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Laser Ablation and Thin Film Deposition

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Laser Processing of Materials

Part of the book series: Springer Series in Materials Science ((SSMATERIALS,volume 139))

Abstract

One of the most versatile deposition techniques in solid-state physics and analytical chemistry is the vaporization of condensed matter using photons. A short-pulsed high-power laser beam is focused onto a sample surface thereby converting a finite volume of a solid instantaneously into its vapor phase constituents such as ions and neutrals. Subsequently, the vapor moves away from the target at a high velocity and can be sampled either to grow a film or being analyzed by various spectroscopic techniques. In this chapter, the focus is on general properties of pulsed laser ablation relevant for solid-state physics like the initial ablation processes, plume formation, and plume properties. Next, oxide thin film growth will be discussed and the growth of LaAlO3/SrTiO3 heterostructures is presented as one example of tailoring oxide interfaces with surprising properties. The final discussion is on the topic of polymer ablation.

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  1. Materials Group, General Energy Research Department, Paul Scherrer Institut, CH-5232, Villigen PSI, Switzerland

    Christof W. Schneider

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  1. Institut für Werkstofftechnik und, Zentrum für Mikro- und Nanotechnologien, TU Ilmenau, Ilmenau, Germany

    Peter Schaaf

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Schneider, C.W., Lippert, T. (2010). Laser Ablation and Thin Film Deposition. In: Schaaf, P. (eds) Laser Processing of Materials. Springer Series in Materials Science, vol 139. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-13281-0_5

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