Abstract
Height-dependent variations in fringe visibility related to optical coherence in an interference microscope provide a powerful, non-contact sensing mechanism for 3D measurement and surface characterisation. Coherence scanning interferometry extends interferometric techniques to surfaces that are complex in terms of roughness, steps, discontinuities, and structure such as transparent films. Additional benefits include the equivalent of an autofocus at every point in the field of view and suppression of spurious interference from scattered light.
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de Groot, P. (2011). Coherence Scanning Interferometry. In: Leach, R. (eds) Optical Measurement of Surface Topography. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-12012-1_9
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DOI: https://doi.org/10.1007/978-3-642-12012-1_9
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