proceedings, 1996, pp. 29–34.
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© 2001 Springer-Verlag Berlin Heidelberg
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Grace, R.H. (2001). Application Opportunities of MEMS/MST in the Automotive Market: The Great Migration from Electromechanical and Discrete Solutions. In: Krueger, S., Gessner, W. (eds) Advanced Microsystems for Automotive Applications 2001. VDI-Buch. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-18253-2_1
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DOI: https://doi.org/10.1007/978-3-642-18253-2_1
Publisher Name: Springer, Berlin, Heidelberg
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