Abstract
Silicon photonics will increasingly be adopted into commercial applications as the technology matures, and the demand for foundries is growing as companies search for photonic integrated chip (PIC) manufacturing support. The accessibility to foundries becomes a critical aspect for technology advancement and volume production. Foundry services for multi-project wafer (MPW) shuttles, customized process runs, and small volume production are discussed in this chapter. Results and challenges in setting up a CMOS manufacturing foundry line for silicon photonics research and development along with commercialization are also presented. The existing gap in the value chain presents an opportunity for foundries to be involved in a silicon photonics market that is primed for growth.
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Acknowledgment
This work was supported by the Science and Engineering Research Council of Agency for Science, Technology, and Research (A∗STAR), Singapore, and Exploit Technologies Pte Ltd (ETPL), Singapore under Silicon Photonics Commercialization Flagship Grant ETPL/11-R15FSH-00. The technology transfer to GLOBALFOUNDRIES was funded by Exploit Technologies Pte Ltd (ETPL), A*STAR under Silicon Photonics Commercialization Flagship Grant ETPL/11-R15FSH-001. The authors would like to acknowledge GLOBALFOUNDRIES Fab 3/5, Singapore, as well as P. Dong and Y. K. Chen from Bells Lab, Alcatel-Lucent for the collaborative efforts in IME’s silicon photonics technology platform transfer, and to Michael Hochberg, Tom B. Jones, and team in collaboration for OpSIS and related work.
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Lim, A.EJ. et al. (2016). Path to Silicon Photonics Commercialization: The Foundry Model Discussion. In: Pavesi, L., Lockwood, D. (eds) Silicon Photonics III. Topics in Applied Physics, vol 122. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-642-10503-6_6
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