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Resonant Piezoceramic Sensors

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Piezoceramic Sensors

Part of the book series: Microtechnology and MEMS ((MEMS))

Abstract

Resonant piezoceramic sensors are prospective devices with rather high technical and metrological characteristics and numerous applications. These sensors are used for various measurements: of mechanical (forces and pressure; static, including linear and vibrating accelerations), electric and magnetic values, temperature, viscosity, humidity, movement, etc. In addition, these transducers are used in piezoelectric engines, gyroscopes, automatic devices, communication, computer facilities, etc. [3, 23, 29, 30, 33, 50, 57, 58].

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Authors and Affiliations

  1. Instrument-making, Cherkasy State Technological University, Shevchenko blvd. 460, 18006, Cherkasy, Ukraine

    Professor Valeriy Sharapov

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  1. Professor Valeriy Sharapov
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Correspondence to Valeriy Sharapov .

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Sharapov, V. (2011). Resonant Piezoceramic Sensors. In: Piezoceramic Sensors. Microtechnology and MEMS. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-15311-2_14

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